3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ2-Z Series 10, 16 Air Cylinder 10-/1121-/22RoHS How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Nil A Rubber bumper (Standard) Air cushion 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location Nil S n 2 pcs. 1 pc. n pcs.

Shock Absorbers and Rate Controls

(Irtodel) Al d mensiDns in millimeters. (lhlog No. (I$odell A A I D E t H WT $tl oEfio.l il{s} 57.0 6i.0 l(10 x 1.0 3.0 N/A 8.6 49.4 8.6 10.? N/A r{/A N/A 0 t.t5rir(B) 8 t . 8 91.1 Ml2 x 1.0 3.3 l.l/A 8,6 71.4 0.9 14.2 N/A .0 9.7 (r.R)0Efl.251rr(r)8r.8 9 1 . ?

MY1

D-Y7P, D-Y7PV D-Y59B, D-Y69B D-Y59A, D-Y69A Internal circuits Lead wire length 0.5m 10 9 10 D-Y59A, D-Y69A Lead wire length 3m 53 50 53 Dimensions DC(+) Brown [Red] D-Y59A, D-Y7P, D-Y59B Main circuit of switch OUT Black [White] M2.5 x 4 Slotted set screw Indicator light 3.4 2.5 DC() Blue [Black] SMC 6.2 5 D-Y7P(V) 29 DC(+) Brown [Red] Main circuit of switch Most sensitive position 12.5 OUT

KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

XL

D-F9N D-F9P D-F9B Lateral Electrical entry 3 wire 2 wire Wiring system NPN type PNP type Output system 24VDC relay, PLC Applicable load Power supply voltage 12/24VDC (10 to 28VDC) Current consumption 8mA or less 10mA or less Load voltage 28VDC or less 24VDC (10 to 28VDC) Load current 50mA or less 5 to 30mA Auto Switch Internal Circuits Internal voltage drop 0.4V or less 1.5V or less 4.5V

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

High Vacuum Angle Valve, XL Series

D-F9N D-F9P D-F9B Lateral Electrical entry 3 wire 2 wire Wiring system NPN type PNP type Output system 24VDC relay, PLC Applicable load Power supply voltage 12/24VDC (10 to 28VDC) Current consumption 8mA or less 10mA or less Load voltage 28VDC or less 24VDC (10 to 28VDC) Load current 50mA or less 5 to 30mA Auto Switch Internal Circuits Internal voltage drop 0.4V or less 1.5V or less 4.5V

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

E D C ZL 3 2 ZY Dimensions: 10 mm Stroke A B (mm) J H F D C E A B I Model ZQ ZPR10F10-0-A10 10 12.5 39.5 10 12 23.4 50.5 84.5 With a stroke of 10 mm ZPR13F10-0-A10 13 15 23 ZF 10.5 13 40 23.9 51 85 ZPR16F10-0-A10 16 18 ZP S (mm) M14 x 1 ZCU Q: 4 Q: 6 Y Model R S R S Hexagon width across flats 19 AMJ ZPR10F10-0-A10 1.5 I 5 ZPR13F10-0-A10 10.4 20.6 12.8 21.6 Misc. 2 ZPR16F10-0-A10 Additional

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

) 16.5 23.7 (GZ, GS: 24.4) [25.4] P=19 23.5 11.5 122 (GZ, GS: 123.4) [125.4] 0.5 30 16.6 62.8 83.7 (GZ, GS: 84.7) [85.7] 21 2.8 R R R R P A A A A A 63.6 60 P 42 B B B B B 6-Rc(PT)1/4 (P, R port) Manual override L2 10 Depress and turn to operate and lock override.

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

C95

R CJ2 SW1 EE EE KK KK CM2 WA B D E B D ??

Vacuum Pad: Ball Joint Type

tubing O.D.Q I 5 H R J F Hexagon width across flats 10 Hexagon width across flats 2 E Hexagon width across flats 12 Applicable tubing O.D.Q D C Y 2 R H A B Hexagon width across flats 12 Hexagon width across flats 3 F E D C 3 2 Dimensions: 10 mm Stroke A A B (mm) B C D E F H I J Model ZPR10F10-0-A10 10 12 10 12.5 23.4 39.5 50.5 84.5 Stroke: 10 mm ZPR13F10-0-A10 13 15 23 10.5 13 23.9 40 51

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

n +4 0 R ra g n 0 n io at ot ra R 18 R n ot io ve R at at oo io ot ot R n gr ra y ng at ke e of +4 0 io n 0 ra 19 ng e e ov of o ke gr y Switch A Switch B Proper Auto Switch Mounting Position at Rotation End CDRA1W30 CDRA150 to 100 Auto switch D-A5 (A6/F5/J5) Auto switch D-A7 (A8/F7/J7) Operating range at proper mounting position (Lm/2) Operating angle m: Converts the operating range (Lm

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

, R port) M5 x 0.8 (A port) (Pitch) P=16 23 Manual override L1 L2 4.5 (Station 1) (Station n) (Light/surge voltage suppressor) + + + + 54.1 [61.1] 38.7 25.5 DIN terminal (D) M8 connector (W0) L plug connector (L) M plug connector (M) 49 49 49 49 P R P R P R P R 57.2 [59.4] 52.2 67 [69.2] 58.7 66.1 76.1 Max. 10 77 Pg7 65.2 [72.2] Approx. 300 (Lead wire length) 41.1 M8 x 1 58.6 68.1 Approx.

Compressed Air Preparation Filter

[mm] Mass concentration Cp Pressure dew point Concentration of liquid water Cw Concentration of total oil 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 [mg/m3] [C] [g/m3] [mg/m3] 0 As specified by the equipment user or supplier and more stringent than class 1 1 20 400 10 70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw

Air Pilot Operated Series NVSA

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

ZX

Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.

CY1

D-F7LF Note 2) D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-F7W/J79W D-F7WV D-F7LF Note 2) D-A73/A80 D-A73/A80 D-F7NTL D-F7NTL D-F79F D-F7BAL D-F79F D-F7BAL Bore size (mm) 6 27.5 28 40.5 40 32 36 33 35 10 35 35.5 45 44.5 39.5 40.5 40.5 39.5 15 34.5 35 62.5 62 39 58 40 57 20 64 64.5 50 49.5 68.5 45.5 69.5 44.5 25 44 44.5 71 70.5 48.5

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'