Air Cylinder

20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 (Reference) JW Bore size e f h IJ JH Bore size TB TDe8 TR TZ Z ZZ (Reference) l Z ZZ 20 11 8 0.025 0.047 39 47.6 93 (101) 106 (114) 25 11 10 0.025 0.047 43 53 98 (106) 111 (119) 32 10 (11) 12 0.032 0.059 54.5 67.7 101 (108) 113 (121) 40 10 (12) 14 0.032 0.059 65.5 78.7 118 (125) 130 (139) 50 12 (13) 16 0.032 0.059

Series SV

pins) Common Common Common Common 20 26 19 25 SOL.

A

20 14 72 M10x1.5 7 18 5 80 300 37 40 101 50 25 20 89 M10x1.5 11 22 5 100 300 37 40 101 60 30 20 110 M12x1.75 11 26 7 *Trunnion mounting threads in flats NA are not available for 80, 100 bores.

Made to Order

50 stroke or less 34 (46) 37.5 (47.5) 40 (50) 46.5 (56.5) 48.5 (58.5) 54 (64) 63.5 (73.5) 75 (85) 28 35 35 43 59 20 25 32 40 50 63 80 100 CQ2W series A L Bore size (mm) 75, 100 stroke 84 86.5 88 101 114.5 50 stroke or less 74 (84) 76.5 (86.5) 78 (88) 91 (101) 104.5 (114.5) 17 18 18 20 22 40 50 63 80 100 5 5 L + Stroke L A + 2 (Stroke) RQ series (mm) Bore size (mm) A L F T 20 25 32 40 50

CV/MVGQ

81 ZZ 229 239 247 280 292 Z 101 111 115 138 144 Z 93 103 107 129 135 ZZ 221 231 239 271 283 15 0.032 0.059 15 0.032 0.059 18 0.032 0.059 25 0.040 0.073 25 0.040 0.073 38 20 20 20 24 24 45 50 57 69.5 79.5 23 23 28 35 43 85 95 110 140 162 77.5 87.5 102 124.5 144.5 115 125 146 190 212 8 0 0 0 0 18 18 18 20 20 43.5 49 63 73 The minimum stroke of the one with rod boot is 20 mm or more. 10-15

CV/MVGQ

247 280 292 Z 101 111 115 138 144 Z 93 103 107 129 135 ZZ 221 231 239 271 283 40 50 63 80 100 15 0.032 0.059 15 0.032 0.059 18 0.032 0.059 25 0.040 0.073 25 0.040 0.073 38 20 20 20 24 24 45 50 57 69.5 79.5 23 23 28 35 43 85 95 110 140 162 77.5 87.5 102 124.5 144.5 115 125 146 190 212 8 0 0 0 0 18 18 18 20 20 43.5 49 63 73 The minimum stroke of the one with rod boot is 20 mm or more. 10-15

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25 30 35 40 45 50 75 50 40 30 100 8 9 10 11 12 13 12 80 Allowable lateral load at end (N) 16 18 20 22 24 26 16 20 63 28 31 34 37 40 44 47 50 53 56 20 10 50 44 48 53 57 62 66 71 75 80 84 25 40 32 25 78 86 227 93 101 109 117 125 133 140 148 187 32 5.0 4.0 3.0 109 117 258 125 133 140 148 156 164 172 180 219 40 20 16 407 187 199 211 223 236 248 260 272 285 346 50 2.0 474 254 266 278

Integrated Controller

[mm] Double Clevis Size Stroke range [mm] A CL CB CD CT CU CW CX CZ L RR 16 30 to 100 128.4 119.4 20 8 5 12 18 8 16 10.5 9 25 30 to 100 166.2 156.2 10 5 14 20 18 36 14.5 10 101 to 200 191.2 181.2 32 30 to 100 185.6 175.6 10 6 14 22 18 36 18.5 10 101 to 200 215.6 205.6 Material: Cast iron (Coating) The A and CL measurements are when the unit is in the original position.

