Air Cylinder

(n 2) Same surface (n = 2, 3, 4) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) 1 10 80 90 75 Different surfaces 20 100 75 80 90 100 100 100 Same surface D-A3<C D-G39C D-K39C 20 + 35 (n 2) 75 + 35 (n 2) 80 + 35 (n 2) 90 + 35 (n 2) Different surfaces (n = 2, 3, 4) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) O 100 + 100 (n 2) 100 + 100 (n 2) Same surface (n = 2, 3, 4, 5

Series AP500

) Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld 3.

Rotary Actuator/Vane Type

D2 = CB = C X = [mm] Size CRB2, CRBU2 Y L2 max D2 10 2 to 8 Y-1 3 [mm] Size CRB2 CRBU2 X L1 max D1 X L1 max D1 10 4 to 14 X-3 3 2 to 14 X-1 3 15 5 to 18 X-4 3 to 4 3 to 18 X-1.5 3 to 4 20 6 to 20 X-4.5 3 to 5 3 to 20 X-1.5 3 to 5 30 6 to 22 X-5 3 to 6 3 to 22 X-2 3 to 6 15 3 to 9 Y-1.5 3 to 4 20 3 to 10 Y-1.5 3 to 5 30 3 to 13 Y-2 3 to 6 40 6 to 15 Y-4.5 3 to 8 86 Simple Specials CRB2 Series

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Operating pressure (MPa) Flow Characteristics/Weight Flow characteristics Pilot port size Weight (kg) b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size Valve model 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 2 position single 2 position double 3 position closed center 3 position

SFOD-OMT0010

Black 8 B A-6 (Only "Robotic type cable" is 3 Signal name Terminal (d) number available) Lock (+) B-1 Red 4 Lock (-) A-1 Black 5 Sensor (+) B-3 Brown 1 Sensor (-) A-3 Blue 2 Actuator side Controller side 2 1 (5.5) (14) (a) (6.3) A1 B 5 6 (b) (17.7) (14.2) 1 A6 B6 (c) (10.2) 2 1 B1 A1 B3 A3 (18) (5.7) 15 16 (d) L (11) (30.7) 83 No.SFOD-OMT0010-B 10.7 ParallelI/O cable J X C C 2 Cable length

Auto Switch Guide

PC Connector model M83 pin M84 pin M124 pin 1 2 1 4 Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

Series VQ Base Mounted Metal Seal/Rubber Seal

0 1 3 4 5 2 6 7 8 9 1 2 3 6 7 0 4 5 Sl unit output No. Sl unit output No.

Parallel Style Air Gripper Series MHZ

1/4 1 1/4 to 1 1/2 1 3/4 to 2 2 to 2 1/4 MHS MHC MHT MHY Impact load Clearance MHW -X 3.

Electric Grippers

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Table of Contents

For replacement parts, refer to page 2-4-103. 2-4-9 10 Series VQ1000 Body Ported Plug-in Unit: Flip Type Model Response time (2)(ms) Flow characteristics Weight (g) Number of solenoids Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Series Standard: 1 W Low wattage: 0.5 W H: 1.5 W AC C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VQ1130 Metal seal 0.77 0.14 0.18 0.84 0.14 0.19 12 or less 15 or less

A_HEC-OM-K001

M O D E N o r m a l Function P V < 2 3 . 0 C # 2 S V 2 3 . 0 C M O D E N o r m a l [Tips] No key-in operation for 1 min.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

332 332 344 356 69 81 93 77 89 101 83 95 107 VVX21 VVX22 VVX23 Manifold composition 2 stns. x 1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 (mm) V DIN terminal Electrical entry A B C D E F H J N R Grommet T Conduit W Conduit terminal Model Q 49 62 66.5 S 41.5 54 59 U 58 62 64.5 X 63 66 68 Y 94.5 97.5

SFOD-OMT0009CN

B6 5 A6 B1 A1 2 1 B3 A3 (d) (5.7) 15 16 L (11) (30.7) (c) 10.6 [820m] (a) (b) LE CP *B 2 A B-1 1 A A-1 L 6 B B-2 5 ) 8 8m B A-2 3 COM-A/COM B-3 ) 4 A 10m COM-B/A-3 (c) ) B 15m Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 ) 7 A A-5 6 () B B-6 9 B A-6 8 3 (d) + B-1 4 A-1 5 + B-3 1 A-3 2 2 1 (5.5) (14) (a) (6.3) B1 A1 (17.7) 5 6 (14.2) (b) A6 B6 (c) (10.2) 2 1 B1 A1 (18)

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

Pilot Operated

3 o !1 !2 i e t !0 A !3 !2 !1 o i t !0 !3 !2 !1 o i e t !0 A A e u w y q B C P2 P1 OUT IN P1 w y u B q w y u B q P2 OUT C C IN VXD2272/2382/2392 (32A to 50A) VXD2270/2380/2390 (32A to 50A) !4 !5 !3 !1 i t e !2 !0 A r u B y q !3 !2 !1 i t e o !0 A r u B y q w o w C C Operation When the coil !

Thermo-chiller/Rack Mount Type

2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Vacuum Unit

Fig.1 Fig.2 Fig. 3 Protrusion of junction box B Fig. 2 Clip in. Fig. 3-A When ordering ejector for vacuum pump system, spacer is included.

LJ1H

B A C D 3 4 Standard Motor Series LJ1H10 Motor Output Rolled Ball Screw High Rigidity Direct Acting Guide 50W 12mm/12mm lead Horizontal Mount How to Order Stroke LJ1H101 NB 1 F 2 Cable entry direction Top entry Power supply voltage 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Cable entry direction Cable length Left entry 1 2 F R L T B Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry