Thermo-con/Rack Mount Type

228.5 228.5 7 171.3 171.3 149 162 (221) ( ): For HECR008 95.2 95.2 38 38 0 24 20 0 Handle (for installing/removing the product to/from the rack) Caution label/High temperature 0 484 444 379 326 59 42 9.5 474.5 Circulating fluid drain port CPC PLCD 16004 Model no. label External temperature sensor connector Alarm output connector Ventilation hole (air outlet) Label Power supply connector 104

76

F (C) Correction factor 58.0 (0.4) 0.9 1.06 72.5 (0.5) 36 to 77 (2 to 25) 0.93 1.02 87.0 (0.6) 86 (30) 0.96 1 101.5 (0.7) 90 (32) 1 116 (0.8) 0.99 95 (35) 1.03 130.5 (0.9) 0.98 104 (40) 1.06 145 to 232 (1 to 1.6) 0.92 113 (45) 1.09 1 Refrigerant R407C (HFC) Series IDF100FS/125FS/150FS Applicable Compressor Size: 100 kW, 125 kW, 150 kW (Max. inlet air temperature: 140F (60C) (Max. ambient

Battery-less

LEYG), Ball screw (LEYGD) Guide type Sliding bearing (LEYGM), Ball bushing bearing (LEYGL) Operating temp. range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Motor size m28 m42 m56.4 m56.4 Motor type Battery-less absolute (Step motor 24 VDC) Encoder Battery-less absolute Power supply voltage [V] 24 VDC 10% Power [W]*8 *10 Max. power 43 Max. power 48 Max. power 104

JIS Standard Hydraulic Cylinder

CH2E 66.5 67 66.5 67 69.5 65 104 114 CH2F 100 65.5 67 65.5 67 68 102.5 112.5 CH2H 67.5 67 67.5 67 71 66.5 105.5 115.5 Note 1) Auto switch models D-A9, A9V cannot be mounted on cylinders with bore sizes CHD2E32 to 100, CHD2H32 to 100, and CHD2F32.

Slide Unit Series CX2/CXWM/CXWL

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2

7

) 7 E VXD2 32A 29.5 67 35 160 55 22 51.5 135 12 100 36 98.5 (106.5) 104 (112) 179.5 (187.5) 192.5 (200.5) 8 F VXD2 40A 32 70 69.5 40 170 57.5 24.5 54.5 140 14 105 42 9 G VXD2 50A 32 77.5 69.5 40 180 57.5 24.5 59 155 14 120 52 ( ): Denotes the Normally Open (N.O.) dimensions. 153 For Heated water/High temperature oil VXD Series 7 E 8 F 9 G Dimensions/VXD2 /2 /2 Body Material: CAC408 Conduit

High Vacuum Angle Valve

) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104

ZP

Thin flat type with ribs Deep type For workpieces with curved surfaces or for spherical workpieces C O N T E N T S Basic Pad ZP Series Variationsp. 27 Specifications p. 29 Thin Flat Type with Ribs How to Orderp. 95 Dimensions/Models p. 96 Deep Type How to Orderp. 104 Dimensions/Models p. 105 Flat Type How to Orderp. 31 Dimensions/Models p. 32 Flat Type with Ribs How to Orderp. 50

ZP

40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103 125 ZP125H 128 C 80 104

CA2

31.5 81.5 38 31.5 73 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 50 42 42 77 86.5 77 76.5 35.5 86.5 42 35.5 78.5 6 5 9 2.5 1.5 3 2 8 4.5 3.5 6.5 5.5 14 13 63 49 46.5 91 93.5 91 83.5 43 93.5 47 43 85.5 9.5 7.5 4.5 12.5 6 4 6.5 4.5 8 6 10 8 17.5 15.5 80 107 57.5 53.5 107 102 92 51 102 53.5 51 94 11 10 14 13 7.5 6.5 8 7 9.5 8.5 11.5 10.5 19 18 100 121 68 61.5 121 112 102.5 57.5 112.5 61 57.5 104

CJ2

Bore size (mm) 10 16 B NA WB WW C NB Z CZ S ZZ GA WA GB 15 19.5 21 14.5 26.5 4.5 17 33 101 15 65 112 7.5 18.3 21 5.5 24.5 14.5 31.5 20 38 104 18.3 66 118 7.5 6-3-10 11 11 Series CJ2 Air Cylinder: Standard Type Double Acting, Single Rod Accessory Bracket Dimensions Knuckle Pin Clevis Pin Single Knuckle Joint CJ1 CJP Material: Rolled steel Material: Stainless steel Material: Stainless steel

1

The standard grease supply port has a hexagon socket head set screw. 25 39 86 (94) 64 29 46 96 (105) 77 31 57 109 (121) 92 34 56 112 (124) 100 46 68 137 (151) 115 47 68 138 (152) 140 8-31-121 104 Made to Order Individual Specifications: Guide Cylinder Series MGG Please contact SMC for detailed dimensions, specifications, and lead times.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

MU 40 32 5.0 4.0 3.0 (g) Table (2) Weight of Cylinder Movable Parts/Without Built-in Magnet D25 Cylinder stroke (mm) 2.0 Bore size 20 16 (mm) 5 10 15 20 25 30 35 40 45 50 75 100 -X 1.0 5 6 7 8 10 11 12 12 209 11 13 15 17 19 16 0.5 0.4 0.3 15 18 21 24 27 31 34 37 40 44 20 Data 24 28 33 37 42 46 51 55 60 64 25 0.2 45 52 60 68 76 84 92 100 107 115 170 209 32 0.1 0 50 100 64 72 80 88 96 104

7ND9071en

184 458 169** 448 451 177 199 197 171 173 7 ND90 71 en 45 Item Qty Description Spare part modules 2 1 Housing 15 1 O-ring 16 1 Washer 18 1 Wave spring 19 1 Bushing 36 1 Grounding screw 39 1 Inner cover 42 3 Screw 47 3 Screw 57 1 Conduit entry adapter 61 1 Spool valve cover 63 1 Gasket 100 1 Cover ND92_E1 = H087634, ND92_E2 = H087617, ND9300 = H087628 ND72_E1 = H087634, ND72_E2 = H087617 104

SFOD-OMT0010

Controller and Peripheral Devices / Specific Product Precautions 101 14.1 Design and selection . 101 14.2 Handling Precautions . 101 14.3 Mounting . 103 14.4 Wiring . 103 3 No.SFOD-OMT0010-B 14.5 Power supply . 104 14.6 Grounding . 104 14.7 Maintenance . 104 15. Troubleshooting . 105 15.1 Operation Errors . 105 15.2 Position / Speed problems . 108 Supplement 1.

AC Servo Motor Driver (Pulse input type/Positioning type ）

PT0 to PT7 and M code are not outputted in automatic continuous operation. 16 104 16. POSITIONING MODE d) Varying-speed operation by incremental value command method Example.

MQQ

RB A + Stroke FZ J Double clevis style: MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU D10 CU 10 to 40 61.5 90.5 5 84.5 4 10 CD hole H10 Shaft d9 Cap bolt 16 10 to 60 70.5 107.5 8 98.5 5 12 -X 20 10 to 60 79 119 10 109 5 14 25 10 to 50, 75, 100 84.5 126.5 10 116.5 5 14 2028 10 to 50, 75, 100 104 148 10 138 6 14 CX +0.4 +0.2 CT Data CZ 0.1 0.3 CW B + Stroke L Bore size (mm) CW CX CZ

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

LJ1H

40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104

KA

I PBT parts have conductive (104 to 107 ) and fire resistant applications.