Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Fluororubber, Environment: Standard, Vacuum Outlet Port: Barbed Couplers, Pad diameter(ø): 32, Vacuum entry port thread diameter: ø6 nylon tube, Buffer specifications: Without whirl-stop, Buffer stroke(mm): 30, Mounting connection screw: M10 × 1 (male thread)

Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard, Vacuum Outlet Port: Barbed Couplers, Pad diameter(ø): 32, Vacuum entry port thread diameter: ø6 nylon tube, Buffer specifications: Without whirl-stop, Buffer stroke(mm): 30, Mounting connection screw: M10 × 1 (male thread

Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Urethane Rubber, Environment: Standard, Vacuum Outlet Port: Barbed Couplers, Pad diameter(ø): 32, Vacuum entry port thread diameter: ø6 nylon tube, Buffer specifications: Without whirl-stop, Buffer stroke(mm): 20, Mounting connection screw: M10 × 1 (male thread

Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Urethane Rubber, Environment: Standard, Vacuum Outlet Port: Barbed Couplers, Pad diameter(ø): 32, Vacuum entry port thread diameter: ø6 nylon tube, Buffer specifications: Without whirl-stop, Buffer stroke(mm): 30, Mounting connection screw: M10 × 1 (male thread

Pad Shape: Bellows, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Barbed Couplers, Pad diameter(ø): 16, Vacuum entry port thread diameter: ø6 nylon tube, Buffer specifications: With whirl-stop, Buffer stroke(mm): 10, Mounting connection screw: M10 × 1 (male thread)

Pad Shape: [Other Shape] Flat Type, Pad Type: Ribbed, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Barbed Couplers, Pad diameter(ø): 16, Vacuum entry port thread diameter: ø6 nylon tube, Buffer specifications: With whirl-stop, Buffer stroke(mm): 10, Mounting connection screw: M10 × 1

Pad Shape: Bellows, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Fluororubber, Environment: Standard, Vacuum Outlet Port: Barbed Couplers, Pad diameter(ø): 25, Vacuum entry port thread diameter: ø6 nylon tube, Buffer specifications: With whirl-stop, Buffer stroke(mm): 50, Mounting connection screw: M10 × 1 (male thread)

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50 53 19.5 29.5 <7.5 6 8 7.5 3.8 N6 (~,1 16.5 7 2.5 ., 1~ 15 12 22 38 5 6 3 1.8 ZPY~ 16 18 12.\ 22.5 :!as 3.5 1.2 ZPY100 1 0 12 15 25 , 41 5 6 ~ Hal 16.5 7. 2.5 Deep type (mm) us(~) /'i, :M!3xr H:IIIlXl25 Model M "I' e 0 Eo Y F F N6 (~) 165 7. 2.5 Deep type (mm) . 16.~ 7 2.5 G :M5Xo.s G:!0A6 Xl 'If U4j~1 14.5 5 1.8 ..

5-Port Solenoid Valve

Mounting screw Base gasket Connector gasket SY50M-M1-m (Without pressure gauge) SY50M-00/N0-m (With pressure gauge) SY70M-M1-m (Without pressure gauge) SY70M-00/N0-m (With pressure gauge) SY30M-M1-m (Without pressure gauge) SY30M-06/N6-m (With pressure gauge/ For even number station) SY30M-05/N5-m (With pressure gauge/ For odd number station) Specifications *1 3-position closed center and

ZP

0-A10 U C ZPR 30-0-A10 U C ZPR 40-0-A10 U C ZPR 50-0-A10 U C ZPRD30-0-A10 ZPR 10-0-A10 80 142 81 143 91 57 57.5 23 91.5 ZPRD40-0-A10 90 178 91 179 129 67 67.5 129.5 77 51 ZPRD50-0-A10 100 188 101 189 139 77 77.5 139.5 87 175 87.5 175.5 One-touch Fitting 77 97 185 97.5 185.5 Model K L M ZPR-04-A10 4 10.4 20.6 ZPR-06-A10 6 12.8 21.6 13-11-39 Series ZPR Connection One-touch fitting Pad Form

Vacuum Pad

2 2 Width across flat 7 Width across flat 7 Width across flat 7 3 3 1.8 1.8 5.2 1.8 2.2 4 3.4 8 4.5 6 9 7 Vacuum Inlet Dimensions ZP3-T04B;-A10-U4 ZP3-T06B;-A10-U4 ZP3-T08B;-A10-U4 ZP3-T04B;-A10-U2 ZP3-T06B;-A10-U2 ZP3-T08B;-A10-U2 ZP3-T04B;-A10-02 ZP3-T06B;-A10-02 ZP3-T08B;-A10-02 1.8 One-touch fitting 0.9 Barb fitting Width across flat 7 Width across flat 7 (8.7) (8.5) (6.5) Width across

Vacuum Pad

2 2 Width across flat 7 Width across flat 7 Width across flat 7 3 3 1.8 1.8 5.2 1.8 2.2 4 3.4 8 4.5 6 9 7 Vacuum Inlet Dimensions ZP3-T04B;-A10-U4 ZP3-T06B;-A10-U4 ZP3-T08B;-A10-U4 ZP3-T04B;-A10-U2 ZP3-T06B;-A10-U2 ZP3-T08B;-A10-U2 ZP3-T04B;-A10-02 ZP3-T06B;-A10-02 ZP3-T08B;-A10-02 1.8 One-touch fitting 0.9 Barb fitting Width across flat 7 Width across flat 7 (8.7) (8.5) (6.5) Width across

