A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

Speed Controller with Indicator

: Universal Type Seal method: Gasket seal For M5, 10-32UNF AS-FS AS-FSG Uni-AS-FS Applicable tubing O.D. d Y W1 D3 D1 M L3 L4 L5 A D2 L2 L1 T H (Width across flats) Metric Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-23 3.2 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8

Modular F.R.L. Unit

y y e e r r r u u u Drain Drain Drain Parts list Material No.

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 Series Assembly part no.

F

...Plug-in Y ...Branch Y UD ...Double Branch ...Different Dia Double Union Y V ...Universal Male Elbow VD ...Double Universal Male Elbow VF ...Single Banjo Stackable VT ...Triple Universal Male Elbow W ...Extended Male Elbow ...Extended Plug-in Elbow X ...Different Dia Branch Y XD ...Double Branch Y Y ...Male Rub Tee Z ...Branch Universal Elbow ZD ...Double Branch Universal Elbow ZF ...Branch

CJ2

B H C C d d 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 M6 x 1.0 4 8 9.2 6 M3 x 0.5 2.4 5.5 6.4 SNJ-010B 10 NTJ-010A M8 x 1.0 4 11 12.7 10 M4 x 0.7 3.2 7 8.1 NDd9 NDH10 NX R1 U1 Part no.

High Vacuum Angle Valve

Rc1/8 XLFV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLF 0.29 0.49 1.2 1.9 3.3 5.7 XLFV 0.34 0.54 1.3 2.0 3.4 5.8 1 Conductance is the value for the elbow with the same dimensions. *2 A coating of vacuum grease [Y-VAC2] is applied to the seal-material sliding portion of the vacuum part.

ISO Cylinder

19 5 16 M4 x 0.7 23 3.5, 6.5 counterbore depth 4 8 14 23.5 9.5 15 58 7 4 12 74 12 16 20 6 M5 x 0.8 25 6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88 16 16 20 6 M5 x 0.8 25 6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88 Bottom side mounting: Cl85RAF/Y B 20/25 Stroke (XB) G1 (WH) Width across flats SW EE EE 2 x LD G2 KK ND h8

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

CJ2

B H B H d C C d 10 8 21 M4 X 0.7 16.2 Y-J010B SNJ-006B 16 11 21 M5 X 0.8 16.6 Y-J016B M6 X 1.0 4 8 9.2 6 NTJ-006A 2.4 M3 X 0.5 6.4 5.5 6 SNJ-010B M8 X 1.0 4 11 12.7 10 NTJ-010A 3.2 M4 X 0.7 8.1 7 10 Part No.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M5 x 0.8 3.0 8 LEYG32M L M6 x 1.0 5.2 10 25ALEC LEC S LEC SS-T LEC Y LEC Y 3.

LJ1H

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

VFS

x 0.8) Pilot EXH port M5 x 0.8 1 8 ( ): Rc Grommet terminal: VFS2610-E-01 02 DIN terminal: VFS2610-D Y-01 02 Lead wire O.D.

MHZ

x 0.8 (Finger closing port) 28 Auto Switch Mounting Groove Dimensions 18 0 0.05 6.2 Auto switch mounting groove 12 5 9 17 (For D-Y) 38 (45) M5 x 0.8 (Finger opening port) 29.4 13 For single action, the port on one side is a breathing hole.

MHZ

x 0.8 (Finger closing port) 28 Auto Switch Mounting Groove Dimensions 18 0 0.05 6.2 Auto switch mounting groove 12 5 9 17 (For D-Y) 38 (45) M5 x 0.8 (Finger opening port) 29.4 13 For single action, the port on one side is a breathing hole.

Battery-less

5 r t w q y !6 !

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

NDh8 WB WA Section Y detail Y GB GC GA Relief port M5 x 0.8 Mounting nut MM NN WW Rod end nut Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 C D B 0 0.3 B 0 0.3 Head cover port location Axial (R) Z + Stroke S + Stroke NB H NA F A The overall cylinder length does not change.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type of actuation Series Port size 1 2 5 7 Normally closed Normally open M5 01 10-SYJ500 10-SYJ700 3 port M5 x 0.8 1/8 (SYJ700 only) (For type 20 manifold) 1 5 10 SYJ 2M 5 Y M5 Body ported 5 1 4M 5 Y 01 10 SYJ Base mounted Clean series 3 port Port size For sub-plate type, types 40 and 41 manifolds Thread type Electrical entry F Nil Y: With connector Rc Nil Without sub-plate G N T NPT NPTF

Hydraulic

M5 Y-type double knuckle joint Bracket pin Material: Carbon steel 20: Y-02 25: Y-03 Material: Rolled steel 32: Y-04A 40: Y-04B Material: Cast iron 2-D drill through RR1 C1 Chamfer RR1 C NDH10 NDH10 MM C1 Chamfer A B E1 E1 NX NZ NZ NX U1 A1 A1 U1 L1 L1 Part no.