VDW

L Dimension (mm) n (stations) Dimension 2 3 4 5 6 7 8 9 10 L1 44 66 88 110 132 154 176 198 220 L2 53 75 97 119 141 163 185 207 229 L3 62 84 106 128 150 172 194 216 238 2 stns. x 1 Manifold composition 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 Note) Manifold base is consisted of the junction of 2

Digital Gap Checker ( compatible)

Distance equation 8000 0X1F40 0 R measurement 8010 0X1F4A 0 R Intercept b F32 N value set range". 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

) TT TT UU YH H2 H1 2 x P PP NC Cushion needle G GB N A 2 x P P (Hexagon socket head taper plug) (Hexagon socket head taper plug) Z + Stroke 2 x 2 x J depth K 2 x ZZ VV 2 x ZZ VV WW XX WW XX (Hexagon socket head taper plug) (Hexagon socket head taper plug) Long hole for stroke adjustment (Adjustment range: 0 to TL mm) L1 MY1H-EZ (Right end) MY1H-FZ (Left end) Standard piping/Centralized piping

IDX-OM-W019

2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Tie Down . 2 3 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring diagram . 2 4 2 3 Cautions about reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3

HRL

capacity Particle filter nominal filtration rating (Accessory) m 5 5 5 5 5 5 Circulating fluid outlet, circulating fluid return port CH1: Rc1 (Symbol F: G1, Symbol N: NPT1)/CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Tank drain port CH1: Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4)/CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) CH1: Stainless steel, Copper (Heat exchanger brazing)*10, Brass

AC Servo Motor Driver (MECHATROLINK-II type)

Meaning When Parameter Classification Enabled n.1 [Factory setting] Inputs the Forward Run Prohibited (P-OT) signal from CN1-7. Pn50A n.8 Disables the Forward Run Prohibited (P-OT) signal. Allows constant forward rotation. After restart Setup n.2 [Factory setting] Inputs the Reverse Run Prohibited (N-OT) signal from CN1-8. Pn50B n.8 Disables the Reverse Run Prohibited (N-OT) signal.

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External pilot solenoid 1 Y A G 1 T Z B1 10 1 70 2 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series w Valve type e Seal material 70 r Pressure range t Thread type y Port size 1 2 3 4 1 2 A B 10 15 20 25 Nil G N T SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

Compact Vacuum Unit

2 outputs Body type: Only for the combination of the elbow type body and the 4 mm one-touch fitting, add the suffix -N to the part number.

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

MHL2

D2012-4-1 2 Parallel Style Wide Opening Air Gripper Series MHL2 Size: 10, 16, 20, 25, 32, 40 How to Order D 16 MHL 2 1 Y7BW S Wide opening Number of auto switches 2 pcs. 1 pc. n pcs.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

8 n-1/4 (OUT port) 17.25 17.25 P = 34.5 2 L dimensions n (stations) Dimensions 9 3 4 7 2 5 6 10 8 L1 310.5 103.5 138 241.5 69 172.5 207 345 276 L2 322.5 115.5 150 253.5 81 184.5 219 357 288 L3 334.5 127.5 162 265.5 93 196.5 231 369 300 3 stns. x 3 3 stns. x 1 2 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. x 1 Manifold composition 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 2 stns.

MQQ

M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB F Q Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4

Modular Style Regulator with Built-in Pressure Gauge Series ARG

3/8, 1/2 Pages 24 to 28 19 Regulator with Built-in Pressure Gauge Series ARG20/30/40 How to Order ARG 20 01 G1 Option Description 0.02 to 0.2 MPa setting Non-relieving type Name plate and pressure gauge in imperial units (PSI) Symbol Nil 1 N Z Body size (2) Symbol 20 30 40 Port size 1/8 3/8 1/2 ARG20 (3) When more than one specification is required, indicate in ascending alphanumeric order

2–4

Standard without auto switch: 12 and 16; 5 stroke, 25; 5 to 10 stroke Built-in magnet with auto switch: 20; 5 stroke 6 Series CQM Dimensions 32 to 50 2-HA through Auto switch 2-P 2-HB through V KA F Q U 2 x 2-OB counterbore with depth RB 2-N through IB IA EA EB EC M 22 Z 11 Min. lead wire bending radius 10 (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2

Series VCL

1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231

SMC Pneumatic Clean Series

W L 16 60 H7B 21 C D J 2 W L 16 60 H7B Number of auto switches 2 pcs. 1 pc. n pcs.

CEx-OMG0106

ML2B / W1 ML2B / M1 0 0 0 0 Momentum Nm 0 0 Load N 0 Piston Speed m/s Piston Speed m/s ML2B / W2 ML2B / M2 Momentum Nm Load N Piston Speed m/s Piston Speed m/s ML2B / W3 ML2B / M3 20 10 Momentum Nm 5 Load N 3 2 1 Piston Speed m/s Piston Speed m/s ML2B / W4 Allowable Kinetic Energy 00 H or izontal M ounting 100 5 00 Ver tical M ounting 50 Load N 0 0 1 00 Load N 0 50 5 Piston Speed

Digital Flow Switch ( compatible)

flow value 0 R Accumulated index F32 N 0 to 6 8040 0x1F68 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

Digital Pressure Switch ( compatible)

Number of pressurizing errors 0X07D4 (2004) 0 R N U16 0 0 ~ 1000 1: "R" means Read and "W" means Write. 2: "Y" indicates that the parameter setting data is saved to the master, and "N" indicates that the parameter is not saved. 3: Refer to the table below for the symbol.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Mey = 1/3 x 3.36 x 9.8 x (50+19)/1000 = 0.76 We = 3.36 A3 = 19 Obtain Meay = 4.2 from Va = 420 in Graph (2). 2' = 0.76/4.2 = 0.18 pitch, yaw moment: Graph (2) 2 = Me/Mea Meay Nm 4.2 420 V mm/s 3-3 Sum of the Load Factors 1 + 2 + 2' = Applicable because 0.008 + 0.15 + 0.18 = 0.34 < 1 Use is possible if the sum of the load factors does not exceed 1. 1 + 2 < 1 8-9-6 6 Model Selection Series