Vacuum Pad

2 2 Width across flat 7 Width across flat 7 Width across flat 7 3 3 1.8 1.8 5.2 1.8 2.2 4 3.4 8 4.5 6 9 7 Vacuum Inlet Dimensions ZP3-T04B;-A10-U4 ZP3-T06B;-A10-U4 ZP3-T08B;-A10-U4 ZP3-T04B;-A10-U2 ZP3-T06B;-A10-U2 ZP3-T08B;-A10-U2 ZP3-T04B;-A10-02 ZP3-T06B;-A10-02 ZP3-T08B;-A10-02 1.8 One-touch fitting 0.9 Barb fitting Width across flat 7 Width across flat 7 (8.7) (8.5) (6.5) Width across

ZP

2 2 Width across flat 7 Width across flat 7 Width across flat 7 3 3 1.8 1.8 5.2 1.8 2.2 4 3.4 8 4.5 6 9 7 Vacuum Inlet Dimensions ZP3-T04B;-A10-U4 ZP3-T06B;-A10-U4 ZP3-T08B;-A10-U4 ZP3-T04B;-A10-U2 ZP3-T06B;-A10-U2 ZP3-T08B;-A10-U2 ZP3-T04B;-A10-02 ZP3-T06B;-A10-02 ZP3-T08B;-A10-02 1.8 One-touch fitting 0.9 Barb fitting Width across flat 7 Width across flat 7 (8.7) (8.5) (6.5) Width across

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

10 12.5 39.5 10 12 23.4 50.5 84.5 With a stroke of 10 mm ZPR13F10-0-A10 13 15 23 ZF 10.5 13 40 23.9 51 85 ZPR16F10-0-A10 16 18 ZP S (mm) M14 x 1 ZCU Q: 4 Q: 6 Y Model R S R S Hexagon width across flats 19 AMJ ZPR10F10-0-A10 1.5 I 5 ZPR13F10-0-A10 10.4 20.6 12.8 21.6 Misc. 2 ZPR16F10-0-A10 Additional Dimensions by Stroke 5 J (mm) H I J Stroke Hexagon width across flats 12 20 +10 +38 +28 30

Vacuum Pad: Ball Joint Type

85 ZPR16F10-0-A10 16 18 Additional Dimensions by Stroke (mm) (mm) Width across flats 10 S Q: 4 Q: 6 M14 x 1 Y Model R S R S ZPR10F10-0-A10 H I J Hexagon width across flats 19 Stroke 1.5 ZPR13F10-0-A10 20 10.4 20.6 12.8 21.6 +10 +38 2 +28 I 5 ZPR16F10-0-A10 30 +20 +48 40 +30 +84 +54 50 +40 +94 5 J Hexagon width across flats 12 Applicable tubing O.D.Q H R Hexagon width across flats 12 F Hexagon

Stability of suction position,

Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-T32UMl-A10 22.1 21.8 24.6 ZP3E-T40UMl-A10 23.2 22.7 26.2 ZP3E-T50UMl-A10 33.8 33.0 39.2 408 A With Set Screw: Vacuum Inlet Vertical ZP3E Series Pad diameter 63 to 125 Dimensions/With Set Screw: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T63UMl-A16 ZP3E-T80UMl-A16 10 M16 x 1.5 48.9 Seal washer

Step Motor Controller

Parallel I/O Connector: CN5 Wiring diagram LECP6N(NPN) LECP6P(PNP) 24 VDC for I/O signal 24 VDC for I/O signal CN5 CN5 A1 COM+ COM+ A1 A2 COM COM A2 A3 IN0 IN0 A3 A4 IN1 IN1 A4 A5 IN2 IN2 A5 A6 IN3 IN3 A6 A7 IN4 IN4 A7 A8 IN5 IN5 A8 A9 SETUP SETUP A9 A10 HOLD HOLD A10 Specific Product Precautions Specific Product Precautions A11 DRIVE DRIVE A11 A12 RESET RESET A12 A13 SVON SVON A13 Load Load

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R Width across flats 10 Width across flats 2 F E D C Y 2 A B Additional dimensions by stroke (mm) Dimensions/10mm stroke (mm) H I J Q: 4 Q: 6 Stroke Y I E A B C D F H J Model R S R S 20 +10 +38 +28 ZPR10F10-0-A10 30 10 12 10 12.5 23.4 39.5 50.5 84.5 1.5 +20 +48 23 ZPR13F10-0-A10 40 13 15 +30 +84 10.4 20.6 12.8 21.6 10.5 13 23.9 40 51 85 2 +54 ZPR16F10-0-A10 50 16 18 +40 +94 ZPR 20/25/

Step Motor Controller

Parallel I/O Connector: CN5 Wiring diagram LECP6N(NPN) LECP6P(PNP) 24 VDC for I/O signal 24 VDC for I/O signal CN5 CN5 A1 COM+ COM+ A1 A2 COM COM A2 A3 IN0 IN0 A3 A4 IN1 IN1 A4 A5 IN2 IN2 A5 A6 IN3 IN3 A6 A7 IN4 IN4 A7 A8 IN5 IN5 A8 A9 SETUP SETUP A9 A10 HOLD HOLD A10 Specific Product Precautions Specific Product Precautions A11 DRIVE DRIVE A11 A12 RESET RESET A12 A13 SVON SVON A13 Load Load