Model: 41 (AC), Bar Length: 64 (640mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 7H (ø1/4" Straight), Plug Position: Q (High-voltage Cable Side), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 5 (5m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &

Model: 41 (AC), Bar Length: 214 (2140mm), Emmiter Cartridge, Material: L (High Energy Saving De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: BH (ø3/8" Straight), Plug Position: Q (High-voltage Cable Side), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller

Model: 41 (AC), Bar Length: 64 (640mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1)

Model: 41 (AC), Bar Length: 88 (880mm), Emmiter Cartridge, Material: E (High Speed De-ionizing Cartridge, Silicon), High-voltage Cable Length: 1 (1m), One-touch Fitting: BL (ø3/8" Elbow), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: N (None), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller

Model: 41 (AC), Bar Length: 16 (160mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &
High-voltage Power Supply

Model: 41 (AC), Bar Length: 46 (460mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: BH (ø3/8" Straight), Plug Position: Q (High-voltage Cable Side), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &

Model: 41 (AC), Bar Length: 16 (160mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1)

Model: 41 (AC), Bar Length: 16 (160mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 7H (ø1/4" Straight), Plug Position: Q (High-voltage Cable Side), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &

------1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

EX600-WEN_WSV.eng

SWITZERLAND (41) 052 396 31 31 Dorfstrasse 7, CH-8484, Weisslingen, Switzerland Diagnostic Step 3 Connection to PLC UNITED KINGDOM (44) 0845 121 5122 Note) Refer to the operation manual of the PLC manufacturer for connection to PLC and Configurator.

EXxx-OMV0028.eng

Remote connection system status Specification Str Frunzei 29, Sector 2, Bucharest, Romania W-MS SLOVAKIA (421) 41 321321 1 Remote (EX600-WSV#) can be used regardless of the communication specification of the base. (3) Set the "base" system.

Sensor Monitor

Sub display (left) setting Set the sub display (left) from the selection list on page 41. Press the button to set. Move to sub display (right) setting. Return to function selection mode. Sub display (right) setting Set the sub display (right) from the selection list on page 41. Press the button to set. Return to function selection mode.

Digital Flow Switch

and terminology 12 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Outline of Settings [Measurement mode] 21 Flow Setting (set value only) of OUT1 OUT2 [3 step setting mode] 22 Default settings 22 Function Setting [Function selection mode] 24 Default settings 25 F0 Reference condition/Unit selection function 26 F1 Setting of OUT1 28 F2 Setting of OUT2 36 F3 Response time 41

LFE-OMZ0012

Apply a tool Width across flats of attachment Port size Width across flats 3/8 24 mm 1/2 28 mm 3/4 35 mm Turn the pipe 1 41 mm Ensure that the piping is tightened to the required torque. The tightening torque for connection threads is shown in the table below.

DOC1001322

usage time of dustproof filter .5-26 5.4.6 Software version screen .5-27 5.4.7 Setting screen .5-27 Temperature rise/drop alarm (AL10/AL11).5-28 TEMP READY alarm (AL12) of TEMP READY function .5-30 Offset (TEMP OFFSET) function .5-33 Pump operation mode .5-36 Discharge pressure alarm (AL18/AL19/AL20) .5-37 Electric conductivity and alarm setting (AL28) .5-39 5.4.8 Function setting screen .5-41

High Vacuum L Type Valve

XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

K35-OMW0030

Residual Pressure Release . 41 7-7. Functions of LED Alarm Display . 42 7-8. Priority of Operation Mode . 43 7-9. Fail-safe function . 43 7-10. HART Communication protocol . 44 7-11. Operation Examples (Timing Chart) . 45 8. Replacement of parts . 52 8-1-1. Disassembly of the controller assembly . 52 8-1-2. Assembly of the controller assembly . 53 8-2-1.

MX-OMP0051

21.2 21.2 32.9 33.9 33.9 33.9 46.9 46.9 32.9 71.9 71.9 16 D-F8 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 16 5.4 5.4 5.4 5.4 14 14.6 17.6 19.6 19.6 MXQ8(A,C) 11.9 11.9 11.9 11.9 11.9 11.9 19.1 19.1 19.1 25.1 42.1 19.1 MXQ12(A,C) 14.5 14.5 14.5 14.5 14.5 14.5 14.5 28.1 20.1 20.1 28.1 28.1 47.1 47.1 MXQ16(A,C) 18.6 18.6 18.6 18.6 18.6 18.6 18.6 18.6 34 28 28 35 35 41