Stopper Cylinder

B + stroke R R O1 thread [mm] Bore size A B D E F G H J K L M N O P Q S T V X Y Z W Rc NPT G Rc NPT G 16 68 41.5 10 29 6 3 26.5 18 1.5 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 8 20 18 3.5 37 0 0 0 20 78 45 12 36 8 4 33 22 2 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 10 24 22 4 47 1.5 1.5 0 32 87 48 20 45 7.5 8 39 4.5 32 3 34 5.5 9 depth 7 1/8 1/8 1/8 20 18 36 20 8 14 40 105.5 52.5

RSQ

x 55l M5 x 60l M5 x 65l M5 x 60l M5 x 65l M5 x 70l M5 x 75l M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 Note) CX Round bar, Chamfered, Roller 1.03 1.07 1.11 50 Lever with built-in shock absorber 1.26 1.30 1.34 CY 7 MQQ M Courtesy of Steven

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

17

M6 x 1.0 4.3 4.3 5.4 5.4 8 8 9.5 9.5 4.5 4.5 5.5 5.5 M5 x 0.8 M5 x 0.8 Rc1/8 Rc1/8 10,20,30,40,50,75,100 125,150,175,200,250 NPT1/8 20,30,40,50,75,100,125,150 175,200,250,300,350,400 NPT1/8 WA WB X Bore size (mm) Q PW YY 30 st or less Over 300 st Over 200 st 300 st or less Over 100 st 200 st or less Over 30 st 100 st or less PB PA R S T U VA VB XA XB YL Z 30 st or less Over 300 st Over

240

Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

S. T. Manufacturing Co., Ltd.

VFR

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

5 Port Solenoid Valve Series VQZ1000/2000/3000

VQZ 2 N7 T 1 VQ5 VQC Entry is the same as standard products. VQZ Thread type (Cylinder port and 1(P), 3(R2), 5(R1) ports) Cylinder port N1 N3 N7 N9 N11 M5 02 M5 thread Symbol SQ 1/4 thread Nil N T F Applicable tubing O.D. (Inch) 1/8" 5/32" 1/4" 5/16" 3/8" Rc VFS VQZ1000 NPT A, B port NPTF VQZ2000 VFR G VQZ3000 Note 1) 3(R2), 5(R1) port of the VQZ2000 is only G1/16.

LEC-OM02704CN

O H S T X E T X ( ) * S T X E T X ( ) 6 =A =A (2) 10 S O H S T X E T X ( ) S T X E T X ( ) * 6 ( ) (3) EOT neutral EOT () E O T () (4) o r o r 1 2 or 16 4 8 14 5 14 14.3.2 (1) 16 (ASCII) () SOH STX ETX EOT 01H 02H 03H 04H start of head() start of text() end of text() end of transmission() ctrlA ctrlB ctrlC ctrlD (2) ASCII b8 0 0 0 0 0 0 0 0 b7 0 0 0 0 1

Rotary Gripper Series MRHQ

"#$ " %# &'# D t D D t t c c e c e e u u u s s s d d d i i i Rotary Gripper g g g o o o n n n r r r P P P A A A 9 9 9 MRHQ 10/16/20/25 w w w 9 9 m 9 I m I 1 1 n 9 9 9 9 n 9 9 d u d u r u a a a r u 9 o 9 9 s o s F tr F ie tr ie r r r 1 1 1 Modular construction D r D r d d d e e e e v v s s o o i i n g n g n n n n a a H H n P n P g g r r Gripper section is unitized for simple replacement.

Rotary Clamp Cylinders

T 32 40 50 63 Q R S T Q R S T 7.5 84 160 168 7.5 74 140 148 8 85 164 171.5 8 75 144 151.5 14 121.5 242.5 254.5 12.5 91.5 179 191 15 123 246 256 10.5 93 182 192 24 Series MK2T Auto Switch Proper Mounting Position (Detection at Stroke End) 20 to 63 32 to 63 B Auto switch (Rail mounting) B Auto switch (Direct mounting) A A Mounting Rail mounting Direct mounting D-M9 D-M9V D-M9W D-M9WV D-M9AL

Low Friction Cylinders Series MQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10.5 M5 x 0.8 M3 x 0.5 10 11.5 M6 x 1.0 M4 x 0.7 16 13.5 M8 x 1.25 M5 x 0.8 20 16.5 M10 x 1.25 M6 x 1.0 25 22.5 M14 x 1.5 M8 x 1.25 30, 40 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable retaining ring Part no.

Modular F.R.L. Units

Nil CNote 2) Float type auto drain a Note 1) DNote 3) Option Attachment + r Nil G M Without pressure gauge Round type pressure gauge (with limit indicator) Round type pressure gauge (with color zone) Pressure gauge Note 4) b + Without attachment Mounting position: AF+AFM+S+AR Mounting position: AF+AFM+T+AR Nil S Note 5) Pressure switch c T Note 5) T-shaped spacer + t Without attachment

Modular Type Lubricators Series AL

Y M B O L S H O W T O O R D E R L U B R I C AT O R S E R I E S NAL NAL800-N12 (1 14 NPT) NAL800-N14 (1 12 NPT) NAL900-N20 (2 NPT) T E C H N I C A L SPECIFICATIONS D I M E N S I O N S L U B R I C AT O R NAL800 NAL900 Max Supply pressure 1.5MPa / 220PSI Max Operating Pressure 1MPa / 145PSI Operating Temp Range 5~60C /40~140F Recommended lubricant Turbine oil #1 (ISO VG32) Bowl Polycarbonate

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

stations )1-~) 1.48 (37.S) 1.28(32 s) 1/8NPTF 3n ports ' ~r ~o ~ ED., ~ (9.,0 t B P A Ie. ' ..

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Rotation time t (s) Rotary table: MSQB50A, Pressure: 0.5 MPa Mounting orientation: Vertical Load type: Inertial load Ta Load configuration: 100 mm x 60 mm (Rectangular plate) Rotation time t: 0.3s, Rotation angle: 90 . Rotation angle (rad) CRQ2 . Load mass m (kg) G .

VM

-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM

Fieldbus System

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

VEX1

cap screw (with spring washer) M5 x 0.8 x 10 (2 pcs.)