Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 04, Type: 1 (Common Exhaust)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 02, Type: 1 (Common Exhaust)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 05, Type: 1 (Common Exhaust)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 12, Type: 1 (Common Exhaust)

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 06, Type: 1 (Common Exhaust)

Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 04, Type: Common Exhaust, Thread: -

Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 02, Type: Common Exhaust, Thread: -

Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 05, Type: Common Exhaust, Thread: -

LEY-OM007

DRIVE /P.30 1 /code1-051 No. 3 RESET 15ms30ms /P.30 1 No. 4 No. PLC No. 15ms 1 IN* 30ms DRIVE /P.30 1 / No. OUT 2 15ms30msmsec /P.30 1 No. OUT 3 No. PLC /P.30 1 No. OUT -52- No.

ZP

(25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections Model Applicable pad form Connection/Thread dia.

AC Servo Motor Driver (CC-Link Type ）

OFF: Lock is activated. 4 30 4.

AC Servo Motor Driver (CC-Link Type ）

Always use the power supply designed exclusively for the lock. 4 30 4.

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

44

38 63 51 67 4 2.5 1.8 1.6 d 8 5 KQB2 Applicable tubing 4 3 2.3 2.6 H1 H2 KS KX 6 4 3.3 6 10 5.8 M A L KM 14 8 6 14 6.6 5.3 17 Connection thread 17 KF 17 25 10 7.5 6.8 30 M 22 27.1 17 7.6 17 25 H/DL L/LL 10 8 7.3 35 22 27.1 KC 17 26.6 12 9 8 45 22 28.7 17 8.5 KK 17 26.6 12 10 9 57 KK130 22 28.7 28 29.9 16 13 22 9.3 12 101 22 DM Reference dimensions after installation of R thread KDM Male

Multi Channel Pressure Sensor Controller

PSE20 Pressure range 1 For positive pressure For vacuum For low pressure For compound Rated pressure range 0 to 1 MPa 0 to -101 kPa 0 to 101 kPa -101 to 101 kPa Set pressure range -0.1 to 1 MPa 10 to -101 kPa -10 to 101 kPa -101 to 101 kPa Setting/Display resolution 0.1 kPa 0.1 kPa 0.1 kPa 0.001 MPa Power supply voltage 12 to 24 VDC, ripple (pp) 10% or less (Protected against inverse connection

Series VCL

54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5

Sensor Monitor

Switching function of [F 0] Pressure range, display unit and switch output specifications Page 30 Item Default setting Connected sensor range -101 kPa Display units kPa Switch output specifications NPN/PNP : Depends on part number.

Programless Controller Series LECP1

cable] LEC CK4 Cable length (L)[m] 1 3 5 1.5 3 5 Controller side PLC side (16) (10) (11) (30) (60) (L) Conductor size: AWG26 Dot mark Insulation color Function Terminal no.

Vacuum Unit Ejector / Vacuum Pump System

Construction/Replacement Parts 30 6.1. Construction for Single Unit 30 6.2. Component Parts 30 6.3. Replacement Parts 31 6.4. Replacement Parts for Single Unit/How to Order 31 7. Exploded View of Manifold/Replacement Parts 35 7.1. Exploded View of Manifold 35 7.2. How to Increase Manifold Stations 35 7.3. Component Parts 38 7.4. Replacement Parts 38 7.5.

1

x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x 102 9.8067 x 102 9.8067 x 10 1 1.4217 x 10 1.0133 x 105 1.0133 x 102 1.0332 x 104 7.6000 x 102 1.0133 x 101 1.0133 1.0332 1.4706 x 10 1 9.8067 x 103 9.8067 x 105 1 x 104 9.6784 x 105 7.3556 x 102 1.4220 x 103 9.8067 x 106 9.8067 1 1.3332 x 102 1.3332 x 101 1.3332 x 103