ZR

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

They can be ordered in lots of 10 pieces. d D Series SY3000 SY5000 SY7000 Part No.

VZS

79 With light/surge voltage suppressor Pg7 103 95.4 PE P EB EA n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 16 341 350 17 361 370 18 381 390 19 401 410 20 421 430 21 441 450 22 461 470 23 481 490 24 501 510 L1 L2 3-7-34 35 5 Port Pilot Operated

VZ100/300/500

Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.

PSE530

Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Sensor range Option None 0 1 2 3 Positive pressure [0 to 1 MPa] Vacuum [0 to 101 kPa] Low pressure [0 to 101 kPa] Compound pressure [101 to 101 kPa] Nil Port size Sensor cable (3 m) M5 R06 R07 M5 x 0.8 6 reducer 1/4 inch reducer L ZSE ISE Option ZSP Connector for pressure sensor controller (1 pc.) + Sensor cable (3 m) Description Part

Compact Vacuum Ejector Series ZA

Approx. 3000 P 6.4 10 9 5 Suction filter 2 x 2.7 V V 10 23 9.9 Supply adapter (Mounting hole) ZA1 1 K1 FP B Note) When the body is mounted, tighten with a torque of 0.6 0.06 Nm.

Multi-channel Digital Sensor Monitor

Refer to the table for each pressure specification (page 80) Display/set pressure range Display/min. setting unit Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max. Electric spec.

Series VCS

) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 3 VCS3 14.4 (0.8) 0.5 (72) 5 1.0 (10) 24.8 (1.38) 0.2 (29) 7 145 (1450) 37.8 (2.10) 0.1 (14) 10 6.3 (0.35) 1.0 (145) 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 10.8 (0.60) 1/4: 0.58 (1.28) 3/8: 0.55 (1.21) 1/2: 0.62 (1.37) 3/4: 0.78 (1.72) 1.0 (145) 4 15.3 (0.85) 0.7 (101) 5 1.0 (10) 4 VCS4 24.8 (1.38) 0.3 (

5 Port Solenoid Valve Series SV

to 101) Internal pilot operating pressure range MPa (psi) 4 position dual 3 port valve 2 position double 0.1 to 0.7 (14 to 101) 3 position 0.2 to 0.7 (29 to 101) Operating pressure range 100kPa to 0.7 (14.5 to 101) External pilot operating pressure range MPa (psi) 2 position single, double 0.25 to 0.7 (36 to 101) 3 position 10 to 50 (with no freezing) (14 to 122) Ambient and fluid temperature

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 3 VCS3 14.4 (0.8) 0.5 (72) 5 1.0 (10) 24.8 (1.38) 0.2 (29) 7 145 (1450) 37.8 (2.10) 0.1 (14) 10 6.3 (0.35) 1.0 (145) 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 10.8 (0.60) 1/4: 0.58 (1.28) 3/8: 0.55 (1.21) 1/2: 0.62 (1.37) 3/4: 0.78 (1.72) 1.0 (145) 4 15.3 (0.85) 0.7 (101) 5 1.0 (10) 4 VCS4 24.8 (1.38) 0.3 (

PSE200

Pressure sensor/Sensor range Sensor supply pressure (Compound pressure) (Vacuum) (Low pressure) (High pressure) 101 to 101kPa PSE533 10 to 101kPa 10 to 101kPa 0.1 to 1MPa Regulating pressure range PSE531 PSE532 PSE530 Applicable pressure sensor SET If the controller is equipped with a unit switching function, unit setting can be changed.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Pressure sensor/Sensor range Sensor supply pressure (Compound pressure) (Vacuum) (Low pressure) (High pressure) 101 to 101kPa PSE533 10 to 101kPa 10 to 101kPa 0.1 to 1MPa Regulating pressure range PSE531 PSE532 PSE530 Applicable pressure sensor SET If the controller is equipped with a unit switching function, unit setting can be changed.

Manifold Specifications

Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 L1 L2 3-7-33 Series VZS3000 Manifold Non plug-in type VV5ZS3-51Station 1Port size Grommet (G) 2-4.5 mounting hole 2n-Rc 1/8, 1/4 Manual override U side (n) (2) (1) Stations D side 300 (Lead wire length) 2-C6, C8 A

Base Mounted Wiring: 01CD1 (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 8 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 01 (1/8), Thread: N (NPT)

Base Mounted Wiring: 01FU1 (Plug-in w/D-sub Connector, U Side Mtg), Stations: 3 Stations, Passage: 2 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Bottom], Port Size: 01 (1/8), Thread: N (NPT)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block, Individual Junction Cover), Stations: 5 Stations, Passage: 2 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Bottom], Port Size: 01 (1/8), Thread: N (NPT)

Base Mounted Wiring: 01T1 (Plug-in w/Terminal Block, One-piece Junction Cover), Stations: 3 Stations, Passage: 3 [P(SUP): Common, E(EXH): Individual, Port A,B(CYL): Side], Port Size: 01 (1/8), Thread: N (NPT)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block, Individual Junction Cover), Stations: 4 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 01 (1/8), Thread: N (NPT)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block, Individual Junction Cover), Stations: 6 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 01 (1/8), Thread: N (NPT)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block, Individual Junction Cover), Stations: 7 Stations, Passage: 3 [P(SUP): Common, E(EXH): Individual, Port A,B(CYL): Side], Port Size: 01 (1/8), Thread: N (NPT)