SMC Corporation of America
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www.stevenengineering.com I 7.24 INSTRUMENTATION ELECTRO-PNEUMATIC REGULATOR D I M E N S I O N S S E R I E S VY140 0 102 03 04 D I M E N S I O N S S E R I E S VY150 0 102 03 04 D I M E N S I O N S S E R I E S VY170 0 110 12 D I M E N S I O N S S E R I E S VY190 0 114 20 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 !

1 to 10 l/min 0.1 l/min 0.1 l/pulse 2.5 to 52.5 l/min 2.5 to 52.5 l/min 5 to 50 l/min 0.5 l/min 0.5 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 10 to 210 l/min 10 to 210 l/min 20 to 200 l/min 2 l/min 2 l/pulse 25 to 525 l/min 25 to 525 l/min 50 to 500 l/min 5 l/min 5 l/pulse IF Data Accumulated pulse flow rate exchange value (Pulse width: 50 ms) l/min, CFM x 102

LVQ 39.5 36 49 36 102 LQ Metric sizes Union Flange: LQ1F LVN Applicable tubing O.D. Model N L L E J M H W ( T ) 3 TI/ TIL 12 10 19 12 25 19 LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 60 53 34 28 33.1 12 30 21 PA 65.2 58 SMC (W) (M) N J SMC 58 41 40 14 32 36 26 PAX 63.2 3/4 19 69 51 81.5 49 14 39.5 36 H (E) (T) PB JIS 10K flange Class 4, 5 Inch sizes Applicable tubing O.D.

Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

VX t Vaccuum pressure (Torr) The absolute pressure is expressed. 0 Torr=Absolute pressure 0.760 Torr=Atmospheric pressure (Gauge pressure 0 Kgf/cm2) (1 torr=1.33 X 102 Pa) VNl VQ Electrical Terms q Volt-ampere(VA) Volt-ampere is the product of voltage (V) and current (A). Power dissipation (W): For AC , W=V/A cos.

.@ (9r.514.O2 (102) 4.43 (1125) 4.84 (1Al 5.2 (13s.5) (144) 6.08 054.5)06s) 6.91 (175.5) (186) 7.74 096.5) 8.15 (207) 8-56 \217.5) -M5,B3T crommet(c), (H) : l I i e 't rI ; ; TVpe 542,/ Side Ported L Type Plug Connector (L) M Type Plug Connector (M) NVV3J3-542-a*on--M5.

.@ (9r.514.O2 (102) 4.43 (1125) 4.84 (1Al 5.2 (13s.5) (144) 6.08 054.5)06s) 6.91 (175.5) (186) 7.74 096.5) 8.15 (207) 8-56 \217.5) -M5,B3T crommet(c), (H) : l I i e 't rI ; ; TVpe 542,/ Side Ported L Type Plug Connector (L) M Type Plug Connector (M) NVV3J3-542-a*on--M5.

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

Station n L1 L2 Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 1-5-20 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 C4 N3 Type 32 Manifold: Side Ported/SS5YJ3-32Stations -M5, [ ]: AC (Lead

Input: CLR, TL Output: TLOUT Reconnection of axis Reconnect Reconnect Dimensions 34.5 w 102 4 Function Description No. LCD 1 A screen of liquid crystal display (with backlight) q r Ring 2 A ring for hanging the teaching box When switch is pushed in, the switch locks and stops.

Input: CLR, TL Output: TLOUT Reconnection of axis Reconnect Reconnect Dimensions 34.5 w 102 4 Function Description No. LCD 1 A screen of liquid crystal display (with backlight) q r Ring 2 A ring for hanging the teaching box When switch is pushed in, the switch locks and stops.

