Vacuum System Peripherals:

Series M3, M5, R 1/8 A hose nipple that provides large holding force for tubing.

Vacuum

Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.

Vacuum

Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.

o

(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03

o

(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03

Basic type / Direct mount type Series CY3B/CY3R

0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1236

0.55

Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) for Common Precautions. 30 Series VPA300/500/700 Construction Standard u y t r e w q JIS symbol N.C. N.O. (A) 2 (A) 2 12 12 Standard 1 (P) 3 (R) 1 (P) 3 (R) i (A) 2 (A) 2 2(A) 3(R) o For vacuum 12 12 3 (R) 1 (P) 1 (P) 3 (R) X 1(P) For vacuum u y t r e w q i 2(A) 3(R) o X Component Parts No.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

KJ

(mm) M5> M5> Weight (g) Model A M L Nylon Urethane 0.9 KJH23-M3 KJH23-M5 KJH23-01S KJH04-M3 KJH04-M5 KJH04-01S KJH06-M5 KJH06-01S M3 x 0.5 M5 x 0.8 R M3 x 0.5 M5 x 0.8 16.3 16.7 13.7 13.6 12.7 0.9 1.6 2 4.7 1.9 2.4 4.6 3.3 5.2 7 3.2 3 2.5 9.8 1 8 13.8 16.3 17 13.7 13.9 14.8 17.8 19.4 10 0.9 0.9 8 <R 1/8> 12.7 4 4 4 10.8 R 1 8 10 M5 x 0.8 14.7 4 10 4 10 13.5 10 6 15.4 R 1 8 Applicable

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

Hydraulic

5D (M) 100D (M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l

1

M: 3 mm or more 7 mm or less XA1 XA11 SR5 mm or more 20 20 SR5 mm only M: 8 mm or less M: 4 mm or more 8 mm or less SR6 mm or more 25 25 SR6 mm only M: 10 mm or less M: 4 mm or more 10 mm or less H: M5 or more, X: 20 mm or less H: M5 or less For 12 For 12 J: 3 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less H: M6 or more, X: 22.5 mm or less H: M6 or less 16 16 J :4 mm or more

3 Port Solenoid Valve Series SYJ300/500/700

(L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (W0): SYJ34-W0-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to the page 68 for dimensions with connector cable. 6 Series SYJ300 Manifold Specifications

S Couplers Series KK/KKH/KK13

Body size Port size M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK2P-M5M -01MS KK3P-01MS -02MS -03MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK2S-M5M -01MS KK3S-01MS -02MS -03MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

Compact Rotary Actuator Series CRQ2

(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,

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Y ~..Rat type Rat wfIh rib Deep type Bellows type G I G Flat R a1wi1h.ri!> M. M5 Modol ~ M6 M8 M5 1M6 M8 M5 M6 M8 M4 IM5 M6 M8 ZPR10g 10 12 12 21 29.9 46 5 6 3 1.7 19 20 i''i: '')I {''::''j ,"i'i 1,;,,1 I 19 1 :P>~2 ZPRIl8 , 20 ZF!