VXD21/22/23

IN Model/Valve Specifications Max. operating pressure differential (MPa) Connection Weight (g) Av x 10-6 (m2) Cv converted C [dm 3/(sbar)] b Cv Water, Oil Air Flow characteristics Min. operating pressure differential (MPa) Orifice size (mm) Model Air Water Thread Oil AC DC AC DC AC DC 0.7 0.7 1.0 0.7 1.0 1.0 Max. system pressure (MPa) 1 4 1.9 2.4 4.5 2.4 5.5 9.5 VXD2130-

ZR

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Components Valve unit + Ejector unit Individual, common and port exhaust style for nozzle size 10, 13 Common and port exhaust style for nozzle size 15 Individual exhaust style for nozzle size 15 M2 x 0.4 x 13 2 2 2 2 2 2 2 4 4 M2 x 0.4 x 23 M2 x 0.4 x

45

Connector block assembly (For 9 to 17 stations (T1) terminal block) t-6 SX5000-64-8A SX3000-64-8A M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) SX5000-57-6 Round head combination screw y Gasket DIN rail SX3000-57-4 VZ1000-11-1u i Refer to page 1-6-77. Note) The numbers t1 to 4 are for 24 VDC. For 12 VDC, suffix -12V to the parts no.

45

Connector block assembly (For 9 to 17 stations (T1) terminal block) t-6 SX5000-64-8A SX3000-64-8A M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) SX5000-57-6 Round head combination screw y Gasket DIN rail SX3000-57-4 VZ1000-11-1u i Refer to page 1-6-77. Note) The numbers t1 to 4 are for 24 VDC. For 12 VDC, suffix -12V to the parts no.

1.1

This can be measured in [m2/s] units, but in general, [St] (Stokes) are used. 1 [St] = 0.0001 [m2/s] DC canned pump A pump with a seal-less construction combining the motor and the pump in one. It can be made in compact sizes with absolutely no external leakage of fluid. A DC brushless motor is used.

Stainless Steel 316

Note 1) P Model Weight (g) W L1 L2 P M1 M2 (mm) 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4.2 10.6 21.2 41 16.8 10.6 18 17 35 L2 M1 10.6 13 26 42.9 17 13 18.8 17.8 54 L1 25.6 15 30 47.7 18.7 15 20.9 19.9 75 18 40 36 52.8 20.5 18 23 22 114 M2 N 57.4 20.8 41.6 57.8 21.9 21 24.8 23.8 175 Note 1) D is maximum diameter.

Mini Free Mount Cylinder

x 0.4 M2 x 0.4 2 4.6 1.6 4 1.6 6 7 2.5 12.5 Rod end nut part no. : NTJ-004 Use caution especially when multiple cylinders are used in pararell such as stacking because the body width dimensions have plus tolerances.

Refrigerated Thermo-chiller

This can be measured in [m2/s] units, but in general, [St] (Stokes) are used. 1 [St] = 0.0001 [m2/s] DC canned pump A pump with a seal-less construction combining the motor and the pump in one. It can be made in compact sizes with absolutely no external leakage of fluid. A DC brushless motor is used.

Rotary Actuator/Vane Style Series CRB1

CRQ2X MSQX M1 M2 Body (B) MRQ N Body (A) 2 x R A port J E2 H E1 F S A port B port N 2 x R Y Y A1 M1 A2 P 6 x Q X A1 (mm) R () E1 (g6) E2 (h9) F (h9) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW 5026 18 14 M6 x 1 depth 9 0 0.043 0.006 0.017 0 0.052 R6 1/8 67 70 3 10 13 5 50 60 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 11.9 12 25 CRB1BW 50-E CRB1BW 6321 18 29 22 15 M8 x 1.25

Precision Regulator

(B) m2 Main valve MPa/ m (S) 1 1 Daiph (A) m2 press Press Press. Displ m Displ m spring Compd. spring Compd. M Pa MPa MPa (A) m/N (B) m/N Force N Diaph.(C) m2 Daiph.(A) m2 Block diagram Force N -6- 3.