Operating Pressure Flow Direction Symbols on Body Average particle concentration Particles/ft3 1.2 104 Max. operating pressure MPa Meter-out type Meter-in type Grade 4 1.0 103 Symbol 0.8 Grade 3 102 0.6 101 Grade 2 JIS Symbol 100 0.4 Grade 1 10-1 0.2 0 -5 0 20 40 60 1 0.1 0.2 0.3 0.5 Operating temperature C Particle size m or less Note) Refer to back page 10 for details. 489 Series AS-FPQ

P I: M5 x 0.8 I: M6 x 1 Model A B C D E F K L Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F K L Y G H G H ZPR40B 40 50 43 34 47.5 58.3 76.1 102 92 24.4 53 38 51.5 62.3 80.1 106 25 15 96 32.4 57 48 19 16 ZPR50B ZPR10B 10 13 12 16 25 33.9 50 71 76 5.5 15 18.5 27.5 36.4 52.5 73.5 20 25 78.5 8.7 19 13.8 7.5 5.5 ZPR13B 16 18 20 29 37.9 54 75 80 9.9 21 8.5 ZPR16B Applicable Tubing Applicable

1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13 Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2.

46 16 112 102 91 81 71 60 Mounting Warning 20 261 245 230 214 198 182 166 150 134 119 25 336 316 296 276 255 235 215 195 174 154 Do not apply the reverse torque to the piston rods sticking out from both sides of this cylinder at the same time.

(A) (A) No-fuse breaker D 40 Circuit breaker 60 A C B Power connection E Power cable outlet (17) 35 Grommet with membrane (mm) Dimensions E D C B A Model 32 IDF4E, 6E, 8E, 11E IDF15E IDU3E, 4E, 6E IDU8E IDU11E IDU15E 97 230 34 15 102 258 82 43 With circuit breaker case 97 15 34 32 230 37 A Dimensions (mm) 42 100 75 Model 69 258 43 84 IDF120D IDF150D IDF190D IDF240D IDF370B 94 IDF22E to

0.8 22.5 8 96.5 11 32.5 2 14 45 9 M5 x 0.8 7.5 128 6.6 32.5 76 M6 x 1 27 12 120 14 38 2 18 54 12 M6 x 1 12 160 8.6 40 90 M6 x 1 27 12 137 14 49 3 16 67 14 M6 x 1 15.5 190 9 42 112 M8 x 1.25 31 16 160 17 60 3 20.5 84 16.5 M8 x 1.25 22 220 11 50 134 Model MY3A16 MY3A20 MY3A25 MY3A32 MY3A40 MY3A50 MY3A63 NE NG NH NW PA PB PC PD 4 PG Q QW T TT UU YW Z P M5 x 0.8 22.5 8 17.2 43 44 26 32.5 4 102

CHARACTERISTICS 101 to 10-7 10.1 Overload protection characteristics . 102 10.2 Power supply capacity and generated loss . 103 10.3 Dynamic brake characteristics . 105 10.3.1 Dynamic brake operation . 105 10.3.2 Permissible load to motor inertia when the dynamic brake is used . 106 10.4 Cable bending life . 107 3 10.5 Inrush currents at power-on of main circuit and control circuit . 107 11

7-26 7.1 . 72 7.1.1 . 72 7.1.2 . 75 7.1.3 . 77 7.1.4 . 78 7.1.5 . 78 7.1.6 . 7-12 7.2 . 7-14 7.2.1 . 7-14 7.2.2 . 7-15 7.2.3 . 7-16 7.2.4 . 7-18 7.3 Tough Drive . 7-21 7.3.1 Tough Drive . 7-21 7.3.2 Tough Drive . 7-23 7.4 SEMI-F47 . 7-26 8 81 8-71 8.1 . 82 8.2 . 87 8.3 . 88 8.4 . 8-50 8.5 . 8-57 8.6 . 8-66 8.7 . 8-71 8 91 95 9.1 . 92 9.2 . 95 10 101107 10.1 . 102

Write Servo Parameter Subcommand (SVPRM_WR: 41H) .8-99 8.16 Preparing for Operation.8-100 8.16.1 Setting MECHATROLINK-III Communications.8-100 8.16.2 Checking the Communications Status.8-100 8.17 Parameter Management and Operation Sequence.8-101 8.17.1 Operation Sequence for Managing Parameters Using a PC or PLC...etc.8-101 8.17.2 Operation Sequence for Managing Parameters Using a DRIVER.8-102