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cenler .1&t*080 PEEA A P B EBPE Main Parts No.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

1.

3

Symbol Rated flow range With/without flow adjustment valve 04 Bracket (Option) 20 40 11 21 $ $ 1 1/4 1 1/2 Nil $ $ $ $ $ $ $ $ None Nil None S Yes Bracket Note 1) 100 and 250 L/min types with flow adjustment Integrated display Output specification/Temperature sensor valves are not available.

Clean Room Rodless Cylinder Series CYP ø15, ø32

50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Hand Valve Series VH 1

(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-11 6 Series VH Dimensions: Body Mounted VH600-06/10 2 (A) 4 (B) 32 1 (P) 132 152 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Hand Valve Series VH

) 1 (P) 3 (R) 1 (P) 88 102 89 4-6.6 4-6.6 88 81 94 148(191) 144(191) 97(145) 97(145) 8 (10) M50 x 1.5 M50 x 1.5 8 (10) M8 x 1.25 M8 x 1.25 125(136) 123(134) 67 1.5 65 1.5 105.5 3 (R) 3 (R) 1 (P) 1 (P) 25 17 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH43-02 to 04 (Bottom ported) VH43-06 (Bottom ported) 2 (A) 2 (A) 54 46 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-14 Hand

Suction Guard (Produced upon receipt of order) FHG Series

Z G Q N Y Y (mm) (mm) Port size Weight (kg) d N P Q Y (mm) Port size Weight (kg) d 25 25 25 28 28 28 28 28 Port size Weight (kg) E 47 47 52 58 58 63 G 9 9 9 9 9 9 9 9 Z 2.8 2.8 2.8 5.3 5.3 5.4 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5 43.9 49.1 61.1 77.1

Hand Valve Series VH

(R) 1 (P) 1 (P) 25 17 2 4-Rc1/4, 3/8, 1/2 4-Rc3/4 VH43l-02 to 04 (Bottom piping) VH43l-06 (Bottom piping) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc3/4 4-Rc1/4, 3/8, 1/2 3.6-13 Hand Valve Series VH Precautions Be sure to read before handling.

Booster Regulator Series VBA1110 to 4200 1

Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

CLA

1 ,l1I~1 f AI U, , L~ f-~, ~' 45' 'C'C' '111 i'-"-l :2< ~ "'" _Ie P. eE, MM R, U, eND"IO NX l P . ~z l . A A, L, no. (min) bontala A, eE, L, MM R, U, eNOHlO NX No. (mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!.

HRX-OM-O021

How to see the manufacturing code P O 001 January 2011 O O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2011 P Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2012 Q 2 P 2013 R 3 Q Fig. 1-3 Position of product label 1.4.2 Earth Label Fig. 1-4 Earth label HRS Series 1.4 Other Labels 1-5 HRX-OM-O021

Tie-rod Type Hydraulic Cylinder

B5/B64/B59W Note 1) BD1-10M CHS BA-08 BA-10 BA-05 BA-04 CH2 Note 1) The auto switches listed below cannot be mounted on 63.

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Changed port position style: refer to the "Made to Order Specifications" on p.5.4-1. CY MY 3.8-9 Series CBM2 With Air Cushion (Refer to p.3.8-8 and 3.8-9 for other dimensions.)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MXP Refer to p.5.4-1 for made to order specifications of series CBA1.

IDX-OM-W028

8 Specification for Option L 8 1 Safety instructions . 8 1 8 2 Specification . 8 1 8 3 Specification of heavy duty auto drain (ADH4000-04). . 8 2 8 4 Maintenance . 8 2 Chapter 9 Specification for Option M 9 1 Safety instructions . 9 1 9 2 Specifications . 9 2 9 3 Cautions for handling the motor type auto drain . 9 2 9 4 Electric circuit . 9 2 Chapter 10 Specification for Option R 10 1 Safety

Modular Type Regulator Series AR

Specifications Applicable models X465 ISE30---L 0.1 to 1 0.001 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Part number suffix Model Set pressure range (MPa) Model AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K)AR60(K) 3/4, 1 1 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 1/8, 1/4 Port sizes Pressure switch Set and display resolution (MPa) Power supply voltage

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

PF-OMN0009_C

* , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12