Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: TW4 (1/4 Inch Tube Weld), Connections, Outlet: TW4 (1/4 Inch Tube Weld), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: TW6 (3/8 Inch Tube Weld), Connections, Outlet: TW6 (3/8 Inch Tube Weld), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: 0 (No Pressure

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: 1 [-30 in.Hg

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: 2 [0 to 200

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port,

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port,

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet

Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet

Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet

Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet

Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet

Clean Gas Filter

Outside diameter 3/8" = 9.53 mm Stainless steel tube Nut Swagelok fittings by Swagelok Company VCR female nut (SS-8-VCR-1) Gland Swagelok fittings by Swagelok Company VCR gland (SS-6-VCR-3) Gasket Swagelok fittings by Swagelok Company VCR gasket retainer assembly (SS-8-VCR-2-GR) Be sure to conduct a helium leak test before using similar fittings from other companies.

HRX-OM-X010

The facility water outlet temperature can be up to 60 deg.C Pipe diameter Table 3-3 Pipe Diameter Pipe Diameter Recommended torque (Material: SS* vs SS) Facility water inlet Rc1/2 28 to 30Nm (20.7 to 22.1ft-lbf) Facility water outlet Rc1/2 28 to 30Nm (20.7 to 22.1ft-lbf) Circulating fluid supply Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Circulating fluid return Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf

HRX-OM-I051

Pipe diameter Table 3-3 Pipe Diameter Pipe Diameter Recommended torque (Material: SS* vs SS) Facility water inlet Rc1/2 28 to 30Nm (20.7 to 22.1ft-lbf) Facility water outlet Rc1/2 28 to 30Nm (20.7 to 22.1ft-lbf) Circulating fluid supply Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Circulating fluid return Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Main tank drain port Rc3/8 (with valve) Piping not necessary

HRX-OM-K003

Pipe diameter Table 3-3 Pipe Diameter Pipe Diameter Recommended torque (Material: SS* vs SS) Facility water inlet Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Facility water outlet Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Circulating fluid supply Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Circulating fluid return Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Tank drain port Rc3/8 (with valve) Piping not necessary

Operating Pressure: 20 [15 to 200 psig (0.1 to 1.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Nozzle: 316L SS; Diaphragm: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port Inlet: No Gauge Port, Pressure Gauge Unit: psig/bar (

Operating Pressure: 20 [15 to 200 psig (0.1 to 1.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Nozzle: 316L SS; Diaphragm: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port Inlet: No Gauge Port, Pressure Gauge Unit: psig/bar (or None

Operating Pressure: 10 [5 to 100 psig (0.034 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Nozzle: 316L SS; Diaphragm: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port Inlet: No Gauge Port, Pressure Gauge Unit: psig/bar (or