VQ

VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43 n: Station (Max. 18) Dimensions n L 2 52 63 83 112.5 123 11 142 153 173 200 210.5 3 62 73 93 112.5 123 12 152 163 183 212.5 223 4 72 83 103

VXA21/22

Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.

XL

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

%silltr

Powet Preflx Svmbol Pourer Preflx Svmbol 10-1 deci d 101 Deka da fi2 Heclo h 1O-2 centi c iO-3 milli m 103 Kilo k 10-6 micro ], tO6 Mega M Table 3.2 Prefixes tor powers of ten This lads us to a kPa (kilo-pascal or 1/100 b ol a BAR) and an MPa (1,OOO,OO0 pascals or 10 BAF). Practice with these prefixes and pay attention to what th symbol represents in terms of powers of ten.

MU

122 CB 23 27 31 37 48 CA 53 67 85 103 122 Size 25 32 40 50 63 Size 25 32 40 50 63 Part No.

3 Port Solenoid Valve Series VQ100

Manual override 21.5 (29.3) VP 104 S070 VQ VKF Stations12345n D side U side VQZ 2-M5 x 0.8 (E port) VZ 2-M5 x 0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum 18 stations) Formula: L1 = 10n + 32 L2 = 10n + 43 Dimensions n L 2 3 4 5 6 7 8 9 10 L1 L2 (L3) (L4) (L5) 11 12 13 14 15 16 17 18 52 63 83 112.5 123 62 73 93 112.5 123 72 83 103

3 Port Solenoid Valve Series VQ100 1

125 135.5 82 93 113 137.5 148 92 103 123 150 160.5 102 113 133 162.5 173 112 123 143 162.5 173 122 133 153 175 185.5 132 143 163 187.5 198 142 153 173 200 210.5 152 163 183 212.5 223 162 173 193 212.5 223 172 183 203 225 235.5 182 193 213 237.5 248 192 203 223 250 260.5 202 213 233 262.5 273 212 223 243 262.5 273 4-12-13 14 Series VQ100 How to Order Manifold How to Order Manifold Assembly

Hygienic Design Cylinder Series HY

Mass (g) B FD FE FT FX FY FZ Fd Mounting bolt ZA ZB 82 87.5 102.5 103 ZC 104 111.5 134.5 135 ZB 97 102.5 117.5 118 ZC 119 126.5 149.5 150 HY-F032SUS HY-F040SUS HY-F050SUS HY-F063SUS 32 40 50 63 M6 x 1 x 18L M6 x 1 x 18L M8 x 1.25 x 20L M8 x 1.25 x 20L 260 320 580 770 49.5 57.5 69 82 7 9 9 9 6 8.5 11 11 10 10 12 12 64 72 90 100 32 36 45 50 80 90 110 120 29 34 39 44 152 169 187 202 Note 1)

AS

Operating Pressure Flow Direction Symbols on Body Average particle concentration Particles/ft3 1.2 104 Max. operating pressure MPa Meter-out type Meter-in type Grade 4 1.0 103 Symbol 0.8 Grade 3 102 0.6 101 Grade 2 JIS Symbol 100 0.4 Grade 1 10-1 0.2 0 -5 0 20 40 60 1 0.1 0.2 0.3 0.5 Operating temperature C Particle size m or less Note) Refer to back page 10 for details. 489 Series AS-FPQ

Compressed Air Cleaning Filter Series

. 48 Series AME Dimensions AME150C to 350C P Q T S R F E D N Bracket L U (Accessory) O K G M V W J B OUT IN C I A Maintenance space (mm) A Model Port size Bracket related dimensions B C D E F G I 98.5 N 56 J 20 K 5 U 6 V 6 L 12 M 6 W 10 O 35 P 70 Q 26 R 54 S 4.5 T 1.6 AME150C AME250C AME350C 10 54 63 7.5 63 10 1/8, 1/4 83 14 73 76 5 76 10 121 66 24 8 6 6 12 6 10 40 80 28 66 5 2 1/4, 3/8 103

2/3 Port Valve for Various

) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20 ( ): N.O. 17-3-60

Vacuum Ejector Series ZM

For Single Unit/Without Valve Basic Type with Switch ZM2 H M S Supply Exhaust 111 1/8 (Rc, NPTF, G) Air pressure supply port (P) 3 x 4.5 Mounting hole Vacuum Supply P 30 26 70 62 10 36 V Vacuum Silencer 15.5 Dimensions of model with high noise reduction silencer assembly is the same as standard. 30 20 1/8 (Rc, NPTF, G) Vacuum port (V) Vacuum 103 V 13 80 8 1/8 (Rc, NPTF, G)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

1 103 4 7 10 20 40 70 100 200 Flexing radius [mm] 10.5 Inrush currents at power-on of main circuit and control circuit The following table indicates the inrush currents (reference data) that will flow when the maximum permissible voltage (200V class: 253VAC, 400V class: 528VAC) is applied at the power supply capacity of 2500kVA and the wiring length of 1m (3.28ft).

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

b 1 103 4 7 10 20 40 70 100 200 Bend radius [mm] 10.5 Inrush currents at power-on of main circuit and control circuit The following table indicates the inrush currents (reference data) that will flow when 240 V AC is applied at the power supply capacity of 2500 kVA and the wiring length of 1 m.

EXxx-OMZ0016

(Wch: 120-127) Remote diagnostic information (Wch: 112-119) 19 Remote registration information (Wch: 8-15) Remote registration information (Wch: 1-7)*1 20 Remote registration information (Wch: 24-31) Remote registration information (Wch: 16-23) 25 Remote registration information (Wch: 104-111) Remote registration information (Wch: 96-103) 26 Remote registration information (Wch: 120-127)

SMC Basic Pneumatics

Powet Preflx Svmbol Pourer Preflx Svmbol 10-1 deci d 101 Deka da fi2 Heclo h 1O-2 centi c iO-3 milli m 103 Kilo k 10-6 micro ], tO6 Mega M Table 3.2 Prefixes tor powers of ten This lads us to a kPa (kilo-pascal or 1/100 b ol a BAR) and an MPa (1,OOO,OO0 pascals or 10 BAF). Practice with these prefixes and pay attention to what th symbol represents in terms of powers of ten.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

MXW Series Long Stroke Slide Table

only on B type(with shock absorber). 146 146 146 Long Stroke Slide Table MXW Series Dimensions MXW 12 Stroke: 100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

plug connector Valve model Type of actuation DIN terminal Grommet type A, B Single 61 65 88 2 position Double 79 86 132 SY560--01 Rc(PT) 1/8 Closed center 3 position Exhaust center 85 92 138 Pressure center 2 position Single 85 89 112 Double 101 108 154 C4 SY560--C4 Pressure center ( ) 4 One-touch fitting Closed center 3 position Exhaust center 107 114 160 2 position 80 84 107 Single 96 103

High Vacuum Angle Valve, XL Series

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80