VZ3000

VFR Thread type 1 3 5 F Z Plug-in VZ3 4 VP4 Note) VZS 1 0 5 L Non plug-in VZ3 4 VFS Type of actuation Thread type VS4 2 position single Nil Rc F N T G NPT VQ7 1 Body option NPTF EVS 0: Individual exhaust for the pilot valve Port size 2 position double 1 8 Nil: Without sub-plate 01: Rc With sub-plate VFN 2 3(R) port PE port 3: Common exhaust type for main and pilot valve 3 position closed

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6 to 12 Applications B B 8 x 18 8 x 18 F F S S Conduit terminal: T (V) (U) E 25 32 G1/2 R T B 8 x 18 F S (mm) Electrical entry Grommet Model Applicable flange Conduit DIN terminal Conduit terminal U 103.5 106 106 B C D A E F H N Q R S N.C.

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

HRX-OM-X084

Piping thread type : When F is selected, G thread adapter set will be added.

F

F E R E N T D I A.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

0.4

F None Nil IN side port size OUT side port size DIN rail mounting (For manifold) D Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 F With bracket Name plate N Note) When two or more symbols are specified

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

Stations: 4 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 7 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 20 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 9 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 7 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 12 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 6 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 8 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 9 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 3 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 2 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 4 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc