Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

HRX-OM-Y120

Analog output 2 1 Signal the contents of the contact output 1 to 3 is a fixed value.

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

60

r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(Part 1: General requirements) ISO 10218-1: Manipulating industrial robots Safety. etc. Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

NCRAI seies

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

rep-modular-e

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CG5-S

See page 44 for more information regarding seal replacement.Note) A grease pack (GR-R-010, 10g) is included in seal kits. Note) A grease pack (GR-R-010, 10g) is included in seal kits. 9 Stainless Steel Cylinder Series CG5-S Dimensions R V Basic type (B)/CG5BNS : With rubber bumper X165US inch rod option dimensional changes Dim.

VG342

Flow Characteristics With DIN terminal block Port size Flow characteristics With terminal block 1 2 (P A) b Cv C [dm 3/(sbar)] 2 3 (A R) b Cv C [dm 3/(sbar)] 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) Ground

Basic Type/Direct Mount Type

2 r CY3R6 @3 @7 o u y t @8 !9 @2 18a CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t !9 @2 18a CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 @2 @3 @5 @8 @7 o u !7 t 18a CY3R15, 20 CY3R15 Component Parts No. Description Body End cover A End cover C End cover B End cover D Cylinder tube No.

Ｍ icro Mist Separator Regulator

Rc G Rc G AD27-6C-A AD27-6-A NPT AD27-6C(Z)-A NPT AD27-6(Z)-A C Note 1) Option symbol 2 Semi-standard symbol Semi-standard: 2 Piping port thread ty pe (9) Part No. Rc G NPT AD27-2(Z)-A AD27-2-A Appearance and part No. Note 1) Minimum operating pressure is 0.1 MPa. Note 2) Part No. (9) includes Bowl seal (8). Refer to section [12. Disassembly Drawing] (P38).

Mist Separator Regulator

Rc C3LF-8J-A Rc C3LF-8-A G C3LFF-8J-A G NPT C3LFN-8J(Z)-A NPT C3LF-8(Z)-A Appearance and part No. C Note 1) C Note 1) Option symbol Semi-standard symbol 6 2 Semi-standard: 2 Semi-standard: Piping port thread ty pe (9) Part No. Piping port thread ty pe (9) Part No. Rc G NPT AD37N-2(Z)-A Rc G NPT AD37N(-Z)-D AD37-2-A AD37-D Appearance and part No.

Low-Speed Rotary Actuator

Round plate (Including column) Position of rotational axis: Through the center Number of teeth = a (B) axis 1. Find the moment of inertia I for the rotation of shaft (B). r B 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth = b 5.

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

# # CB LH LB LY With head cover port in axial location (R) LT BB NB A NA X Y LX LZ S $ % & Z $ % & H LC CJ5 CG5 !

Series SYJA300 3 Port Air Operated Valve

For solenoid valve) 23.5 11 A 21 28 44 29 25 36 18 27 34 X 21 14 1 R P 40 4 26 3.5 26 4 48.7 54.2 40.5 34 10 2-4.5 2-M4 X 0.7 55.5 3.6 54.2 (Mounting thread) (Mounting holes) 3-Rc(PT) 8 1 (P, A, R port) 0.8 P R 54.5 1.8 (Bleed port) 16 14.5 20 With filter (80mesh) 1.8 (Bleed port) 12 With filter (80mesh) 23 15 3-Rc(PT) (P, A, R port) , 8 1 4 1 48 3.3-4

SL5200

MPa 0 to 28 MPa No code A Pressure gauge unit 3) 1) Only available with SL5502.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

series 10 11 Relief type Vacuum suction type M9BW R Z 60 16 A R 2 J D C 10 B M9BW R Z 60 16 A R 2 J D C 21 B Bore size (mm) Number of auto switches Built-in magnet Cylinder stroke (mm) Nil Type of auto switch Nil No Nil S n 2 pcs. 1 pc. n pcs.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

E = mV 2 1 Formula (1) : Kinetic energy : Load mass : Speed Figure 1. Linear motion E m V Rotary actuator I = mr m: Mass (kg) (However, the weight of the L section is ignored) E= I Formula (2) 2 1 = mr 2 1 This indicates the moment of inertia with respect to the rotation axis of a mass "m" which is a distance "r" from the rotational axis.