Body Size: 3 (3/8), Type: 3 (Universal), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: 02 (1/4), Width Across Flats: 9mm, Tubing: 06 (ø6), Seal: S (w/Sealant)
Body Size: 3 (3/8), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: 03 (3/8), Width Across Flats: 9mm, Tubing: 06 (ø6), Seal: S (w/Sealant)
Body Size: 3 (3/8), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: None (0°), Thread: R, Port Size: 03 (3/8), Width Across Flats: 9mm, Tubing: 06 (ø6), Seal: S (w/Sealant)
Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 4 (220 VAC, 50/60 Hz), Lead Wire: D (DIN Terminal), Surge Suppressor: None, Port Size: 06 (3/4)
Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 5 (24 VDC), Lead Wire: D (DIN Terminal), Surge Suppressor: None, Port Size: 06 (3/4), Thread: N (NPT)
Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 5 (24 VDC), Lead Wire: D (DIN Terminal), Surge Suppressor: None, Port Size: 06 (3/4), Thread: T (NPTF)
Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 1 (100 VAC, 50/60 Hz), Lead Wire: D (DIN Terminal), Surge Suppressor: None, Port Size: 06 (3/4)
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: Â
Clean Series: 10 (Clean Room), Stations: 06, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS3 (w/5 m Cable, Side Entry), Option: BD (w/Back Pressure Check Valve, DIN Rail Mount Style)
Clean Series: 10 (Clean Room), Stations: 06, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: DNR (DIN Rail Mount Style, w/Name Plate, External Pilot)
Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6), Seal Method: w/o Sealant, Option: B (None)
Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6), Seal Method: w/o Sealant, Option: B (None)
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 06 (One-touch Fitting ø6), VAC: F01 (Screw-in G1/8), EXH: 08 (One-touch Fitting ø8), Accessories: N (w/o Bracket, w/o Silencer)
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 06 (One-touch Fitting ø6), VAC: 01 (Screw-in Rc 1/8), EXH: 08 (One-touch Fitting ø8), Accessories: S (w/Standard Bracket, w/Silencer)
Pad Diameter: 10 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: D (Deep Style), Material: S (Silicon Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B6 (Female Thread M6X1)
Pad Diameter: 10 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B5 (Female Thread M5X0.8)
Pad Diameter: 10 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: C (Flat w/Ribs), Material: N (NBR), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B5 (Female Thread M5X0.8)
Pad Diameter: 10 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: D (Deep Style), Material: S (Silicon Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B5 (Female Thread M5X0.8)
Pad Diameter: 10 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B5 (Female Thread M5X0.8)
Pad Diameter: 10 (Flat+Flat with Ribs+Deep+Bellows+Compact+Compact with Ribs), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B6 (Female Thread M6X1)