0.4

F kit U side D side 16 stations 1 to 12 stations 24 D side D-sub connector kit P kit 1 to 12 stations 24 D side (1) 16 stations 26P 20P 1 to 9 stations 18 Flat ribbon cable connector kit J kit Flat ribbon cable (20P) PC wiring system compatible JD0 D side 1 to 8 stations 16 16 stations Flat ribbon cable (20P) (PC Wiring System compatible) T kit TD0 D side Terminal block box kit 1 to 10 stations

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

Modular Type Air Filter Series AF

Body size C With bowl guard AF20 Port size M5 1/8 1/4 3/8 1/2 3/4 1 AF10 to 60 Symbol 10 20 30 40 50 60 Note 5) Drain guide 1/4 AF30 to 60 N Note 1) Float type Note 4) auto drain (N.O.) M5 01 02 03 04 06 10 D AF30 to 60 Flow direction: Right to left AF10 to 60 F Note 2) Note 3) Bracket is not assembled and is supplied loose at the time of shipment.

Rotary Clamp Cylinders

BQ-1 1.5 Description Size Qty. BQ-2 1.5 M3 x 0.5 x 8 l BQ-1 1 D-A7 D-A8 D-F7 D-J7 Auto switch mounting screw BQ2-012 5 M3 x 0.5 x 10 l BQ-2 1 BBA2 BQP1-050 16 Auto switch mounting nut (Square nut) BQ-1 1 M3 x 0.5 Auto switch mounting nut (Convex type) BQ-2 1 M3 x 0.5 Note) When using BQ-1, BBA2 may be used by itself.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

AC Servo Motor Driver (Network card type ）

_ _ 1 A 346 _ _ 0 B 818 _ _ 1 B 333 _ _ 0 C 750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 7 7.

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Clamp Cylinder with Lock

Auto switch model Auto switch 63 32 40 50 9 4 7 11 32 40 50 63 D-A93 D-M9B D-M9BW D-B54 8 4 6.5 10 8 3.5 5.5 10 8 4 5 9 D-A93 D-M9B D-M9BW D-B54 Note) Note) Note) Note) qBMA2-032 wBJ3-1 qBMA2-040 wBJ3-1 qBMA2-050 wBJ3-1 qBMA2-063 wBJ3-1 BA-32 BA-04 BA-05 BA-06 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" 1 1/4" x 1.1" 1 2 3 4 5 6 7 1 Fitting type D 2 Symbol P Type Plug 3 MS 4 5 6 LQ Tubing plug MQR LQ3 P 03 1 2 T Nut material, packaging Size Symbol 1 2 3 4 5 6 Symbol Nil 1 2 3 Size 1 2 3 4 5 6 Applicable tubing size Nut material PFA PFA PVDF PVDF Packaging Used to block fittings which are not being used.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 100 200 205 M5 standard 1/8 standard 1/4 standard 3.2 4 6 8 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" Use 1/8" tube.

3

Wetted parts material Note 5) Non-grease Note 5) Refer to Wetted Parts Piping port size 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 705 g 840 g 1 1/4, 1 1/2 Construction on page 6 for details.

LEC-OM07605CN

PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Example) 10-SS3YJ3-20-03 . 1 set (manifold base) 10-SS3YJ3-42-03-C4 . 1 set (manifold base) SYJ300-10-7A . 1 set (blanking plate assembly) 10-SYJ312M-5LZ-M3 . 2 sets (valve) 10-SYJ314M-5G . 2 sets (valve) SYJ300-10-7A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

VXP21/22/23

E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36 D.8 AR4001 1/4 3/8 1/2 70 149.5 37.5 70 38 50 54 54 8.5 10.5 70 2.3 4 ~ Dimensionwameans from port center to eccentric direction of gauge center. Modular Type Filter I Regulator with Built-in Pressure Gaug.

JXCx-OMX0009

E.g.) 1 byte Hexadecimal Binary Decimal (OCT) (HEX) (BIN) 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 0 0 0 0 0 0 1 0 2 2 0 0 0 0 0 0 1 1 3 3 0 0 0 0 0 1 0 0 4 4 0 0 0 0 0 1 0 1 5 5 0 0 0 0 0 1 1 0 6 6 0 0 0 0 0 1 1 1 7 7 0 0 0 0 1 0 0 0 8 8 0 0 0 0 1 0 0 1 9 9 0 0 0 0 1 0 1 0 10 A 0 0 0 0 1 0 1 1 11 B 0 0 0 0 1 1 0 0 12 C 0 0 0 0 1 1 0 1 13 D 0 0 0 0 1 1 1 0 14 E 0 0 0 0 1 1 1 1 15 F 0 0 0 1

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

JXCx-OMT0061CN

(1) D <> <> <>(C24V) RESET SVON (1) 1-147 D <> <> <> (1-148) RESET SVON (1) D <> 74 - <> 1-149 RESET SVON D <> <> <> *2 LED PLC 11 10: RESET SVON PLC 1-150 D LED RWr0,bit F (LRUN) *2 ON PLC RWw0,bit 2:ON Ry0B: RESET ON OFF PC/TB Ry0B: RESET ON PLC PLC PC/TB PC:TB: <> 1-192 E <> <> ON(SVON ON) 1-193 E <>ON SVON ON <> 1-194 E <> <> 1-195 E <> <