Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: B [Panel Mount Adapter, (ZS-46-B)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: A1 [Bracket A (ZS-46-A1)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A2 [Bracket B (ZS-46-A2)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)], Operation Manual: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A1 [Bracket A (ZS-46-A1)], Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: B [Panel Mount Adapter, (ZS-46-B)], Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: A1 [Bracket A (ZS-46-A1)], Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A2 [Bracket B (ZS-46-A2)], Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A1 [Bracket A (ZS-46-A1)], Operation Manual: Operation Manual, Calibration Certificate

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A4 [Bracket D for M12 Connector Type (ZS-46-A4)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)]

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

SMC Pneumatic Clean Series

x 1.5 M10 x 1.25 M8 x 1.25 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 10112122Axial foot style (L) / CBM2L, CBM2L H Relief port M5 x 0.8 24 2-P (Rc, NPT, G) A K F AL H2 F DL 2-NN Width across flats NA Standard port H1 Width across flats B1 HC LH D I B B 4-LD 2-LC MM Width across flats B2 G Relief port G Relief port M5 x 0.8 LT 20, 25 (This drawing

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Indicator light With Special function Applicable load Electrical entry Wiring (Output) Type 0.5 () 3 (L) Perpendicular In-line DC AC 3-wire (NPN) Solid state switch F9NV F9N P P 5V 12V IC _ _ Relay, PLC Grommet 3-wire (NPN) 24V F9PV F9P P P 2-wire 12V F9BV F9B P P Lead wire length: 0.5m.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

M5 thread 1 (P) N.C.

Series KG Stainless Steel One-touch Fittings

P. 128 Male connector: KGH Part No. H (Hex.) L M Effective orifice(mm 2) Nylon Urethane Connection thread R(PT) M5 Applicable tube O.D.

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

Table of Contents

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 female thread (A) IDG30M/50M IDG30HM/50HM IDG30LM/50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female thread HA AT With float type auto-drain With drain guide Drain Discharge ID AMG (P) (N) AFF N.C.: Gray N.O.: Black Thread size: 1/4 (Without valve mechanism) Applicable tubing O.D

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.