Fieldbus System

(No.4-40 UNC) 5 Joint bracket Links Units to one another. 6 Connector for Unit (Plug) Transmits signals to the neighboring Unit and supplies power. y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

CNG

A1 E1 L1 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 16 20 22 +0.4 +0.2 8 16 34 41 42 2 25, 32 40 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 8 10 10 21 11.5 25 30 30 20 34 41 42 8.5 M8 x 1.25 10.3 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 20 M10 x 1.25 25.6 14 M10 x 1.25 12.8 25, 32 40 10.5 16 +0.5 +0.3 18 M14 x 1.5 41.6

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

Table of Contents

0 y !3 !5 @3 !0 !

Valve Single Unit

SX (Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

Direct Operated

Max. system pressure (MPa) Flow characteristics C[dm3/(sbar)] 0.08 0.15 0.20 0.08 0.15 N.C. 1 0.7 0.3 1 0.7 1.2 1.6 0.3 0.6 1 0.3 0.5 1.2 1.6 0.6 1 0.3 0.5 Cv 0.32 0.25 0.20 0.32 0.25 b VX311-01 VX312-01 VX313-01 VX311-02 VX312-02 VX322-02 VX332-02 VX313-02 VX323-02 VX333-02 VX324-02 VX334-02 VX322-03 VX332-03 VX323-03 VX333-03 VX324-03 VX334-03 0.29 0.60 0.82 0.29 0.60 0.7 0.4 0.2 0.7 0.4

30

L L Union Y: KQB2U 3 x Applicable tube Applicable tube O.D.

2-Color Display High Precision

OUT OUT 1 1 R1/8, NPT1/8 (With M5 female thread), Rc1/8, G1/8, M5 female thread 4, 6 one-touch fitting Piping OUT OUT 2 2 Features 1 2-Color Display High Precision Digital Pressure Switch How to Order Series ZSE40A(F)/ISE40A Rated pressure range ISE40A 14.5 to 145.0 psi ISE40A 01 X P For positive pressure For vacuum/ compound pressure ZSE40A 01 Y P Made to Order Specifications/Description

VDW

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

Air Cylinder Series CM2

H L MM ND NX2 R2 U2 Y Z A Bore size 20 25, 32 40 + 0.2 + 0.1 + 0.2 + 0.1 + 0.3 + 0.1 9 18 41 25 9 10 14 11 66 M8 x 1.25 22 45 25 9 10 14 14 69 9 M10 x 1.25 24 50 13 25 13 92 16 12 49.7 M14 x 1.5 Double Knuckle Joint (mm) Y-020B/Y-032B Material: Rolled steel Y-040B Material: Cast iron R1 R1 ND hole H10 MM MM ND hole H10 Axis d9 Axis d9 E1 E1 NX NZ L NX NZ L A1 U1 L1 A A1 U1 L1 A Applicable

Valve Single Unit

How to Order Valves 5 L N SX 5 1 20 01 Thread type Series A, B port size Nil Applicable series Rc Symbol Port size M5 x 0.8 3 SX3000 5 SX5000 G F M5 One-touch fitting for 4 C4 N 7 SX7000 NPT SX3000 One-touch fitting for 6 C6 NPTF T Type of actuation 1 8 01 1 2 position single One-touch fitting for 4 C4 Rated voltage SX5000 2 2 position double One-touch fitting for 6 C6 5 24 VDC 6 12 VDC 3

LEC-OM069xx

DTMOD = 00 or 11: Single transmission DTMOD = 01: Continuous transmission Normally, set DTMOD to 00. SUBCMD: Specify whether to use subcommands or not.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) K (High pressure) and Y (Low wattage) are not available. Electrical ently: L/ M plug connector only.

REA/REB

Bore size (mm) Model Elbow type Straight type In-line type 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214

NCM

ZD-UNF ZD-UNF ZC MM-DIA 044 (7/16") EA EB NB NA NA KK-UNF-2A NE B-DIA NN-MOUNTING NUT NA A ZB+Stroke W Y ZD-UNF 0.37 ZD-UNF MM-DIA 056 (9/16") ZC EA EA NA KK-UNF-2A B-DIA NE NN-MOUNTING NUT (inch) ZB No bumper, No magnet 2.11 2.19 ZB With bumper, No magnet 2.30 2.32 ZB No bumper, With magnet 2.36 2.19 ZB With bumper, With magnet 2.55 2.32 Bore size (inch) A B EA EB KK MM NA NB NE NN W Y ZC

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Type D only) V Y W Z E For the applicable voltage, please contact SMC separately.

ASR

4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Shock Absorbers and Rate Controls

J.5/0 16.0 +0.tn 98.038.I 38_0 36.0 26.0 N/A 23.0 8.66 kg I 9 38.0 98.038.1 38.0 36.026.0 NIA 23.0 10.i0 ks t0 402.0 l 9 0lll3.0lttx5OUl(S) 125 479.0 3t.7 0/.0.3 3l.l 38.0 t6.0 +a.tL 16.0 +t.510 N/A 23.0 12.52 ks 38.0 36.0 26.0 98.03 8.1 0El{t3.0ilx6.50t(S) 't65 y{.0 19.07 +0.25/0 19. 1&0 90.5 98.0 38.0 36.0 N/A 23.0 r 5.24 kg 38.1 26.0 432.0 25. ,.r 0.3 l.l :01 l_l 38,2 :!5/t t!.r +0.

Manifold Specifications

Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5