0.4

Flat Ribbon Cable Assembly D-sub Connector Cable Assembly Pins 10P 16P 20P Cable length (L) Pins Cable length (L) 1.5 m 1.5 m AXT100-FC10-1 AXT100-FC16-1 AXT100-FC20-1 15P 3 m AXT100-FC10-2 AXT100-FC16-2 AXT100-FC20-2 AXT100-DS15-1 5 m 3 m AXT100-FC10-3 AXT100-FC16-3 AXT100-FC20-3 AXT100-DS15-2 Connector width (W) 5 m 17.2 24.8 30 AXT100-DS15-3 For other commercial connectors, use a type

AC Servo Motor Driver (Pulse input type/Positioning type ）

-L MR-PWS1CBL M-A1-H MR-PWS2CBL03M-A1-L LE-CSM-SA LE-CSM-SB 1) Driver Servo amplifier Servo motor HF-MP HF-KP or LE-MR-PWS1CBL M-A2-L MR-PWS1CBL M-A2-H MR-PWS2CBL03M-A2-L LE-CSM-RA LE-CSM-RB CNP3 connector supplied with servo amplifier 1) driver Servo Motor LE-Servo motor HF-MP HF-KP CNP3 Cable model 1) For motor power supply connector LE-CSM-SA Connector: JN4FT04SJ1-R Signal layout Hood,

VS 8-2/VS 8-4

kit with 0.6 m lead wire L kit with 1.5 m lead wire Lead wire housing assembly 16 L kit with 3.0 m lead wire M kit, 26 pins Circular connector housing assembly 17 32 Series VS 8-2/VS 8-4 S R S R Manifold Component Part No. !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

H/DL/L/LL

(mm) Connection threads R Model M Effective area (mm2) Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 25.1 29.1 21.1 23.1 10 4 10 17 Applicable tubing H06-01 12 25.1 21.1 H06-02 16 29.1 19 17 12 14 6 11 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 Reference dimensions after R thread installation.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number

Dual Speed Controller with One-touch Fitting Series ASD

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

0.55

Electrical entry G H L LN LO M MN MO Grommet (Lead wire length 300 mm) Grommet (Lead wire length 600 mm) With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector L-type plug connector M-type plug connector LN and MN types are with 2 sockets. Refer to back page 2 when different length of lead wire for L/M-type plug connector is required.

Series AS-FM/AS-M/ASD-FM

Symbol JIS symbol 1 Series AS-FM How to Order AS 2 2 1 1 F M 01 06 Body size Option 1 2 M5 standard 1/8, 1/4 standard Nil S None With sealant M5 and U10/32 are not available with sealant.

Nozzle Type Ionizer

Bracket Power supply cable IZN10 B1 IZN10E CP Bracket Power supply cable Symbol Type B1 L-bracket B2 Pivoting bracket B3 DIN rail mounting bracket Symbol Type Nil 3 m Z 10 m Power supply cable: Made to order IZN10E CP X13 01 L-bracket IZN10-B1 Pivoting bracket IZN10-B2 Power supply cable length Symbol Type 01 1 m 20 20 m * Available in 1 m increments from 1 m to 20 m.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Parallel l/O Connector 6.1 Parallel I/O specifications Input specifications Output specifications No. Item Specification No.

Secondary Batteries

4 l/min 2 to 16 l/min 5 to 40 l/min 04 20 40 90 Material restriction Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Thread type Nil N F Rc NPT G Lead wire M12 3 m lead wire with connector Without lead wire Nil N Port size 67 Output specification PNP open collector 2 outputs 4 16 40 Port size Applicable model Flow rate (l/min) Symbol 03 04 06 3/8 1/2 3/4 90-PF2W704, 90-

High performance type Step Motor Controller (Servo/24 VDC)

Product Outline 5 2.1 Product features 6 2.2 Product configuration 7 2.3 How to Order 8 2.4 Option 9 (1) Actuator cable [5 m or less] 9 (2) Actuator cable [8 to 20 m] 9 (3) Actuator cable for actuator with lock (for sensor and lock) [5 m or less] 10 (4) Actuator cable for actuator with lock (for sensor and lock) [8 to 20 m] 11 (5) I/O Cable 11 (6) Communication cable for controller setting

Standard Combinations

OUT 4-L J 2-K M M 4-K Port size Port size N Min. clearance for maintenance Drain Min. clearance for maintenance Drain D Lubricator Regulator Air filter D Lubricator Regulator Air filter ACG20 Optional (-Y) Upward facing handle ACG30/40 Optional (-Y) Upward facing handle A P G F E A F E P G 2-L B C 2-L B C H1 H2 H1 H2 OUT IN OUT IN SMC SMC 4-L 2-L J OUT OUT M 2-K M 4-K Port size Port size

JXCx-OMY0006

Current consumption Compatible encoder Incremental A/B phase (800 pulse/rotation) Battery-less absolute encoder ( 4096 pulses/rotation) LED Details L/A1 Link/Act 1 L/A2 Link/Act 2 LED display PWR Power supply ALM Alarm status MS Controller status NS Communication status Locking With unlocking terminal Cable length Actuator cable: 20 m or less Cooling method Air-cooling type Operating temperature

NCG/CG1

L D-A73 (Example) Lead wire length 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Intrinsically Safe Valve

(LL) 53-SY5 20-LL-01 (-F2) 3 4 5 L (Lead wire length) 156 Insulator: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 14.7 12 84.3 Terminal type (TT) 53-SY5 20-TT-01 (-F2) 3 4 5 Max. 10 L (Lead wire length) 189.6 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 101.1 7 Body Ported Series 53-SY5000/7000/9000 Dimensions: 53-SY7000 2-position single L-type plug connector (L) 53-SY7120-L-02 (-F2) With

V

Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L E T P O R T B Box type D Body type 06 6mm Tube 08 8mm Tube 01 Rc1/8 07 1/4 Tube 09 5/16 Tube T01 1/8NPT V A C U U M P R E S S U R E S 660mm Hg L 360mm Hg D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) Nozzle Diameter mm Specifications

Valve Single Unit

Solenoid Specifications Grommet (G)/(H), L plug connector (L), M plug connector (M) 24, 12, 6, 5, 3 10% of rated voltage 0.6 (With indicator light: 0.65) Electrical entry Coil rated voltage (V) Allowable voltage fluctuation Power consumption (W) Surge voltage suppressor Indicator light DC DC Diode LED Response Time Note) Based on dynamic performance test, JIS B 8375-1981.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow