AF800/900

VE How to Order Flow Characteristics VY1 12 AF 00 8 127 R Pressure drop (MPa) G P1 = 0.3 MPa P1 = 0.3 MPa Option P1 = 0.5 MPa P1 = 0.7 MPa P1 1 = 0.5 MP = 0.5 MPa P1 = 0.7 MP = 0.7 MPa P1 = 0.1 MPa P1 1 = 0.1 MPa Air filter PPA Drain cock thread piping {Rc 1/4} Drain guide D Body size 4 J R 8 9 1 2 1 2 AL Flow direction: From Right Left Auto-drain specifications Option Flow rate (/min (ANR

E-P HYREG ® Series VY1 1

A port: n-Rc 1/8 Note for P1 Confirm internal pilot or common external pilot by checking whether P1 has a M5 screw or not. Internal pilot P1 has no M5 screw. Common external pilotP1 has an M5 screw.

E-P HYREG ® Series VY1

A port: n-Rc 1/8 Note for P1 Confirm internal pilot or common external pilot by checking whether P1 has a M5 screw or not. Internal pilot P1 has no M5 screw. Common external pilotP1 has an M5 screw.

Table of Contents

Moment M2max (from (3) of graph MY1C/M2) = 23.0 (Nm) M2 = m2 x g x Y = 6.525 x 9.8 x 29.6 x 103 = 1.89 (Nm) MX m2 Load factor 3 = M2/M2max = 1.89/23.0 = 0.08 MTS M2 MY 5.

SI Unit for Vacuum Manifold

Pressure P1 (Index 64) Table 3-9. Pressure P1 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x0258 Vacuum confirmation threshold (P1) of CH0 Set vacuum confirmation threshold (P1) for each CH. Refer to Section 5.

Mechanically Jointed Rodless Cylinder Series MY1

M2 max (from (3) of graph MY1C/M2) = 23.0 (Nm) MY1B M2 = m2 x g x Y = 6.525 x 9.8 x 29.6 x 103 = 1.89 (Nm) m2 Load factor 3 = M2/M2 max = 1.89/23.0 = 0.08 MY1M M2 MY1C 5.

Table of Contents

Plug-in type Non plug-in type VVZS3000-22A-1 VVZS3000-22A-2 VFN G L M KZ D Cylinder side pressure Check valve Applicable valve model VZS3450-FZ VZS34504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 210 Ncm3/ min or less Solenoid one side energized 1(P) 210 Ncm3/ min or less Leakage 0.5 MPa Solenoid both sides energized 1(P) Piston SUP side pressure P1 SUP side pressure P1 (MPa) 0 Operating

PSE200

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

VNH

Supply pilot air higher than 0.25 MPa to P1 port Piping Inlet side (supply side): P port, Outlet side (exhaust side): A port Supply pilot air higher than 0.25 MPa to P1 port. PA VNH 12(P1) 12(P1) Nozzle 2(A) 1(P) PAX Nozzle 1(P) 2(A) 3(B) Stop valve Tank Coolant pump PB Tank Coolant pump For reducing load to pump, coolant liquid is returned from B port to tank each time.

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

MY1

Moment M2max (from (3) of graph MY1C/M2) = 23.0 (Nm) M2 = m2 x g x Y = 6.525 x 9.8 x 29.6 x 103 = 1.89 (Nm) MX m2 Load factor 3 = M2/M2max = 1.89/23.0 = 0.08 MTS M2 MY 5.

ZISE3.eng

Set value input mode Press the "SET" button to display "P1-20" 1. The output OUT1(1) set value input mode is selected. 1: The set value of P1 is -20 ZSE3/ISE3(L) kPa RESET SET LED Bottom hold mode Pressing the button when pressure is displayed enables the lower limit peak value (value with low vacuum) to be held. In this case "d" is displayed on the LCD.

Basic type / Direct mount type Series CY3B/CY3R

L2 L1 xStatic moment Examine M2. Since M1 & M3 are not generated, investigation is unnecessary. M2 = W L1 = 10 0.05 = 0.5 [Nm] 2 = M2/M2 max = 0.5/16 = 0.031 W = 1 [kg] = 10 [N] W M Find the value M2 max when Va = 300 mm/s from Graph (3).

e

: Moment Z M2 max (from 2 of graph MY2H / M2) = 19.5 (NNm) .

Mechanically Jointed Rodless Cylinders

Coordinates and Moments Load Weight and Static Moment Horizontal mounting Wall mounting Ceiling mounting z M1 M3: Yawing M2 M3 M1 M2 M2 y m1 x g X x Y y m2 x g z X Z m3 x g x X x Y Vertical mounting M1: Pitching Mounting direction Static load m Horizontal m1 Ceiling m2 Wall m3 Vertical m4 Note) M3 m1 x g x X m1 x g x Y m2 x g x X m2 x g x Y m4 x g x Z m4 x g x Y y M1 M2 M3 m3 x g x Z

PA3000/5000/PAX1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

Power Valve Precision Regulator

P1 P1 P1 P1 37 43 19.5 19.5 5.5 P=31 21.5 L1 L2 6.5 Pressure gauge (Option) G27-10-R1-X207 26 Port 3(R): 1 8 External pilot port For 6 manifold stations or more, exhaust from the both sides.

Step Motor Controller

L1 L2 L2 Main circuit power supply L3 L3 Regenerative converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.) P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.)

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Type (mm) 1in = 25.4mm PA3000 115 68 85 105 4-7 7.5 FLUID OUT 3/8 5.5 AIR SUP (P1) 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (P1) 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN 1/2, 3/4 1/4 10 Series