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04 Individual EXH spacer VVQ5000-R-103 04 EXH block plate VVQ5000-16A-2 (1 pc.

M18 x 1.5 31 3/8 80 102 13 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 10 22 M22 x 1.5 37 1/2 100 up to 750 20 to 750 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 M26 x 1.5 40 1/2 Without rod boot With rod boot Bore size (mm) S TDe8 TT TX TY TZ H Z ZZ e f h Z ZZ l 0.032 0.059 15 84 22 85 62 117 51 93 140 43 11.2 59 1/4 stroke 101 148 40 0.032 0.059 15 50 90 22 95 74 127 58 103

Dimensions L6 Universal type D4 H D1 Applicable tubing O.D. d (Hexagon width across flats) (Hexagon width across flats) M1 L3 A L5 L4 D3 L1 L2 D2 T Metric Size Inch Size A A D1 d T H D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 Model Model AS131F-M5-23T AS131F-U10/32-01T 1/8" 8.4 3.2 8.4 19.8 19.8 12.7 17.5 28.7 17.5 28.7 12.7 AS131F-M5-04T AS131F-U10/32-03T 5/32"

Stainless steel 603 Series AS1F-T Construction L5 D3 Elbow type H Applicable tubing O.D. d (Hexagon width across flats) L4 L3 A D1 M1 L1 L2 D2 T Metric Size Inch Size A d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 Model Weight (g) Model Weight (g) d T H D1 D2 D3 L1 L2 L3 L4 L5 M1 AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 3.2 8.4 12.7 17.3 22.1 12.7 12.3 12.3 AS121F-M5-04T AS121F-U10/32-03T

Display digits Upper digits Middle digits Lower digits Display unit Maximum flow display value L display [ U_1] 9 L 9 m3 x 103 999 m3 999 L (9 L) (999 L) ft display [ U_2] 9.9 ft3 999 ft3 x 106 999 ft3 x 103 999.9 ft3 (999. ft3) (999. ft3) : Operate only the product with unit selection function. button press.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 99 99 100 100 103 104 105 111 111 113 114 114 115 115 118 120 128 How to Order . Specifications. Caution . Construction. Dimensions . Series MHK2 Wedge Cam Operation Slide Guide Air Gripper. Series Variations.

8 30 85 13 16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103

116 128 141 166 191 216 241 266 291 316 341 100 56 76 32 12.5 25 37.5 50 75 100 125 150 175 200 225 250 103 116 128 141 166 191 216 241 266 291 316 341 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900

AXT661-14A-103 pcs. Example) Lead wire length 1000 mm VQ1160N-5LO-C63 pcs. AXT661-14AN-103 pcs. Connector Assembly Part No. (For DC) Connector Assembly Part No. Double solenoid part no. Socket only (3 pcs.) 300 mm 600 mm 1000 mm 2000 mm 3000 mm Note 1) Lead wire length Single/3 position part no.

Dimensions 10.5 10.5 103 16.7 28.3 RS45 4.1 OUT 49 5.1 (3.6) 50.5 4.5 5 5 Refer to page 50 in CAT.E02-20 for the junction cable part number.

Cool from 30C (303 K) to 20C (293 K). : Clear water Density : 1 x 103 kg/m3 Specific heat C: 4.2 x 103 J/(kgK) Water bath Refer to the information shown below for the typical physical property values by circulating fluid.

Allowable load F (N) = M (Static allowable moment) (Nm) L x 103 Allowable load F = 0.68 30 x 103 ( Constant for unit conversion) = 22.7 (N) Load f = 10 (N) < 22.7 (N) Specific Product Precautions 30 Electric Gripper 2-Finger Type Step Motor (Servo/24 VDC) LEHF10, 20, 32, 40 Series LEHF RoHS How to Order 10 2 K 16 LEHF 1 6N 1 S q w e r t y u i o !

. . . . . . . . . . . . . . . . 101 SERIES 70 COIL CHART . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102 AVAILABLE OPTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .103

103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit

103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit

103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit

103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit

The range in the chart below that is delineated by bold solid lines indicates the relation between load weights and maximum driving speeds. 6 8 10 4 Bore size (mm) 0.05 to 0.5 Piston speed (m/s) 3.8 x 103 6.25 x 103 9.35 x 103 12.5 x 103 Allowable kinetic energy (J) 10 6 8 10 Load weight (kg) 1 4 0.1 0.01 0.1 1.0 0.01 Maximum speed V (m/s) 7-2-14 14 Series CUJ Specific Product Precautions

To rotate the servo motor at 3000r/min in the open collector system (200kpulse/s), set the electronic gear as follows. f CMX CDV = N0 60 10 f : Input pulse frequency [pulse/s] N0 : Servo motor speed [r/min] 200 103 CMX CDV = 3000 60 10 CMX CDV = 3000 60 10 200 103 = 3000 10 60 20 = 15 6 4 11 4.