ZP

D. Applicable tube O. D.

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Vacuum

Entry-Mounting 04 o4 Tube o a o 06 s6 Tube a o a o 08 08 Tube a a E E 5 List O Pad Dia.

Vacuum

Entry-Mounting 04 o4 Tube o a o 06 s6 Tube a o a o 08 08 Tube a a E E 5 List O Pad Dia.

Speed Controller with Uni One-touch Fitting AS Series

M Weight (g) Model Applicable tubing O.D. d D3 L3 L4 AS231F-U01-23 AS231F-U01-04 AS231F-U01-06 AS231F-U01-08 AS231F-U02-04 AS231F-U02-06 AS231F-U02-08 AS231F-U02-10 AS331F-U02-06 AS331F-U02-08 AS331F-U02-10 AS331F-U02-12 AS331F-U03-06 AS331F-U03-08 AS331F-U03-10 AS331F-U03-12 AS431F-U04-10 AS431F-U04-12 3.2 4 6 8 4 6 8 10 6 8 10 12 6 8 10 12 10 12 7.8 8.9 11.0 15.2 8.9 11.0 15.2 18.5 11.0

High Purity Chemical Valve

Dimensions LLCmA-mm-C Stations 4 x Mounting hole for W Y A K D L3 L2 L1 (Max.

KG

(mm) (1) D L Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

JXCx-OMX0009

C to 9 (No used) D Data editing error receiving E Parameter anomaly detection As same as Single numerical data instructions.

JXCx-OMT0061CN

) 2 2 3 3 4 READY 4 5 ALARM 5 6 6 7 7 0 0 8 8 9 9 A A () B B C C D D 1 E E 2 F F 0 1 F0 1 71 () F8 2 F0 2 F0 (1 )*2 (2 ) *1 3 F0 3 F0 ()*2 *1 RWw0,bit4F: 12 *2 RWw0,bit4F: 93 - (2)[IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP

JXCx-OMT0062

*1) Procedures for resuming operation when alarm group D is generated 1.

Dual Speed Controller with One-touch Fitting Series ASD

ASD230FM (4, 6, 1/8", 5/32", 1/4"), ASD330FM (6) are POM. 15-9-69 Series ASD-FM Dimensions: Metric Size ASD230FM ASD330FM/430FM Applicable tubing O.D. d Applicable tubing O.D. d L2 L3 M1 L2 L3 M1 D2 D2 L1 L1 L4 L4 H H (Hexagon width across flats) (Hexagon width across flats) D3 D3 L5 A1 A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M1 Max. Min. Max. Max. Min. Min.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 D2 L2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 (1) Model L3 Model Weight (g) Weight (g) M1 d M1 D1 D2 L2 L1 D2 D1 L2 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 3.2 4 6 4 6 6 8 6 7 8 12 13 26 31 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Series KC Self-seal Fittings

A1 M A2 D L Part No.

KN Series Nozzles for Blowing

L1 M Width across flats H1 H2 Model Nozzle size D Weight (g) M D KNS-08-075-4 KNS-08-100-4 KNS-10-075-4 KNS-10-090-8 KNS-10-100-4 0.75 x 4 1 x 4 0.75 x 4 0.9 x 8 1 x 4 8 8 10 10 10 12 12 14 14 14 14 14 17 17 17 24.3 24.3 24 24 24 16 16 17 17 17 17 17 24 24 24 2 H2 H1 L1 Low noise nozzle with male thread/KNS (mm) Model Nozzle size D Connection thread L1 A Width across flats H1 Weight (g)

ARM10/11

ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate /min(ANR) Flow rate /min(ANR) Pressure Characteristics ARM10F-06 ARM10

Compact Manifold Regulator

IC Dimensions ITVH ARM10-06 08 For dimensions and accessories of One-touch fittings, please refer to page 745.

ARM10/11

ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate /min(ANR) Flow rate /min(ANR) Pressure Characteristics ARM10F-06 ARM10

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with