MGP

Through 4-NN WA Z X0.02 X0.02 DA DB VB VA R U X T H PW 2-P XAH7 6 depth XAH7 depth 6 GA PB Q 2-P (Plug) PA+Stroke GB J K S FB FA C+Stroke B+Stroke E A+Stroke G MGPM, MGPL/Common Dimensions Bore (mm) Standard stroke (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q 25, 50, 75,1 00 71 58 11 8 8.5 9 M5 X 0.8 12 13 15 M5 X 0.8 4.3 5.6 5.6 M5 X 0.8 Rc1/8 Rc1/8 40 16 18 26 8 10

Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 12 LXP M6 x 1 7.4 10 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Connector manufacturers: P Hirose Electric Co., Ltd. P Sumitomo 3M Limited P Fujitsu Limited P Japan Aviation Electronics Industry, Ltd. P J.S.T. Mfg. Co., Ltd. D-sub Connector Cable Assembly Electric Characteristics Cable length (L) Item Characteristics Assembly part no.

Compact Rotary Actuator Series CRQ2

(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,

E-P HYREG

Port 1 (P), 2 (A), 3 (R) 3 x M5 Silencer (Option) VY1A0 0 1 Applicable cable O.D. 4 to 6.5 Connection mark All types are the same in terms of connection. (VY1A01 only) M5 external pilot port Foot (Option) Port 1 (P), 2 (A), 3 (R) 3 x M5 VEXA-18-3A Hexagon socket head cap screw M3 L = 8 (2 pcs.)

30

5 P. 12 Metric Inch P. 6 P. 13 Metric R thread G thread P. 3 P. 16 P. 10 Inch Hexagon Socket Head Male Connector KQB2S Union Tee KQB2T Bulkhead Connector KQB2E Metric Inch P. 5 P. 12 Metric R thread G thread Metric Rc thread G thread P. 7 P. 18 P. 3 P. 16 P. 13 P. 10 Inch Inch Straight Union KQB2H Union Y KQB2U Extended Male Elbow KQB2W Metric Inch P. 3 P. 10 Metric Inch P. 5 P. 12 Metric

Air Slide Table Series MXQ

B C 25 42 MXQ-CT12 (L)-X12 5 23 MXQ-CT16 (L) J M5 x 12 M10 x 1 MXQ16 (L) 15 35.5 12 33.5 14 20 5 17 33 MXQ-CT16 (L)-X11 A K 25 43 MXQ-CT16 (L)-X12 5 27 MXQ-CT20 (L) MXQ20 (L) M5 x 14 15 13 37 44.5 41 17 25 6 23 M12 x 1.25 MXQ-CT20 (L)-X11 25 47 MXQ-CT20 (L)-X12 5 30 MXQ-CT25 (L) MXQ25 (L) M6 x 18 M14 x 1.5 15 40 15 49 53.5 19 31 6 28 MXQ-CT25 (L)-X11 25 50 MXQ-CT25 (L)-X12 1) Size of hexagon

Compact 5-Port Solenoid Valve

formula for L dimensions (Station n) (Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.

CL

+ Stroke 2-Rc P With rod boot EB EA D e 4-LD Width across flats B1 l ZZ + l + Stroke h + l LS + Stroke ZZ + Stroke Width across flats KA Long Stroke When stroke exceeds 1001 mm, mount tie-rod support ring.

Electric Actuator/Slider Type

Tap (4 locations) Body xed/Top mounting Model Bolt Length: L (mm) LEYG25M L M5 x 0.8 2.2 [3.0] 40.5 LEYG32M L M5 x 0.8 2.2 [3.0] 50.5 Max. tightening torque lbfft(Nm) L Body xed/Bottom mounting Model Bolt Max. screw-in depth (mm) LEYG25M L M6 x 1.0 3.8 [5.2] 12 LEYG32M L M6 x 1.0 3.8 [5.2] 12 Max. tightening torque lbfft(Nm) Workpiece xed/Rod end female thread Model Bolt Max.

o

'MsTM3",os A port _ l M3 x O.5,10j32 Nom. (M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

o

'MsTM3",os A port _ l M3 x O.5,10j32 Nom. (M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

'MsTM3",os A port _ l M3 x O.5,10j32 Nom. (M5) M5T103rN"'(M5 .03) 10-32Nom. {M5) P Port 1O-32Nom.(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?

VEX1

plug L plug connector (L) M plug connector (M) Sub-plate M5 x 0.8 (P2) Silencer (P2) AN120-M5 (Option: N) (Except VEX3420) Plug (1/8) Refer to Table (1).

4 Port Solenoid Valve Series VQD1000

3 (R) port 3 1 (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 5.5 12 11.2 3 3(R) 9 2-3.5 mounting hole 10.9 9.1 5.5 33.5 28.5 37 38 1(P) 1(P) 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 634 4 port direct

Vacuum System Peripherals:

Port size Rc Controlled flow (l /min (ANR)) Model Applicable tubing O.D. (mm) Elbow type AS1301F-M5-X214 AS2301F-01S-X214 AS2301F-02S-X214 AS3301F-03S-X214 AS4301F-04S-X214 Misc.

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

SZ3000

13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

SZ3000

solenoid B 2 Nil: Non-locking push type Nil: Without switch (A) 4 (B) 2 SY 2 M5: M5 x 0.5 5 (EA) 1 (P) 3 (EB) SYJ 3 position closed center SX (A) 4 (B) 2 A 4 3 2 B 5 (EA) 1 (P) 3 (EB) D: Push-turn locking slotted type J: With switch 3 position exhaust center Elbow fitting assembly (Upward) L4: 4 elbow fitting assembly L6: 6 elbow fitting assembly (A) 4 (B) 2 4 5 (EA) 1 (P) 3 (EB) A 4 ON 3