HRX-OM-Q026

HRSH Series 5.23 Communication Function 5-75 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions Setting/Checking: Slave addresses (MODBUS) 9. Press the [SEL] key once. Setting screen of slave addresses (MODBUS) is displayed on the digital display. PV SV 10. Set slave addresses (MODBUS) with [] key or [] key, and press [SEL] key to enter.

HRX-OM-W069

0,0,0,0 0x00,0x00 Information of 003Bh (Data display 4) 0x0 0,0,0,0 0x00,0x00 Information of 003Ch (Status flag) 0x0031 0,0,3,1 0x00,0x31 Information of 003Dh (Alarm flag 1) 0x0 0,0,0,0 0x00,0x00 Information of 003Eh (Alarm flag 2) 0x0 0,0,0,0 0x00,0x00 Information of 003Fh (Alarm flag 3) 0x0 0,0,0,0 0x00,0x00 Checksum ASCII:LRC RTU:CRC 9,A 0xE7,0xB8 Trailer CR/LF None Total quantity of byte 75

HRX-OM-Y120

0,0,0,0 0x00,0x00 Information of 003Bh (Data display 4) 0x0 0,0,0,0 0x00,0x00 Information of 003Ch (Status flag) 0x0031 0,0,3,1 0x00,0x31 Information of 003Dh (Alarm flag 1) 0x0 0,0,0,0 0x00,0x00 Information of 003Eh (Alarm flag 2) 0x0 0,0,0,0 0x00,0x00 Information of 003Fh (Alarm flag 3) 0x0 0,0,0,0 0x00,0x00 Checksum ASCII:LRC RTU:CRC 9,A 0xE7,0xB8 Trailer CR/LF None Total quantity of byte 75

HRX-OM-Z015

(Alarm flag 2) 0x0 0,0,0,0 0x00,0x00 Information of 003Dh (Alarm flag 3) 0x0 0,0,0,0 0x00,0x00 Information of 003Eh (Alarm flag 4) 0x0 0,0,0,0 0x00,0x00 Information of 003Fh (Alarm flag 5) 0x0 0,0,0,0 0x00,0x00 Checksum ASCII:LRC RTU:CRC 1,3 0x93,0xF1 HRLE Series 3.11 Explanation of function codes 3-11 HRX-OM-Z015 Chapter 3 Serial communication Trailer CR/LF None Total quantity of byte 75

Air cooled Thermo-con (Compact type)

The resistance must be suitable for the characteristic impedance of the cables used for connection and have a combined resistance of 75 ohms or more. 3.9 Identification Code List The following parameters can be changed.

Air cooled Thermo-con (Compact type)

The resistance must be suitable for the characteristic impedance of the cables used for connection and have a combined resistance of 75 ohms or more. 3.9 Identification Code List The following parameters can be changed.

A-HEC-OM-J004

The resistance must be suitable for the characteristic impedance of the cables used for connection and have a combined resistance of 75 ohms or more. 7.4.11 Identification Code List The following parameters can be changed.

XL-OMV0005

Suffix symbol for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used, changing only the seal may prove inadequate.

XLGR Series

Note4) Two O-rings (8) are require per valve. 6 XL-OMP0001 Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80. 70W 4079 SS592 SS630 SSE38 1232-70. 3310-75.

IP8101 Series

D Fork lever-type fitting SShort type (M81.5) H External scale plate W With body cover window No.DIG-31900-OM002 73 Drawing No.DIG-31900-OM002 74 No.DIG-31900-OM002 75 No.DIG-31900-OM002 76 No.DIG-31900-OM002 77 No.DIG-31900-OM002 78 No.DIG-31900-OM002 79 No.DIG-31900-OM002 80 No.DIG-31900-OM002 81 No.DIG-31900-OM002 82 No.DIG-31900-OM002 83 Revision history A 26/09/2005 Address change B

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Operation mode command 0x4A (74) 0 R/W Operation pressure PS1 Set pressure 0 to 1050 (fixed kPa) Mode (PS1) U16 {0} Y Standby mode command 0x4B (75) 0 R/W Standby pressure PS2 Set pressure 0 to 1050 (fixed kPa) mode (PS2) U16 {0} Y Setting Solenoid Valve Stop 0x4D (77) 0 R/W Solenoid Valve Time Setting range099 Stop Time U8 {0} Y Setting the Pressure Ramp Up Duration Setting range 015000.1

STAINLESS STEEL CYLINDER

size (mm) 25 NBA-106S 32 BGS1-032S 40 BAF-04S 50 BAF-05S Auto switch mounting band 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA Auto switch Minimum Stroke for Auto Switch Mounting Mounting Basic type, Foot type, Flange type, Clevis type bracket 1 2 2 Number of auto (Rod cover side) (Different sides) (Same side) switches Switch mounting Port side Port side Port side side Minimum stroke 10 20 75

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

CEx-OMB0075

L 3 m Connector Nil w/ connector Stroke(mm) Made To Order Fluoro rubber packing (Ex.) 2-2-2 Applicable Auto-Switch Models Z w/o connector 25, 50, 75, 100 Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW 2-color D-M9PW A96 Reed D-A96 M9B Solid State D-M9B M9BW Indication Solid State D-M9BW A90V Auto-Switch D-A90V

CG1-SMV13_en

The compatibility of the product is the responsibility of the 25 0.02 0.03 0.06 0.10 0.15 0.26 0.41 person who designs the equipment or decides its specifications. 50 0.03 0.05 0.09 0.14 0.23 0.39 0.61 Since the product specified here is used under various operating 75 0.04 0.07 0.12 0.19 0.31 0.51 0.80 conditions, its compatibility with specific equipment must be decided by the person who

Compact Rotary Actuator

setscrew (with urethane damper) as setscrew. 6-3 Auto switch set position B Port A Port Fig.12 Set screw Auto switch Operation range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.13 Table 10 Reed auto switch Solid state auto switch Size Rotation A B Operation Hysteresis angle A B Operation Hysteresis angle m angle m angle 90 15 21.5 19 25.5 10 75

Rotary Table

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

Low-Speed Rotary Actuator

Operation range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.11 Table 9 Reed auto switch Solid state auto switch Size Rotation A B Operation angle A B Operation Hysteresis Hysteresis angle m angle m angle 10 90 15 21.5 63 12 19 25.5 75 3 180 18 31 22 35 15 90 18.5 27 52 9 22.5 31 69 3 180 22.5 39.5 26.5 43.5 20 90 36 48.5 41 9 40 52.5 56 4 180

MRQB-OM0002

1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15 2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75