Clean Room Rodless Cylinder Series CYP ø15, ø32

) Port size M5 x 0.8 Rc 1/8 Weight (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYP15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYP32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnetic Holding Force Magnetic holding force (N) Bore size (mm) 15 59 32 268 Theoretical Output (N) Piston area (mm) Operating pressure (MPa) Bore size (mm) 0.2 0.3 0.1 15 35 53 18

EX500

1 End plate 66 2 x M4 (mounting hole) EX9 EA03 12.5 10 60 13.2 75 6 18 1694

VZ5000

Compact size (Width: 18 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing.

Thermo-dryer

) 66.2 (19) 68 (20) 69.8 (21) 71.6 (22) 73.4 (23) 75.2 (24) 77 (25) 78.8 (26) 80.6 (27) 82.4 (28) 84.2 (29) 86 (30) F (C) 59 (15) 60.8 (16) 62.6 (17) 64.4 (18) 66.2 (19) 68 (20) 69.8 (21) 71.6 (22) 73.4 (23) 75.2 (24) 77 (25) 78.8 (26) 80.6 (27) 82.4 (28) 84.2 (29) 86 (30) Maximum value of the outlet air set temperature Maximum value of the outlet air set temperature [Note] Select so that

VR4151/4152

6 Component Parts No. 1 2 3 4 5 6 7 8 9 Description Description Material Diecast aluminum Diecast aluminum Rolled steel Aluminum alloy Brass Aluminum alloy Aluminum alloy Aluminum alloy Brass Material Stainless steel H-NBR Stainless steel Note Note Urban gray Urban white Nickel plated No. 10 11 12 13 14 15 16 17 18 Cover Body Plate Spool valve Orifice Valve seat Valve guide B Valve guide

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

DOWN button SET button UP button Lead wire length 600 3.5 (3000) 10 39 8.5 01: R 1/8 T1: NPTF 1/8 2 x 3.5 Mounting hole 13 M5 x 0.8 770 LCD Readout Digital Pressure Switch Series ZSE3/ISE3 ZSE3-0XGrommet type 7 50.6 Vacuum supply port Vacuum pad connection port 20.5 RESET button DOWN button Pneumatic circuit SET button UP button Lead wire length 600 51.5 (3000) ZSE ISE ZSP 58 PS PV ISA 18

Card Motor

ALARM is expressed as negative-logic circuit. 10 Series LATC4 Options [Actuator cable] Actuator cable LATH1 1 Controller Actuator Actuator side Controller side Cable length (L) 1 3 5 L (25.5) (25.5) 1 m 3 m 5 m (18) (21) (5.2) Raised area (7) (9) Note ) The actuator cable is direction dependent. Make sure to connect the Card Motor side of the cable to the Card Motor and vice versa.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Auto Switch Internal Circuit D-G59 Mass (g) DC (+) Brown Main circuit of switch Main circuit of switch Main circuit of switch D-G59 D-G5P D-K59 Auto switch model OUT Black 18 20 20 0.5 Lead wire length (m) 68 78 78 3 DC () Blue 108 124 124 5 D-G5P Dimensions (mm) DC (+) Brown OUT Black DC () Blue D-K59 Indicator light OUT (+) Brown 4.5 mounting hole OUT () Blue DMost sensitive position 1279

VZM400

Roller plunger VZM450-01-06 VZM450-01-06S Panel mounting hole 12 polyacetal or hard steel roller Hexagon nut thick 8, across flats 22 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 1.5 mm P.T. 18 N F.O.F. 2-3.5 mounting hole 2.0 mm O.T. 3.5 mm T.T. Toggle lever VZM450-01-08 T.T.

ZM

Note) G thread The thread ridge shape is compatible with the G thread standard (JIS B0202), but other shapes are not conforming to ISO16030 and ISO1179. 1 output, without analog output, Diaphragm (18 rotation setting), Solid state(10 to 26 VDC) (ZSM1) 1 output, without analog output, Diaphragm (18 rotation setting), Reed (AC/DC 100 VAC)(ZSM1) Supply valve/Release valve combination Manual

Safety Speed Control Valve (SSC Valve) Series ASS

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-15-1

CYV

35 53 176 32 268 32 80 161 241 804 8-18-7

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 8.0/9.0 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 Circulating uid system Rated ow 50/60 Hz (Outlet)6 L/min 29/45 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz7 L/min 29/45 Tank capacity L 18

Floating Joint: Standard Type JA Series

thread size Pneumatic cylinder: 1 MPa or less Hydraulic cylinder: 3.5 MPa or less Maximum operating tension and compression force (N) Basic type Flange type Foot type Model Applicable bore size (mm) Allowable Rotating angle Ambient eccentricity U (mm) Operating pressure temperature Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18

Floating Joint Light Weight Type for Light Load JC Series

Floating Joint Light Weight Type for Light Load JC Series RoHS Model/Specifications Applicable cylinder nominal thread size Model Applicable cylinder bore size (mm) Maximum operating tensile and compressive force (N) Allowable eccentricity (Umm) Rotating angle Basic type Standard/Thread nominal size JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 20 25/32 40 50/63 M8 x 1.25 M10 x 1.25 M14

Compact Cylinder Double Acting, Single Rod JCQ Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

OUT 1963 393 589 785 982 1178 1374 IN 1709 342 513 684 855 1025 1196 63 18 OUT 3117 623 935 1247 1559 1870 2182 IN 2863 573 859 1145 1431 1718 2004 80 22 OUT 5027 1005 1508 2011 2513 3016 3519 IN 4646 929 1394 1859 2323 2788 3252 100 26 OUT 7854 1571 2356 3142 3927 4712 5498 IN 7323 1465 2197 2929 3662 4394 5126 3

Series IRV10/20 Vacuum Regulator

When the Rc1/8 port is required, please order the optional gauge nut assembly P601010-18 separately. (Refer to page 8.) Note 2) Pressure gauge accuracy: Within 3% of full scale Note 3) Gauge nut is included. Accessories are included in the same container. Elbow Straight Connection tubing O.D. Bracket Symbol Tubing O.D.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

1538 855 684 1709 1367 1196 1025 513 342 1709 IN 2806 2182 1870 3117 2494 1559 1247 935 623 3117 OUT 63 18 2863 1718 859 2863 2576 2290 2004 1431 1145 573 IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) D-X 499

KV2

NPT 3/8 18 NPT 1/2 14 NPT 3/4 14 NPT 1/16 27 NPT 0.313 Diameter 0.453 Diameter 0.540 Diameter 0.666 Diameter 0.840 Diameter 1.050 Diameter 2

VXB

Fluid Nil No L Yes Thread type*1 5 Steam Nil Rc A G B NPT Body material/Port size/Orifice diameter Symbol Body material Port size Orice diameter A Bronze (CAC) *1 The thread type for the main piping and pilot piping is the same. 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type 3/8 11 E 1/2 14 F 3/4 18 Nil Standard H High pressure Other Special Options Special Entry