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

CQ2

W/o auto switch B L L1 With auto switch Bore (mm) 5st 10 A 20 20 20 20 5st 10 5st 10 5st 10 32 48 58 12 33.5 58 68 17 38.5 40 64.5 12 33.5 64.5 74.5 17 38.5 45.5 50 67.5 77.5 18 43.5 87.5 97.5 28 53.5 Rod end male thread Double clevis (mm) A Without auto switch B CL A B CL With auto switch Bore (mm) Double clevis/CQ2D, CDQ2D 5st 10 20 20 20 20 20 20 5st 10 5st 10 5st

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

) direction 0.3 75 50 45 40 0.7 35 30 0.5 25 20 15 10 100 12 59 60 42 54 47 25 41 35 29 IN 12 16 79 84 57 76 67 34 59 50 42 OUT 20 178 165 152 106 140 127 75 114 101 45 88 75 63 IN 16 25 216 202 187 141 173 158 101 144 129 60 115 100 86 OUT 32 471 318 297 277 165 256 235 118 214 193 71 173 152 131 IN 576 20 40 597 413 390 367 220 344 321 157 298 275 94 252 229 206 OUT 717 50 951 659

Cylinder with Lock

Bore size E1 L1 MM R1 U1 NDH10 NX NZ Y-03M*1 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-04M*1 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-05M*1 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 + 0.10 40 0.10 0.30 Y-08M*1 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 + 0.10 60 0.10 0.30 Y-10M*1 100 40 65 M26 x 1.5 20 34 22 +0.084 0

SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

CA2

to 500 30 27 22 44 16 32 10 12 42 100 15 8 M8 x 1.25 71 60 80 60 9.0 50 up to 600 20 to 600 35 32 27 52 20 40 10 12 50 110 17 11 M8 x 1.25 81 70 90 70 9.0 63 up to 600 20 to 600 35 32 27 64 20 40 10 15 59 130 17 11 M10 x 1.25 101 86 105 85 11.5 80 up to 750 20 to 750 40 37 32 78 25 52 14 18 76 160 21 13 M12 x 1.75 119 102 130 102 13.5 100 up to 750 20 to 750 40 37 41 92 30 52 14 18 92 180

70pvpump

kPa 100 to 100 kPa 10 to 101.3 kPa 0.1 to 1 MPa 0 to 100 kPa 0 to 1 MPa 0 to 101 kPa 0.1 to 0.45 MPa 0.1 to 0.4 MPa 20 to 101 kPa 101 to 101 kPa 0.1 to 1 MPa 0.4 to 10 MPa 0.5 to 15 MPa 100 to 100 kPa 0.1 to 1 MPa 0 to 1 MPa Voltage 12 to 24 VDC (Ripple 10% or less) 3% F.S. or less (5 to 40C) 3% F.S. or less (0 to 60C) 3% F.S. or less (0 to 60C) 3% F.S. or less (0 to 60C) 0.01 mm or less

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Table of Contents

For details, refer to pages 3-7-19 and 3-7-20.

Cylinder with Lock

238 20 16 72 M10 x 1.5 22 22 7.5 4 11.5 11.5 6 6 46 410 100 Up to 1000 5 M20 x 1.5 32 20 261.5 20 18 89 M10 x 1.5 22 26 9.5 4 17 17 10 3 51 443.5 With Rod Boot [mm] Bore size d e f h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 75 88 100 113 138 163 188 213 238 263 288 313 40 Lock unit side

MNB

20 25 30 F 13 13 14 14 20 20 Fd 25 31 38.5 39.5 45.5 54 FD 7 9 9 9 12 14 FE 3 3 2 2 4 4 FT 10 10 12 12 16 16 FX 72 83 100 115 126 150 FY 38 46 52 62 63 75 FZ 87 101 120 135 153 178 B 56 65 77 92 100 120 B 54 63 75 90 102 116 Bore size (mm) Stroke range (mm) 32 40 50 63 80 100 10 14 18 18 22 26 19.5 27 32 32 37 37 Up to 500 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 97 104 120.5 134.5