Seal Type: R (Rubber), Configuration: FIG (3-Position, Pressure Center), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust), Subplate: B04T (Bottom 1/2)

Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: Pilot Exhaust through Footprint, Subplate: A04T (Side 1/2)

Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust), Subplate: A04T (Side 1/2)

Seal Type: R (Rubber), Configuration: FHG (3-Posiiton, Closed Center), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: Pilot Exhaust through Footprint, Subplate: B04T (Bottom 1/2)

Seal Type: R (Rubber), Configuration: FIG (3-Position, Pressure Center), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: Pilot Exhaust through Footprint, Subplate: B04T (Bottom 1/2)

Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 3EZ (24VDC), Pilot: Pilot Exhaust through Footprint, Subplate: A04T (Side 1/2), Option: X1 (External Pilot Supply)

Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust), Subplate: w/o Subplate, Option: X1 (External Pilot Supply)

Seal Type: S (Metal), Configuration: FJG (3-Position, Exhaust Center), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: Pilot Exhaust through Footprint, Subplate: w/o Subplate, Option: X1 (External Pilot Supply)

Seal Type: R (Rubber), Configuration: FHG (3-Posiiton, Closed Center), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC)

Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust), Subplate: A04T (Side 1/2), Option: X1 (External Pilot Supply)

Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust), Subplate: A04T (Side 1/2), Option: X1 (External Pilot Supply)

Seal Type: R (Rubber), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust), Subplate: A06T (Side 3/4), Option: X1 (External Pilot Supply)

Seal Type: R (Rubber), Configuration: FHG (3-Posiiton, Closed Center), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust), Subplate: A06T (Side 3/4), Option: X1 (External Pilot Supply)

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

7

Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage Seal material Leakage rate (Water) Note 1) Fluid temperature (C) Ambient temperature (C) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 1 to 60 Note) 20 to 60 NBR (FKM) Note 2) 0.2 cm3/min or less 1 cm3/min or less Note) No freezing External Leakage Seal material Leakage rate (Water) Note 1) VXD23 to 26 (8A to 25A) VXD27

Air Slide Table

For details, refer to page 126. 46 MXQA Series Dimensions: MXQ 25A [Standard] MXQ 25A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Pilot Operated

Description Size Option Stainless steel Option Stainless steel Brass (C37) Brass (C37) 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 50A 15A to 25A 32A to 50A 15A to 25A 15A to 25A 32A to 50A 10A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 10A to 25A 32A to 50A 10A to 25A 32A to 50A 10A to 50A 32A to 50A 10A to 50A 10A to 25A 32A to

1

SY3000 SY5000 SY7000 Standard (0.7 MPa) Quick response type (0.7 MPa) High pressure type (1.0 MPa) SY30V-25A Gasket SY50V-25A Only metal seal type is available for the high pressure type. (1.0 MPa) a-side pilot valve Pilot cover x 1 + B tight flat head screw x 1 Coil type Nil T w Standard With power saving circuit Pilot cover Socket q w Rated voltage 5 6 24 VDC 12 VDC b-side pilot valve

2/3 Port Valve

Note 4) 32A to 50A are 80oC. q 32A to 50A 15A to 25A Stainless steel FPM/EPR Bonnet w 32A to 50A O ring e Stainless steel, FPM, 15A to 25A Stainless steel, Brass, NBR Stainless steel, EPR Diaphragm assembly r Stainess steel, Brass FPM/EPR 32A to 50A Valve spring Stainless steel t Stainless steel Copper NBR Polyacetal PTFE Class B molded Stainless steel, Silver FPM/EPR, PTFE 15A to 25A