Table of Contents

17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5 CY1R50 25 110 8.6 10 M8 x 1.25 15 Rc 1/4 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x

Table of Contents

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Table of Contents

M6 M8 M5 M6 M8 M5 M6 M8 M4 M5 M6 M8 Rc 1 8 Model ZPT02 to ZPT08 (3.5) except 2, 4 2.5 (3) except 2, 4 3.5 () except 2, 4 (3.5) 2.5 (3) 3.5 () ( )( )( ) 10 (7) 10 (6.5) 12 (6) (13) 10 (6.5) 12 (6) (12) 12 (6) (13) ZPT10 10 (6.5) 12 (6) (13) ZPT13 11 (7) 15 (7) 15 (13) ZPT16 ZPT20 (8.5) 15 (8) 16 (17) (16) (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

CRB2/CRBU2/CRB1

Q1 M3 5.5 to 8 Y-1 10 15 X-3 7.5 to 14 M3 Y = M3, M4 7.5 to 9 Y-1.5 L2 = L1(3 x P) C2 = C 15 20 X-4 M3, M4 10 to 18 9 to 10 Y-1.5 M3, M4, M5 X = 20 30 12 to 20 X-4.5 M3, M4, M5 11 to 13 Y-2 M3, M4, M5, M6 L1 = Q2 = M 30 40 14 to 22 X-5 14 to 15 Y-4.5 M3, M4, M5, M6 M3, M4, M5, M6, M8 24 Simple Specials Series CRB2 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A10 Symbol

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

CJ2

DNTJ-010A 10 16 7 8 8.1 9.2 M4 x 0.7 M5 x 0.8 3.2 4 NTJ-015A -X 20LD LB L H X GB NB D NA C MM B LX A LH Bore size (mm) 10 16 Y 16 23 20 28 5 9.5 4 13.5 14 M4 x 0.7 12 12 15 8 3.5, 6.5 counterbore depth 4 8 Data 20 26 20 28 5 9.5 5 13.5 20 M5 x 0.8 18.3 16 15 10 4.5, 8 counterbore depth 5 8 Dimensions by Stroke: Spring Return Symbol Z S 5 to 15 Stroke Bore size (mm) 5 to 15 16 to 30 31 to

CQ2

Standard Bore (mm) Stroke range (mm) (mm) Q N M J F I E K2 G H K1 Th9 B C D L P W Z A 0 0.043 0 0.052 5 to 30 12 15 3.5 10 32 25 5 1.5 5.2 6 6 3.5 37.2 30.2 M3 X 0.5 15.5 M5 X 0.8 15 5 to 30 16 15 3.5 38 31 20 10 38 29 6 1.5 6 8 8 3.5 M4 X 0.7 M5 X 0.8 20 0 0.043 0 0.043 5 to 50 20 5.5 25.5 17.5 43 34 9.5 47 36 8 2 8 7 10 4.5 M5 X 0.8 M5 X 0.8 13 5 to 50 25 5.5 28 19 47 37 11 52

Air Slide Table

M5 x 0.8 4.4 4 9 MXQ12B M6 x 1 7.4 7 12 MXQ16B M6 x 1 7.4 10 15 MXQ20B M8 x 1.25 18 14 20 MXQ8C M4 x 0.7 2.1 6 9 MXQ12C M5 x 0.8 4.4 8 12 3.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

ZP

Pad type ZP3-T10B;-A12-B5 [Weight: 19.0 g] ZP3-T13B;-A12-B5 [Weight: 19.2 g] ZP3-T16B;-A12-B5 [Weight: 19.3 g] M5 x 0.8 M5 x 0.8 M5 x 0.8 2 5 5 5 Width across flat 14 Width across flat 14 Width across flat 14 2 2 18 18 15 10 18 M12 x 1 M12 x 1 M12 x 1 Width across flat 14 Width across flat 14 Width across flat 14 33 Barb fitting 33 33 5 5 5 15 10 15 10 2 2 1.8 1.8 1.8 14 13 8.4 11 10 6 11.4

