Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ M5 Note 4) (68.4) 57.3 PE Vacuum (V) port (M5) Note 4) 20.3 29.4 P V 9.7 Exhaust part 17.7 22.8 0.8 87.2 Note 1) 10 Circuit diagram 5 6 E F Note 1) The above dimensions are for ZQ1 1U-K2 L-F .
Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.
, M5 60.3 C3: One-touch fittings for 3.2 Manual override C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (C3,C4,C6) 47.5 9.5 (M5) 26.5 25.5 5.4 18.5 5 23.2 Mounting holes 10 (47.5) 3-M5 X 0.8 P, R port 9.9 9.9 5 1 3 2-PE port 22.2 Die cast hole For manifold gasket positioning L plug connector (L): VQZ122 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ122 wMwC3, C4
(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03
(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03
(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03
Z (Example) A80CZ 3 m . L (Example) A80CL None .
Description Zinc die-casted Zinc die-casted Body Body w w Stainless steel Aluminum/HNBR Spool/Sleeve Spool valve e e Resin Resin Piston Piston r Pilot valve assembly r Pilot valve assembly Note) L M G 2 Note) L M G 2 VQ111(H) (Y) Voltage 1 to 6 VQ111(H) (Y) Voltage 1 to 6 Single Single VQ110L L M 2 VQ110L L M 2 Double (Latching) Double (Latching) Voltage 1 to 6 Voltage 1 to 6 Note) L M G
Symbol 25 (L) Lead wire length Output specifications NPN output Analog output PNP output NPN output Analog output PNP output Applicable switch Lead wire length 0.6 (3.0) m 26 (L) Lead wire length 0.6 (3.0) m 65 (L) Lead wire length 0.6 (3.0) m 27 (L) Lead wire length 0.6 (3.0) m D1 D2 Ex.) ZR1--CN . 1 pc.
Standard Type: CXS Vertical mounting L L Mounting orientation m m up to 300 up to 400 up to 700 ( up to 800) up to 200 up to 600 up to 100 Max. speed (mm/s) Stroke (mm) All strokes 1 2 6 10 15 Selection graph 3 4 5 6 20 25 32 Horizontal mounting L Mounting orientation m m Refer to the caution notes below.
25.5 25.5 N 14.6 18.5 21 25 31 G 12 12 14 19 19 H 1.4 1.4 1.4 12 12 J M8 x 1 M8 x 1 M10 x 1 M14 x 1.5 M14 x 1.5 P M3 x 12 M4 x 8 M5 x 10 M5 x 12 M6 x 16 Q M3 x 16 M4 x 15 M5 x 18 M6 x 25 M8 x 25 MXS-BT8(L) MXS-BT12(L) MXS-BT16(L) MXS-BT20(L) MXS-BT25(L) MXS8(L) MXS12(L) MXS16(L) MXS20(L) MXS25(L) Size of hexagon socket head cap screw It is also available in the symmetric type.
: M5 thread SYJ Manual override Seal Non-locking push style Push-locking slotted style B SX 0 1 Metal Rubber Option VK Pilot valve (Option) Electrical entry VZ Symbol Specification DC AC G L LO M MO Grommet (Except for AC) L plug connector with lead wire L plug connector without connector M plug connector with lead wire M plug connector without connector (1.0W) (1.5W) (0.5W) (1) Standard
valve Nil L M N Refer to Table (1) in page 969 for details.
(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17
D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL !
R L NE C NG R R L L G R L A N L R Z + Stroke Slide table operating direction (mm) Model MY3A16 MY3A20 MY3A25 MY3A32 MY3A40 MY3A50 MY3A63 MM M4 x 0.7 N 6 M 55 A 6 B 18 C 2 E 9.5 G 27 H 5 HG M4 x 0.7 JJ 5 KK 65 L 3.5 LD 22.5 LL 41 LW 13.5 M4 x 0.7 15.5 6 64 7.5 22 2 9.5 32 6.5 M4 x 0.7 8.5 80 4.5 24 51 M5 x 0.8 20 8 75 9.5 25 2 14 37 7.4 M5 x 0.8 7.5 95 5.5 27.5 61 M5 x 0.8 22.5 8 96.5 11 32.5
SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not
(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.
H:M8X125 oK "l G Model M ; 8 C 0 E F G 140 34 6 I !
[mm] (7) L = 50 mm, V = 400 mm/s (8) L = 100 mm, V = 400 mm/s 50 50 80 80 80 80 40 40 30 30 Load mass m [kg] Load mass m [kg] 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 Stroke [mm] Stroke [mm] 482 Model Selection MGPS Series Operating Range when Used as Stopper 2000 MGPS80 L 50 mm L 50 mm 1000 m m Mass of transferred object: m [kg] MGPS50 500 400 300 200