Precision Regulator

(C) m2 Main valve MPa/ m (S) 1 1 Displ m Displ m Daiph (A) m2 press MPa Press Press. spring Compd. spring Compd. MPa MPa (A) m/N (B) m/N Force N Diaph. (C) m2 Daiph.(A) m2 Force N Block diagram -6- 3.

Stainless Steel One-touch Fittings Series KG

(mm) I Weight (g) Nylon Urethane M1 D1 D2 L1 Q L2 P M2 Part No. 9.7 11.7 8 6 35.5 40.5 6 4 KGUD06-08 KGUD04-06 10.4 18.2 16 12.8 20.3 17 12.8 15.2 10.4 12.8 21 26 17 18.5 4.2 13.4 4.2 13.4 11 19 Plug-in reducer: KGR Effective orifice(mm 2) Applicable tube O.D. (mm) Applicable fitting size d Part No.

Uniaxial Electric Actuator Series LJ1

acceleration (mm/s) Mounting position Direction of load movement Model LJ1H10 LJ1H20 LJ1H30 Horizontal/Lateral Horizontal/Lateral Vertical Lateral Horizontal a M1 2000 a=1000 a=1000 2000 2000 a=1000 L1 mm L1 mm L1 mm Pitching W a=2000 a=2000 a=3000 a=3000 a=2000 1000 1000 1000 L1 a=3000 0 2 4 6 8 10 0 10 20 30 0 20 40 60 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 L2 M2

Series KG Stainless Steel One-touch Fittings

(mm) I Weight (g) Nylon Urethane M1 D1 D2 L1 Q L2 P M2 Part No. 9.7 11.7 8 6 35.5 40.5 6 4 KGUD06-08 KGUD04-06 10.4 18.2 16 12.8 20.3 17 12.8 15.2 10.4 12.8 21 26 17 18.5 4.2 13.4 4.2 13.4 11 19 Plug-in reducer: KGR Effective orifice(mm 2) Applicable tube O.D. (mm) Applicable fitting size d Part No.

IZx-OMP0064

IZS41 RC ZS-28-C IZS30 M2 Piping port IZS40 IZS41, IZS42 Piping port 2-1-2. Distance for installation Install the ionizer with the distance from the workpiece to be neutralized within the ranges specified in the table below.

Thermo-chiller

+ 0.43 m2 0.37 m2 0.19 m2 965 mm 970 mm 500 mm 445 mm 377 mm 377 mm Globally compatible power supplies 50 Hz 60 Hz 50/60 Hz Power consumption reduced by 17% Energy saving 3-phase 200 VAC 3-phase 200 to 230 VAC 3-phase 380 to 415 VAC 3-phase 460 to 480 VAC Single-phase 200 to 230 VAC HRLE Series : HRLE090 : HRLE050 CAT.ES40-75A A Circulating Fluid Temperature Controller Thermo-chiller Compact

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 A2 SMC SMC J 27 H X For single vane: Above illustrations show actuators for 180 when B port is pressurized.

CRB2/CRBU2/CRB1

M1 M2 Body (B) N Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R CRB1 Y Y A1 M1 A2 P 6-Q X A1 (mm) R (RC) E2 (h9) F (h9) E1 (g6) V B W C Model A1 D G M2 X U A2 Y H N P J Z M1 S Q K T L CRB1BW 50CRB1BW 50-E CRB1BW 63CRB1BW 63-E CRB1BW 80CRB1BW 80-E CRB1BW 100CRB1BW 100-E 26 21 29 27 30 29 35.5 38 18 22 30 32 14 18 15 25 20 30 24 38 M6 x 1 depth 9 12 0.006 0.017 11.9 0 0.043 25 0

Rotary Cylinder Series MRQ Size: 32, 40 1

Load at end of lever Position of rotational axis: Perpendicular to the plate through one end 2 1 2 2 a + K = m1 + m2 3 a Ex.) When shape of W2 is a sphere, refer to u, and 4a + b 2 1 2 4a + b 2 2 2 = m1 + m2 12 12 It becomes K = m2 2r2 5 5. Thin rectangular plate (Rectangular parallelepiped) 10.

Table of Contents

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 A2 SMC SMC J 27 H X For single vane: Above illustrations show actuators for 180 when B port is pressurized.