Corporation of America

Low Maintenance Filter Please insert into your SMC Pneumatics Product Binder All Industries General Manufacturing Industry VISIT US ON THE WEB AT www.SMCUSA.COM POW022-CP Low Maintenance Filter The element of the filter is constructed of a series of grooved filter plates and wave washers placed one above the other and compressed by the compact cylinder on the top of the filter.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D side U side Port plug VVQZ100-CP Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R Silencer (For EXH port) P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications

VFS

.: VFS2000-CP-(B) (01: Rc , 02: Rc ) 1 8 1 4 01 02 300 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Lead wire 5-bottom ported size (Refer to the below right.) 2-4.5 mounting hole Bottom ported Port Size Port Port size P01 P02 P, A, B Rc Rc EA, EB Rc Rc 1 8 1 4

Table of Contents

.: VFS2000-CP-(B) (01: Rc , 02: Rc ) 1 8 1 4 01 02 300 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Lead wire 5-bottom ported size (Refer to the below right.) 2-4.5 mounting hole Bottom ported Port Size Port Port size P01 P02 P, A, B Rc Rc EA, EB Rc Rc 1 8 1 4

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex30 to 250 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Vibration resistance 4.9 m/s2 Impact resistance 490 m/s2 to X,Y,Z directions 3 times for each Noise resistance 1000 Vp-p, Pulse width: 1 s, Rise time: 1 ns Weight 140 g (without lead wire) 225 g (without lead wire) Port size 3/8 inch tube 1/2 inch tube 3/4 inch tube Wetted material Body: New PFA, Sensor: New PFA, Tube: Super PFA Note 1) 1.6 to 20 l/min (0.1 MPa) with viscosity of 1 mPas (1 cP

Mechanical Valves Series NVM, NVFM, NVZNI

PSIG (5 Kgflcm2) Millimeters in Parentheses N\2M450-N01-08 e+ _i i MAX.H ' May be rotated without changing porl location A tJ D E to H 5.24 (1 34) 1 . 1 8 (30) 3.94 (100) 1 3 4 (34t 0.69 (17.5)o.20 {51 ).59 (15) 0.1 t4.5 F-(J-F 3.31 lbs (1.5 Ko) T.T 40" '75 PSIG (5 Kgf/cm2) Millimeters in Parentheses .Series NVM MECHANICALLY ACTUATED/PI LOT OPERATED DIMENSIONS NVZM4sO NVZil450-N010 ,^. fl cP

ZQ-OM01401

SI (kPa) 2) 3) (:psi) P 2) (99 10 ) 3) (1) VAVB (3) G 2m) W (2m) 4) (4) (5) (V ) 0 (M5x0.8) 5) K 1 3.2 () 4) 5) (1) VAVB 2 4 () 3 6 () 4 3.2 () 5 4 () 24 - No.ZQ-OM01401-B ZS-39-5G ZQ1-LW6-N-A 1) N NPN P PNP (1) 3 Assy ZQ1-PL11-A 4 Assy ZQ1-FC1-A 5 (10 ) ZQ1-FE2-A 6 ZQ1-CV 7 V VVQ1000-50A-C4 (1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A

VQZ100V-OMT0001

VQZ100 300 300 300 300 VQZ200 VQZ200 VQZ200 VQZ200 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000 VQZ3000 VQZ3000 VQZ3000 VQZ3000 VQZ20010002000 VQZ1003003000 (KQ2P) Assy Assy Assy Assy VQZ100 0.130.19Nm VQZ1000 0.180.25Nm VQZ2002000 0.250.35Nm VQZ3003000 0.50.7Nm Assy 11 No.VQZ100V-OMT0001 VQZ Series/ / / / EX510 EX510 EX510 EX510 VQZ100 VQZ100 VQZ100 VQZ100 PR () B VVQZ100-CP

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes

There are 10 styles available including electroless nickel plated for copper-free applications., FITTING W/CHECK, CONNECTORS, KC SELF SEAL FITTINGS, CP, KC 4 MM, .01294 lb