Multi-channel Digital Sensor Monitor ( compatible)

Conductor size (mm2) Overall diameter (mm) Colour of cover SMC product No. (1 pc.) 0.8 to 1.0 Red ZS-28-C 26-24 0.14-0.2 1.0 to 1.2 Yellow ZS-28-C-1 (28) (0.08) 1.2 to 1.6 Orange ZS-28-C-2 1.0 to 1.2 Green ZS-28-C-3 1.2 to 1.6 Blue ZS-28-C-4 22-20 0.3-0.5 1.6 to 2.0 Gray ZS-28-C-5 Do not cut the insulator.

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

Vacuum Unit

) () () () () () () 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Release valve Supply valve Supply valve 1 1 2 2 stations Release valve 2 stations Release valve 14 Supply valve 2 Supply valve 3 4 3 stations 15 Release valve 3 stations Release valve 3 5 6 Supply valve Supply valve 16 4 stations Release valve 4 stations Release valve 4 7 8 Supply valve 17 Supply valve 5 5

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Note 2) [ ] denotes normal position. Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 3) ( ): Without sub-plate Note 4) For DC voltages.

CATALOG VC10

Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8 O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 SS BR AL 1/8 NPT 7 4 2 1/8 NPT 8 5 2 1/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 4 3 8 VSA430 Individual EXH 1 2 VSA430 3 4 3 4 Common EXH , 1 2 3 4 How to Order 1 2 standard , 1 2 3 4 , 3 8 1 2 3 8 VSA440 3 4 Individual EXH 1 2 SA VV 4 2 0 N 1 05 Piping specifications/Side ported, bottom ported Manifold Air operated valve Series VSA 4 port valve Thread type Body size Nil Rc EXH port Symbol Size N Piping NPT NPTF PF Individual 1 Symbol Common Type 2 3 1 4 3 8 1 2

SFOD-OMT0010

Cross recessed round head screw M5x14 2 pcs. 81 No.SFOD-OMT0010-B 10.3 Actuator cable (5m or less) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number A B-1 Brown 2 Cable length [L] A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 Green 3 COM-A/COM B-3 3 3m Blue 4 COM-B/ A-3 5 5m (c) Cable colour Terminal Shield number Vcc B-4 Brown 12 Cable type Black 13 GND A-4 Red

IDG

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (

Series VQ Base Mounted Metal Seal/Rubber Seal

0 1 3 4 5 2 6 7 8 9 1 2 3 6 7 0 4 5 Sl unit output No. Sl unit output No.

Electric Grippers

2 !4 q u w e r t !7 Component Parts No.

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

SFOD-OMT0009CN

B6 5 A6 B1 A1 2 1 B3 A3 (d) (5.7) 15 16 L (11) (30.7) (c) 10.6 [820m] (a) (b) LE CP *B 2 A B-1 1 A A-1 L 6 B B-2 5 ) 8 8m B A-2 3 COM-A/COM B-3 ) 4 A 10m COM-B/A-3 (c) ) B 15m Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 ) 7 A A-5 6 () B B-6 9 B A-6 8 3 (d) + B-1 4 A-1 5 + B-3 1 A-3 2 2 1 (5.5) (14) (a) (6.3) B1 A1 (17.7) 5 6 (14.2) (b) A6 B6 (c) (10.2) 2 1 B1 A1 (18)

Cylinder with Lock

8, 12, 16)*2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 50 55 60 65 70 D-M9mV D-M9mWV n 50 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 2

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

Refrigerated Thermo-chiller

-L 3 5 HRZ002-H 4 HRZ004-L HRZ001-H 2 3 HRZ002-L 2 1 HRZ001-L 1 0 0 20 30 40 50 60 70 80 90 20 10 0 10 20 30 40 Circulating fluid temperature (C) Circulating fluid temperature (C) HRZ002-W/008-W 4 HRZ008-W Heating capacity (kW) 3 HRZ002-W 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) 81 Series HRZ Pump Capacity (Thermo-chiller Outlet) HRZ001-L/002-L/004-L HRZ008

Rotary Actuator/Vane Type

Y2 E L 0.5 0.004 0.016 4g7 2 x 3.5 through 2 x Q4 K 9 16.5 10.6 14 31 19.5 P B D G C 17 1 3 U 7 H N T M 9.5 2 x M3 x 0.5 2 x R 3 Shaft-end shape of size 40 1.5 2 0 0.030 4 K Parallel key dimensions h L1 b b (h9) h (h9) L1 4 0 0.030 4 0 0.030 20 Refer to page 77 for details of shaft type J.

CQS

2, !3, !4.

Cylinder with Lock

n 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 20 + 45 (n 2) 2 95 + 45 (n 4) 2 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 (Different surfaces, Same surface), 1 85 15 95 100 D-P3DW 15 + 50 (n 2) 2 85 + 50 (n 4) 2 95 + 50 (n 4) 2 (n = 4, 8, 12, 16) 100 + 50 (n 4) 2 (n = 4, 8, 12, 16) n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) 2

Thermo-chiller/Rack Mount Type

2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.