Body/Exhaust Type: B (Single Unit - Port Exhaust), Nominal Nozzle Size: 07 (ø0.7), Supply Valve and Release Valve: J (N.C. / None), Rated Voltage: 6 (12 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 09 [

Nozzle Diameter: ø1.0mm, Vacuum Pressure: -90 kPa, SUP: One-touch Fitting ø1/4", VAC: Screw-in NPT 1/8, EXH: One-touch Fitting ø5/16", Accessories: w/o Standard Bracket, w/Silencer

Nozzle Diameter: ø1.0mm, Vacuum Pressure: -90 kPa, SUP: One-touch Fitting ø1/4", VAC: Screw-in NPT 1/8, EXH: One-touch Fitting ø5/16", Accessories: w/Standard Bracket, w/Silencer

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -48, Air Consumption Flow Rate(l/min): 52, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 1/4 (Ø6.35), Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: 1/4 (Ø6.35), Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6

VM

VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green

Table of Contents

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

Proposals for Energy Saving

Box Type (with Built-in Silencer) B S 07 ZH 06 06 Body Ported Type (without Silencer) D S 07 ZH 01 01 01 EXH port size Note) Nozzle diameter Symbol Size Type One-touch One-touch One-touch One-touch One-touch Threaded Threaded Threaded Threaded 05 07 0.5mm 0.7mm 6 8 10 12 16 06 08 10 12 16 01 02 03 04 10 1.0mm 13 1.3mm 15 1.5mm 18 1.8mm Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 20 2.0mm Maximum

Prevents Micro-Bubbles

LQ 2 U 03 PAX PB Tubing size Symbol 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 19 25 Body class Applicable fitting Tubing O.D. 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Type of fitting Symbol Nil 1 Applicable fitting LQ2 LQ1 2 Body class Symbol 2 3 4 5 6 Applicable fitting Body class 2 3 4 5 6 3 LQ2 LQ2 4 LQ1 Type of part Symbol U B N Type

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

Clean Regulator/Fluororesin Type

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

EXxx-OMN0035CN

) ST(I) (07 ) ST(O) ON/OFF (07 ) ST(I) ON/OFF (07 ) ST(O) (07 ) (SI ) -52No.EX-OMN0035CN-A OFF (LED 0707) ON (LED 07) ()07 ON (LED 07) ()07 (SI ) -53No.EX-OMN0035CN-A EX600-DMPE EX600-DMNE EX600-DMPF EX600-DMNF PNP NPN PNP NPN D-sub(25 ) No.4-40 UNC (32 ) 8 () DC24 V Class22 A 2 A/ 0.5 A/ 2 A/ 4.7 k 5 mA ON /ON 17 V /3 mA (NPN 24 V ) (PNP 0 V ) OFF /OFF 5 V /1 mA (NPN

Mechanical Valves Series NVM, NVFM, NVZNI

To reassemble, push button firmly into spring clip. 2 Series NVM MECHANICAL VALVES HOWTO ORDER DIMENSIONS NVM 100 HOW TO ORDER NVM 120 N01 065 -rr vatve series T = 2-way;2porls = 3-way;2ports 120 130 I lRoller Material (06 & 07 Only) | -: Nylon(Standard) I S : Steel I lActuator 00 = Valve Body Only 05 = Plunger 06 : Roller plunger Inline 07 = Roller Plunger, Set 90" 08 : Toggle 30 = Push

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

IIIIIII

To reassemble, push button firmly into spring clip. 2 Series NVM MECHANICAL VALVES HOWTO ORDER DIMENSIONS NVM 100 HOW TO ORDER NVM 120 N01 065 -rr vatve series T = 2-way;2porls = 3-way;2ports 120 130 I lRoller Material (06 & 07 Only) | -: Nylon(Standard) I S : Steel I lActuator 00 = Valve Body Only 05 = Plunger 06 : Roller plunger Inline 07 = Roller Plunger, Set 90" 08 : Toggle 30 = Push

Quick Exhaust Valve Series AQ 1

-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8 7.1 52.2 33.1 20.0 13 11.8 1/4" 13.2 11 1/4" 13.2 7.1 22.2 15-12-4

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

Air Suction Filter With One-touch Fittings ZFB Series

Note) PVF: polyvinyl formal Replacement Element Part No. eZFB200-06 ZFB201-07 Applicable filter model Element size mm Set description Element O-ring for cover Part no.

2/3 Port Valve

No. 06 12V DC 55 100V DC 56 110V DC DC 001 VXF21ll 07 240V AC 50/60Hz VXF22ll 002 Note 1) The voltage codes of 01 to 08 when the suffix "0" is removed, are the same as the solenoid valve model codes.