Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4)

Regulator for 2 MPa ARX 20

G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

(N, E) ALT-5 (N, E) ALT-5-IS-1, 2 (N, E) ALT-9 (N, E) ALT-9-IS-1, 2 Material Qty. y G46-10-02(Nil, E) G46-P10-N02(N) 12374AP Pressure gauge 4 1 NBR Cam handle assembly Seal 5 6 7 8 1 2 1 1 12377 12384 Siphon tube assembly Float switch 123712A IS410-1, 2 IS410-1, 2 1049 ALF400 to 900, ALT-5/-9 Series Dimensions: Auto Feed Lube ALF400 ALF800/900 Port size Port size D ALF500/600 Port size

•

-lb2 09i\ ' -5f -16'~ .. , AS . ~43b'F~N02-07S 114' '" " " ,. , , 18,5 15 18 jl~' 11/1~ 1 _ , 10.2 # 23 19.8 20.3 2 3.1 18.5 ASP530F-NOJ...09S 5/ 16" NPT3/8 NPT1/8 5 1.3 28.2 41.9 56.2 50 3 l B.7 107 I 46.9 14.4 54 .1 32.6 20.8 11 6 19 I 112 (}I .-2 ; :)2.6 . " . " ... t AS P6:1oF.,..ci4:'M' .. .. -31&" ; ~~T; 12 . .. . I AS~'Nl>?f3S ~ ~ fit ' ..

NCQ2/CQ2

Note 2) ( ): Same dimensions as for those of -X202 Dimensions: Applicable to CQ2B -10D(C)Z Only 20 32 Double acting, Single rod Single acting, Spring return Single acting, Spring extend A B L A B L B A L Symbol Bore size Symbol Bore size Symbol Bore size 20 32 33 29.5 3.5 20 32 33 29.5 3.5 20 32 43 29.5 13.5 A B L A B L A B L 36.5 33 3.5 36.5 33 3.5 46.5 33 13.5 With Auto Switch: Applicable

Table of Contents

33 !4 !5 !

Compact Cylinder

Note 2) ( ): Same dimensions as for those of -X202 Dimensions: Applicable to CQ2B -10D(C)Z Only Double acting, Single rod Single acting, Spring return Single acting, Spring extend 20 32 A B L A B L B A L Symbol Bore size Symbol Bore size Symbol Bore size 20 32 33 29.5 3.5 20 32 33 29.5 3.5 20 32 43 29.5 13.5 A B L A B L A B L 36.5 33 3.5 36.5 33 3.5 46.5 33 13.5 With Auto Switch: Applicable

AC Servo Motor Driver (Network card type ）

(a) Method -1 and -33 1) Dog type home position return The following figure shows the operation of Homing method -1. The operation direction of Homing method -33 is opposite to that of Homing method -1.

Table of Contents

Bore size (mm) 80 NLP-80A PDU-25Z PSD-33 x 25 P75 DSM-30 CA80-1609 CA80-1604 P5 No.

Table of Contents

Port size 01 02 03 Dimensions Rc 1/8 (VXV31) Rc 1/4 (VXV31, 32, 33) