energy saving effect

G1, Symbol N: NPT1) Tank drain port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Automatic fluid fill system (Standard) Circulating fluid system Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless

Electric Actuator/Slider Type

Rubber back of the belt is softened and sticky f.

Rotary Actuator

Note) Flange type F is not available. Air cushion Number of auto switches Nil None C With air cushion Shaft type Nil 2 pcs. S 1 pc.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Rubber back of the belt is softened and sticky f.

Made to Order Specifications:

With Differential Pressure Gauge (GD40-2-01) 2. With IN-OUT Flange A differential pressure gauge that keeps track of the filter life is installed on the filter itself. This facilitates piping and achieves a compact design. Makes flange piping easier.

MGP

Note) Set ua so that the cushion approach speed u does not exceed 0.5m/s (or 0.4m/s in the case of the 80 or 100) 3.17-18 Compact Guide Cylinder Series MGP Operating Conditions F(N) Bore size (mm) Stroke (mm) Allowable lateral load (Air cushion) Model 200 175 150 125 100 75 50 25 MGPM 32 37 46 29 16 F MGPL 28 35 47 69 49 54 59 66 MGPM 75 87 103 46 20 43 48 54 62 MGPL 73 70 90 123 CL 65 71

3

C 1 B A Basic (mm) (mm) T 9 10.5 MKB20-Z MKB25-Z Model Yh9 18 23 A B C E F G 36 40 47 52 36 40 35.5 40.5 18 21 17.9 22.5 S 28 27.5 Clamp stroke Model Rod state 0 0.043 0 0.052 20 mm Q R 112.5 142 113.5 143 30 mm Q R 132.5 172 133.5 173 10 mm Q R 92.5 112 93.5 113 Retracted Extended Retracted Extended MKB20-Z 72 82 92 MKB25-Z 73 83 93 Note) The above figure is with the auto switch (D-M9) mounted

24

8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 Bore size [mm] f Bore size [mm] f 12 4.5 16 4.5 20 8.5 25 8 Section XX 4 x YY depth YL Bottom view 4 x MM depth ML 4 x NN through Z WA L 4 x OA through 4 x OB counterbore depth OL Section XX Section XX HA: T-slot for hexagon bolt (OL) X0.02 X0.02 DA DB H VA VB T R U X PW MGJ JMGP Section EE 1 G K J PB Q S GA GB T-slot 2 x P (Plug) PA + Stroke 2 x P XA

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

types of mounting are possible Knock pin holes provided on each mounting surface make positioning easy 34 35 38 40 50 63 Top mount Side mount (1in = 25.4mm) A Body length Application examples Drop prevention for a upward facing cylinder Holding a clamped condition Retraction is locked Retraction is locked T-slot side mount Bottom mount LOCK LOCK Series MLGP How to Order MLGP M Z73 40 50 F

VVXA21/22

154 172 158 218 200 208 194 264 246 244 230 310 292 280 266 356 338 316 302 402 384 352 338 448 430 388 374 494 476 VVXA21 VVXA22 A 38 49 B 20.5 [17.5] 26.5 [22.5] Model VVXA21 VVXA22 C 10.5 13 D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 5 The VX series will be revised shortly.

Stability of suction position,

Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32UM ZP3E-80UM 3 6 Displacement [mm] Displacement [mm] 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100UM ZP3E-40UM 3 8 Displacement [mm] Displacement [mm] 6 2 N, S, U, F, CL N, S, U, F, CL 4 1 2

LJ1H

LJ1H303NDStroke -F-X70 LJ1H303SEStroke -F-X70 LJ1H303PAStroke K-F-X70 LJ1H303NAStroke K-F-X70 Combinations other than the above cannot be manufactured.

Air Cylinder

0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 63.

CA2

9 6-8-19 20 Series CA2W Basic Style: CA2WB 2-P (Rc, NPT, G) Width across flats KA 4-J G G M Width across flats KA 2-cushion valve MM MM D E D E H1 H1 AL AL B1 N F K A N F K A B C S + Stroke H H + Stroke ZZ + 2 strokes e e e l + Stroke f 9 f 9 l l 9 f Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

MXQ

F A F MX MTS Lr MY 16 16 16 Lr = 120 mm MXQ16-10 MXQ16-10 MXQ16-10 0.04 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-125 MXQ16-125 MXQ16-125 CY MXQ16-50 MXQ16-50 MXQ16-50 0.06 MXQ16-75 MXQ16-20 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-30 MXQ16-30 0.12 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-75

Air Slide Table Series MXQ

Table displacement of section A when loads are applied to the section F with the slide table retracted.

Air Slide Table Series MXS

Table displacement due to roll moment load Table displacement of section A when loads are applied to the section F with the slide table retracted.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQ2 Material: Chromium molybdenum steel (Nickel plated) Bore size (mm) RQ B D E F M T1 T2 Part no.

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5