Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators C 5 C Max. 4 20 4 Without stroke adjuster 2 x M4 x 0.7 depth 6 G Max. 3 M 7.5 Stroke: S C 2 x M3 x 0.5 depth 4 11-/22-MXP12-15 A Width across flats 2 H 14 Width across flats 7 Piping port 4 x M4 x 0.7 depth 4.5 17.8 M4 x 0.7 8.5 2 x M5 x 0.8 8 4 (Plug: MGP12-08-CA001-R) 4.2 25 24 8.5 A 0 +0.030 depth 3 3 3 0 +0.030 depth 3 1.5 19 220.05 4 x

VXR21/22/23

Frequency (Hz) 50 20 11 60 17 7 Model Power source AC VXR21 50 40 18 60 35 12 DC AC VXR22 50 50 21 60 45 17 DC AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C) Ambient temperature (C) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature water (2) (D) High temperature oil (2) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

segments), Sub screen (Left): 4 digits (some digits are 11-segments, 7 segments for other), Sub screen (Right): 5 digits (some digits are 11-segments, 7 segments for other) Indicator light Lights up when switch output is turned ON.

Information

Refer to SSCNET III optical cable on page 15 for cable models. 1 2 LECSS (Axis n) Note 6) CN1A SW1 CN1B SW2 Note 7) Cap Note 8) 1 2 Cable Cable length Cable model LE-CSS-m SSCNET III optical cable 0.15 m to 3 m Note 6) Connections from Axis 2 onward are omitted. Note 7) Up to 16 axes can be set.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

(mm) Dimensions G H J K A B C D E F L M N P Q R V Model LVD1m-Sm LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm 4 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52

Compact Cylinder

[mm] O1 thread R R Bore size O1 R 20 M4 x 0.7 7 25 M4 x 0.7 7 32 M5 x 0.8 8 40 M5 x 0.8 8 Minimum lead wire bending radius 10 Auto switch F Q H thread effective depth C 4 x N through 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size) I D E M Z A

Sensor Monitor

Conductor size (mm2) Overall diameter (mm) Colour of cover SMC product No. (1 pc.) 0.8 to 1.0 Red ZS-28-C 26-24 0.14-0.2 1.0 to 1.2 Yellow ZS-28-C-1 (28) (0.08) 1.2 to 1.6 Orange ZS-28-C-2 1.0 to 1.2 Green ZS-28-C-3 22-20 0.3-0.5 1.2 to 1.6 Blue ZS-28-C-4 1.6 to 2.0 Gray ZS-28-C-5 Do not cut the insulator.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Low leakage 1.3 x 10-7 Pam3/sec Leakage:1.3 x 10-7 Pam3/sec or less (at normal temperatures, excluding gas permeation) MX 10-7 Standard value Note 1) The data indicates the leakage measured in a vacuum environment of 105 Pa.

Compact Cylinder with Solenoid Valve/

C Example) Bolt M5 x 45L: 4 pcs.

Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Width across flats P Width across flats P M14 x 1 M14 x 1 Width across flats 19 Width across flats 19 5 5 I I 5 D C 5 D C K H F K H F Width across flats 7 Width across flats 7 Width across flats 12 M8 x 1.25 Width across flats 12 M8 x 1.25 Width across flats 12 Width across flats 3 3 Y 2.5 2 A B A B With a stroke of 20 to 50mm With a stroke of 20 to 50mm Dimensions/10mm stroke Dimensions

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Retaining rings are included. 8 25 14 Type C 5 Type C 5 6.4 12 1.5 0.7 1.5 0.7 5 5 5 4.8 4.8 M5 x 0.8 22.7 18.3 16.6 12.2 Double Knuckle Joint Mounting Nut Rod End Nut d d MM L ND hole H10 Shaft d9 R1 12 C C + 0.2 0 + 0.2 0 A1 L1 NX U1 12 7 B H B H Knuckle pin and retaining ring are packaged together.

XSA Series

Caution 4 XSA-OMS0001-A (5) Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor, C-R element, etc., creating a possible danger that the valve may not turn off. passes through the C-R device.

MHS

1 ISO VG32 4 4-1 1 2 3 14 4-2 MHS2 MHS3 MHS4 C O O MHS2MHS4 MHS3 15 MHSJ3 C J O O J J J 16 MHSH3 C A O O O A A 17 / / C S (P) P O O S O P P C / ; ; ; ; C 18 4-3 3 MHS2 MHS3 MHS4 1 C C 4 2 5 mm Nm 16 M30.5 2.5 0.6 20 M30.5 2.5 0.6 25 M40.7 3 1.4 32 M50.8 4 5.1 40 M50.8 4 5.1 50 M61 5 8.6 63 M81.25 6 21.6 80 M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7

3 Position Cylinder Series RZQ

(mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 32 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc 1/8 24.5 14 10 5.5 7 4.5 49.5 14 40 110 92 28 14 M10 x 1.5 26 57 16 52 35 9 69 5 24 18 40 5.5 M6 x 1.0 9 Rc 1/8 14 10 5.5 7 4.5 14 50 118.5 96.5 M8 x 1.25 35 14 M10 x 1.5 30 71 16 64 37 12 86 7 30 22 50 6.6 11 Rc 1/4 17 14 3 8 5.5 19

ZPT/ZPX

C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT100HB-A16 ZPT100HB-B12 M12 x 1.75 100 103 68.5 107 47.5 60.5 90.5 35.5 100 103.1 68.6 106.7 47.5 60.5 35.5 ZPT125HB-A16 -B16 M16 x 1.5 125 128.5 88.5 135 56 69 99 44 ZPT125HB-B12 M12 x 1.75 125 128.5 88.6 135 56 69 44 -B16 M16 x 1.5 13-11-88 7 Vacuum Pad: Large Size Bellows Type Vertical Vacuum Entry

CEx-OMQ0011

c. d. - 3. 3. 3. 3. 1. 1. 1. 1. a.560 b.2585%RH c. d. e.

NCA1

Rod Jam Nut Rod Eye 2xCD CB ER CD Thread CD F CA H C A KK Dimensions Dimensions Thread 3/4-16UNF 1-14UNF 1 1/4-12UNF Part No. NI-325 NI-800 NI-1000 A 1 1/8 1 5/8 2 CA 2 1/16 2 13/16 3 7/16 CB 1 1/4 1 1/2 2 CD 3/4 1 1 3/8 ER 7/8 1 3/16 1 9/16 KK 3/4-16 1-14 1 1/4-12 Weight (lbs) 0.39 1.04 2.37 Part No.

IDX-OM-N030

Display of condition 0 1 0 1 0 1 2 3 2 3 Controller 4 5 4 5 6 7 6 7 2 3 4 5 6 7 Enlarged view Display Content Protective equipment Condition On Normal 0 Phase reverse relay Automatic reset type Off The power supply is incorrectly connected or interrupted. On Normal 1 Compressor thermal relay Manual reset type Off Over current is flowing to the compressor.