VXD21/22/23

LVN TI/ TIL PA Conduit terminal: T PAX PB Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N 60 62 62 Applicable flange N Q L K J B C H F E D A M 90 (100) 101 (111) 106 (116) N 25.5 28 28 M 82 (92) 93 (103) 98 (108) N M 82 (92) 93 (103) 98 (108) M 82 (92) 93 (103) 98 (108) Normally open Normally closed VXD2270 VXD2380 VXD2390 VXD2272 32A 40A 50A VXD2382 VXD2392 48 50

HRX-OM-R005

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

Flow Control Equipment

Due to meter-in control, the cylinder moves from A to B regardless of whether it is an initial operation or a normal operation. When it reaches B, the head pressure (PH) rises quickly as indicated by the line from C to D.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

IDG

HA AT (G) (B) (D) ID (H) AMG Purge air for dehumidification AFF AM Misc.

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: Rc, Port Size: 04 (1/2), Mounting: B (w/Bracket), Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: Rc, Port Size: 1/2, Mounting: w/Bracket, Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

VXR21/22/23

terminal DIN terminal Q N 59 60 60 Port size P Rc H F E A N Q L K J B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

KB

Bulkhead Female Connector: KBE H1 (width across flats) H2 (width across flats) T Connection thread Applicable Weight (g) D L A2 M A1 tubing Model O.D. 4 KBE1-04 KBE1-06 KBE2-06 KBE2-08 KBE2-10 KBE3-08 KBE3-10 KBE3-12 KBE4-12 34.5 35.5 37.5 39.0 41.5 43.5 45.0 46.0 44.0 31.5 32.0 33.5 35.5 38.0 39.5 41.0 42.0 41.5 17.9 27.0 26.0 29.5 57.5 51.6 63.0 83.4 66.6 16.0 15.0 15.5 17.0 15.5 15.5 19.5

Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146

CLA

Auto Switch Mounting Bore size Auto switch D-S5/S6/SS9W BA-04 SA-OS D-G5D IK59/G5 DWIK59W SA-OS SA-OB BA-lO 50 40 63 80 100 D-A5/A6IA59W D-FS D/JS D/FS DW/JS9W BT-04 BT-04 ST-06 ST-OB BT-OB D-FSNTL, FSSAL, FS9F O-A3/A44/G39/K39 BD1-04M BD1 -0SM SD1-0SM SOl-0BM SD1 -l0M D-GSSAUG59F/GSNTL D-A3 DC/A44C/G39CIK39C BA3-0S0 SA3-040 BA3-063 SA3-0BO BA3-100 D-A3 DCfA.44CfG39C/K39C: come With mounting

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 L2 D2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position)

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

B B B B 16.5 6-Rc(PT)1/8 (P, R port) 9 Manual override L2 Depress and turn to operate and lock override L1 Manual override (Non-locking) 50 [56.5] Built-in speed controller 37.6 31 20 2n-M5 X 0.8 (A, B port) B B 12 24 5.5 43.5 A A MAX: 13.5 23 (Pitch) P=16 [ ] for AC L plug connector (L) M plug connector (M) (Lead wire length) 300 300 (Lead wire length) 103.8 [106.4] 87.8 [90.4] 69 [70.3

CV/MVGQ

/Y7PV D-Y7W D-Y7WV D-G5W D-K59W D-G59F D-G5 D-K59 D-G5NTL Auto switch model D-F5 D-J5 D-F5W D-J59W D-F59F D-A5, D-A6 D-A3/A3C D-A44/A44C D-G39/G39C D-K39/K39C D-A59W D-F5NTL D-B5/B64 Bore size (mm) A A A A A A A B B B B B B B 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

IN RETURN IN RETURN IN RETURN IN PA PA PA PA PA IN PA IN 8 Valve for Water and Chemical Base Fluids VCC Series How to Order Manifold 02 VV CC1 G M 06 C4 04 With gate valve Passage number Gate valve and cleaning valve mountable number 2 port valve, Cleaning valve 2/3 port valves mixed mounting 2 M 02 04 06 Cleaning valve (2 port valve): 1 pc. + Gate valve: 1 pc.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-F5 D-J5 D-B5, B6 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Model D-F5W D-J59W D-F5BAL D-F59F D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A3C D-G39C D-K39C D-A44C D-A44,A44C D-A59W D-F5NTL D-B59W D-G39,G39C D-K39,K39C Bore size (mm) A B A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 0 (0.5) 0

-fl Seies

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .