JXCx-OMX0009

0 0 0 0 16 10 0 0 0 1 0 0 0 1 17 11 0 0 0 1 1 1 1 0 30 1E 0 0 0 1 1 1 1 1 31 1F 0 0 1 0 0 0 0 0 32 20 0 0 1 0 0 0 0 1 33 21 0 0 1 1 1 1 1 0 62 3E 0 0 1 1 1 1 1 1 63 3F 0 1 0 0 0 0 0 0 64 40 0 1 0 0 0 0 0 1 65 41 0 1 1 1 1 1 1 0 126 7E 0 1 1 1 1 1 1 1 127 7F 1 0 0 0 0 0 0 0 128 80 1 0 0 0 0 0 0 1 129 81 1 1 1 1 1 1 1 0 254 FE 1 1 1 1 1 1 1 1 255 FF 122 - 23.3 Installation 1 byte data Please

JXCx-OMT0062

0 1 0 0 0 0 16 10 0 0 0 1 0 0 0 1 17 11 0 0 0 1 1 1 1 0 30 1E 0 0 0 1 1 1 1 1 31 1F 0 0 1 0 0 0 0 0 32 20 0 0 1 0 0 0 0 1 33 21 0 0 1 1 1 1 1 0 62 3E 0 0 1 1 1 1 1 1 63 3F 0 1 0 0 0 0 0 0 64 40 0 1 0 0 0 0 0 1 65 41 0 1 1 1 1 1 1 0 126 7E 0 1 1 1 1 1 1 1 127 7F 1 0 0 0 0 0 0 0 128 80 1 0 0 0 0 0 0 1 129 81 1 1 1 1 1 1 1 0 254 FE 1 1 1 1 1 1 1 1 255 FF 110 - 22.3 Installation Remote register

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

2 VSA4140-04 VSA4140-06 VSA4240-04 VSA4240-06 VSA4340-04 VSA4340-06 VSA4440-04 VSA4440-06 1 8 Rc 2 position single SA 1 2 1.31 1 8 Rc 3 4 1 2 1 8 Rc 2 position double 3 position closed center 1 2 1.50 VA 3 4 1 2 3 4 1 2 3 4 1 8 Rc 1 8 Rc 1 2 1.73 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area:

0.55

Conditions Body Ported Body ported Series CJ2 Series CM2 Series MB, CA2 Series CS1 Tubing x Length T0604 x 1 m T0806 x 1 m VF1120-01 Speed controller AS3002F-06 AS3002F-08 AN101-01 Silencer Tubing x Length T0604 x 1 m T1075 x 1 m VF3130-02 Speed controller AS3002F-06 AS4002F-10 AN110-01 Silencer T1075 x 1 m T1209 x 1 m Tubing x Length T0604 x 1 m VF5120-03 AS4002F-10 AS4002F-12 Speed

JXCx-OMT0061CN

) 2 2 3 3 4 READY 4 5 ALARM 5 6 6 7 7 0 0 8 8 9 9 A A () B B C C D D 1 E E 2 F F 0 1 F0 1 71 () F8 2 F0 2 F0 (1 )*2 (2 ) *1 3 F0 3 F0 ()*2 *1 RWw0,bit4F: 12 *2 RWw0,bit4F: 93 - (2)[IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP

CA2

1 !2 !3 !4 !5 !6 !7 !8 !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Metric size Inch size Universal 3 04 06 08 10 12 01 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 03 05 07 09 11 With One-touch fitting M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 AS 01 02 03 04 ASP ASN U10/32 N01 N02 N03 N04 AQ ASV AK ASS Needle Valve/Flow Characteristics ASR ASD230F ASD330F ASD430F 100 200 400 1.5 3 6 ASF Effective area (mm2) Effective

AS

ASD Model Meter-out type Rod and applicable tubing O.D. 4 6 8 10 Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 AS AS-FE KE The lock nut provides identification.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Note) Control Metric size Inch size 1/8" 23 01 Meter-out Meter-in 0 1 3.2 04 06 08 10 12 03 05 07 09 11 13 4 5/32" U10/32 N01 N02 N03 N04 10-32 UNF 6 3/16" With One-touch fitting NPT 1/8 8 1/4" Made to Order Refer to page 605 for details. NPT 1/4 10 5/16" NPT 3/8 12 3/8" NPT 1/2 1/2" Note) For applicable tubing O.D. selection, refer to the Model. Use 1/8" tube.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LQ 2 U 03 Tubing size Tubing O.D. 1/8", 3 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Body class Applicable fitting Symbol 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 19 25 Type of fitting Applicable fitting LQ2 LQ1 Symbol Nil 1 2 Body class Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Applicable fitting 3 LQ2 LQ2 4 LQ1 Type of part Symbol U B N Type of

Power Valve: Economy Valve Series VEX5

Port size port 3(R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

5 Port Solenoid Valve SY Series

Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075

Vacuum Ejector Series ZM

Stations 1 2 3 4 5 6 7 8 9 10 ZZM-CR-01 ZZM-CR-02 ZZM-CR-03 ZZM-CR-04 ZZM-CR-05 ZZM-CR-06 ZZM-CR-07 ZZM-CR-08 ZZM-CR-09 ZZM-CR-10 SP ZCUK AMJ AMV AEP (2) (3) HEP Note Quantity Adapter A Adapter B Silencer Blanking plate No. 1 2 3 4 5 6 7 8 9 10 11 Model ZZM-SA ZZM-BP ZZM-ADAZZM-ADBZZM-GE ZZM-EPLZZM-GBL ZZM-GBB ZZM-GBR ZZM-EPRZZM-CRDescription 2 1 1 Station: 1 1 1 1 Manifold part no.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

Lubricator

Standard Specifications Model AL20-D AL30-D AL40-D AL40-06-D AL50-D AL60-D Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Fluid Air -5 to 60 oC (with no freezing) Ambient and fluid temperature 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure Port size 1/4: 30 L/min(ANR) Port size 3/8: 40 L/min(ANR) Port size 1/2: 50 L/min(ANR) 50 L/min(ANR) 190 L/min(ANR) 220 L/min(ANR) Min.

Series 12-REA Sine rodless cylinder

Model Elbow type Straight type In-line type 12-REA25 10-AS2001F-06-X214 10-AS2201F-01-06-X214 10-AS2301F-01-06-X214 12-REA32 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 6. Do not use the cylinder with its body fixed. Be sure to secure both head covers (or end covers in case of CY1R) before using the cylinder.

Clean Regulator

Model XT13-394-06 XT13-394-10 INA-48-1-06 INA-48-1-10 INA-48-16-10 INA-48-16-06 INA-48-58-10-H INA-48-58-06-H Port size Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Relief mechanism Non-relief Relief Non-relief Fluid Deionized water (Pure water) Air, N2 Proof pressure 1.9 MPa 1.5 MPa Max. operating pressure 1.3 MPa 1.0 MPa Set pressure 0.1 to 1.0 MPa 0.05 to 0.5 MPa 5 to 60C Ambient and fluid

A

06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.