MLGP

141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5 29.5 174 196 199 36 46 41 136 153 156 15 21 16 174 196 199 32 42 37 132 149 152 52 62 57 152 169 172 9-11-26 26 Compact

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C4,C6) VF (47.5) VFR VP7 25.5 (M5) 26.5 5.4 18.5 VP4 5 23.2 Mounting holes 10 VQ (47.5) 9.9 3-M5 X 0.8 P, R port 9.9 VQ4 5 3 1 VQZ 2-PE port 22.2 Die cast hole For manifold gasket positioning VQD VZS VFS 3 4 5 3 4 5 L plug connector (L): VQZ1 2 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ1 2 wMwC3, C4, C6, M5 0 1 VS (Lead wire length) Cover diameter 1.5 Cross section 0.23mm2 VS7 129 <131

IIIIIII

-N01-02 NVMl21-N01-01 131-N01-01 f,-rgl1gtlr ?.

Thermo-con

Precautions Page 142 to 144 Series HEC-W Water-cooled How to Order/Specifications Page 146, 147 Cooling Capacity/Heating Capacity/ Pump Capacity (Thermo-con Outlet)/ Pressure Loss in Facility Water Circuit Page 148 to 150 Parts Description Page 151 Dimensions Page 152 to 154 Connectors Page 155 Alarm/Maintenance Page 156 Options Page 157 Specific Product Precautions Page 158, 159 131

Electric Slide Tables

Motor cable 20 20 24 24 20 Lock cable 20 15 15 Dimensions (mm) Model L C D E F G H 144.5 J 46 LES25L-30133.5 105 2 46 4 48 LES25L-502 84 84 42 159.5 131 170.5 6 LES25L-75165 2 112 112 204.5 6 55 193.5 LES25L-10056 112 8 50 266.5 238 4 277.5 LES25L-125263 4 59 118 302.5 8 55 291.5 LES25L-15062 124 62 316.5 288 4 327.5 8 20 Series LES Dimensions: In-line Motor Type/D Type LES8D 3H9 (+0.025

Digital Pressure Switch ( compatible)

(Refer to page 41 for details.) -40No.PS-OMX0002-A Auto-preset When auto-preset is selected in function selection mode, the set value can be calculated and memorized from the measured pressure.

Digital Gap Checker ( compatible)

Min. cycle time 4.2 ms Process data length Input Data: 8 byte, Output Data: 0 byte On request data communication Available Data storage function Available Event function Available Vendor ID 131 (0x0083) ISA3-FL-: 341 (0x0155) ISA3-GL-: 342 (0x0156) ISA3-HL-: 343 (0x0157) Device ID 1: Refer to the relationship between the display value and distance on page 20 for details. 2: For ISA3-F type

End Lock Cylinder Series CBG1

32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200 63 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 to 1400 80 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 to 1500 100 40 37 41

Mechanical Valves Series NVM, NVFM, NVZNI

-N01-02 NVMl21-N01-01 131-N01-01 f,-rgl1gtlr ?.

Fieldbus System

Dimensions n: Stations (Maximum 16 stations) (mm) 1 L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 234 L1 L2 131 156 181 206 231 256 281 306 331 356 381 406 431 456 481 506 209 259 284 309 334 359 384 409 434 459 484 509 534 559 584 48 Series EX600 Specific Product Precautions 1 Be sure to read this before handling.

MLGP

141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5 29.5 174 196 199 36 46 41 136 153 156 15 21 16 174 196 199 32 42 37 132 149 152 52 62 57 152 169 172 9-11-26 26 Compact

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

DO 41 30 12 18 S 204 4 5 M5 x 0.8 (Finger operating port) 20 9 6.45 6 MHW2-20D1 Right angle finger type 31 15 10 11 14 5 28 16 41 4-M4 x 0.7 (Thread for mounting attachment) 12-10-19 19 Series MHW2 Dimensions MHW2-25D Flat finger type (Standard) 24 2-M6 x 1 thread depth 10 (Mounting hole) 20 4-M6 x 1 thread depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 69 51 40 27

MHZ

Weight (g) Model End boss type (Symbol) M K E W MHZ2-10 65 66 65 64 MHZ2-16 147 148 148 147 MHZ2-20 277 277 277 277 MHZ2-25 494 496 495 495 12-2-41 41 Parallel Style Air Gripper With Dust Cover Series MHZJ2 Size: 6, 10, 16, 20, 25 How to Order MHZJ2 16 F9BW D Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Bore size Auto switch Action 6 10 16 20 25 6 mm 10 mm 16 mm

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

DO 41 30 12 18 S 204 4 5 M5 x 0.8 (Finger operating port) 20 9 6.45 6 MHW2-20D1 Right angle finger type 31 15 10 11 14 5 28 16 41 4-M4 x 0.7 (Thread for mounting attachment) 12-10-19 19 Series MHW2 Dimensions MHW2-25D Flat finger type (Standard) 24 2-M6 x 1 thread depth 10 (Mounting hole) 20 4-M6 x 1 thread depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 69 51 40 27

MHZ

Weight (g) Model End boss type (Symbol) M K E W MHZ2-10 65 66 65 64 MHZ2-16 147 148 148 147 MHZ2-20 277 277 277 277 MHZ2-25 494 496 495 495 12-2-41 41 Parallel Style Air Gripper With Dust Cover Series MHZJ2 Size: 6, 10, 16, 20, 25 How to Order MHZJ2 16 F9BW D Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Bore size Auto switch Action 6 10 16 20 25 6 mm 10 mm 16 mm

MHY2/MHW2

180 Angular Gripper Cam Style Rack & Pinion Style Series MHY2/MHW2 Series MHY/Cam Style Light and compact size in small bore sizes Overall length Lmm Effective holding moment Weight g Bore size mm Model Nm L 10 0.16 70 MHY2-10D 71 16 150 0.54 MHY2-16D 84 20 320 MHY2-20D 1.10 106 25 560 MHY2-25D 2.28 131 At pressure of 0.5MPa Auto switch mounting at 4 locations Improved mounting repeatability

180° Angular Style Air Gripper Series MHY2/MHW2

Style / Rack & Pinion Style MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHW -X MRHQ MA D655 180 Angular Style Air Gripper Cam Style Rack & Pinion Style Series MHY2/MHW2 Series MHY2/Cam Style Light and compact size in small bore sizes Over length L (mm) Gripping moment Bore size (mm) Model Mass (g) (Nm) L MHY2-10D 10 0.16 70 71 MHY2-16D 16 150 0.54 84 MHY2-20D 20 320 1.10 106 MHY2-25D 25 560 2.28 131

Vacuum

manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41

5 Port Solenoid Valve SY Series

In common Type 60 SY3 60 Cassette type Individual wiring SY5 60 P. 59 R Size and weight reduced by eliminating the manifold base + + P SY7 60 Type 41 Compact bar stock type Individual wiring SY3 40 SY5 40 + + + + P. 79 The base mounting facilitates maintenance after valves are changed.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift function5 Copy function, Auto-shift function 1 M5 female threaded 2 Face seal fitting 3 Compression fitting 4 1 output in SIO mode (NPN or PNP switching type) 5 This function is not provided with the IO-Link compatible type. 3-Screen Display High-Precision Digital Pressure Switch ZSE20B(F)/ISE20B Series How to Order p. 13