ZP

across flat 8 (Hexagon) M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 5.5 5.5 8 8 (14.5) (15) 6.5 7 0.8 1.2 2 2 6 8 6.7 8.8 ZP2-TB10MU-B5 ZP2-TB15MU-B5 M5 x 0.8 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 5.5 5.5 8 8 8 7 (16) (15) 2 2 2 1.2 10 15 15.6 10.6 4 Symbol/Type Short-type Pad EU: Flat 2, 4, 6, 8, 15 Pad diameter Space-saving in the height direction How

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

Rotary Actuator/Vane Type

(Example) For M3: L2 = 6 mm L2 + (3 x P) L2 = Applicable shaft type: W Applicable shaft type: W X = Q2 = M [mm] Size CRB2, CRBU2 Y Q2 15 1.5 to 9 M3 20 1.5 to 10 M3, M4 30 2 to 13 M3, M4, M5 40 4.5 to 15 M3, M4, M5 [mm] Size CRB2 CRBU2 X Q1 X Q1 15 4 to 18 M3 1.5 to 18 M3 20 4.5 to 20 M3, M4 1.5 to 20 M3, M4 30 5 to 22 M3, M4, M5 2 to 22 M3, M4, M5 Symbol: A3 Symbol: A4 The long shaft can

Air Fittings & Tubing

Weight (g) <M5, M6> D1 D2 L1 L2 A M Nylon Urethane M5 X 0.8 M6 X 1.0 22.5 23 24 KXL04-M5 KXL04-M6 KXL04-01S KXL06-M5 KXL06-M6 KXL06-01S KXL06-02S KXL08-01S KXL08-02S KXL08-03S KXL10-02S KXL10-03S KXL10-04S KXL12-03S KXL12-04S 8 11 4 10.4 13 16 2.5 3.5 3.5 22 12 16 1 8 M5 X 0.8 M6 X 1.0 24 23.5 24 25 28 29 32 33 38 39 42 40 43 25 2.5 3 3.5 5.0 3.5 5.0 8 26 15 12.8 15 24 17 6 28 20 26 28 34

CXWM/CXWL

Note 2) 2 magnets for auto switches are installed in the housing. 15 10.5 12.5 15 15 10 23 23 12.5 15 15 17.5 15 17.5 9 17.5 14 16 22 23 23 24 22 23 23 24 15 17.5 15 17.5 12.5 15 12.5 15 8-26-20 19 Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type 20 Basic Type: CXWM20Stroke/50 to 200 SS 2 x 4-M5 x 0.8 through thread 2 x 2-5.2 through From the opposite side 2 x 2-9.5 counterbore

Vacuum Pad

Pad type ZP3-T10B;-A12-B5 [Weight: 19.0 g] ZP3-T13B;-A12-B5 [Weight: 19.2 g] ZP3-T16B;-A12-B5 [Weight: 19.3 g] M5 x 0.8 M5 x 0.8 M5 x 0.8 2 5 5 5 Width across flat 14 Width across flat 14 Width across flat 14 2 2 18 18 15 10 18 M12 x 1 M12 x 1 M12 x 1 Width across flat 14 Width across flat 14 Width across flat 14 33 Barb fitting 33 33 5 5 5 15 10 15 10 2 2 1.8 1.8 1.8 14 13 8.4 11 10 6 11.4

Free Mount Cylinder

M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 Without auto switch With auto switch Bore size (mm) 5 st 38 41 35 41 45 47 S 15 st 48 56 50 56 60 62 Z S Z 15 st 61 72 66 75 83 89 10 st 43 46 40 46 50 52 5 st 51 57 51 60 68 74 10 st 56 62 56 65 73 79 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 51 57 61 70 78 84 10 st 56 62 66 75 83 89 15 st 61 72 76 85 93

Smooth Cylinder/Low Speed Cylinder

(10) 15 (5) 1 pc. 10 15 5 10 10 15 (10) 15 (5) 2 pcs. 10 15 5 Note 1) 25 is only applicable for D-P3DW.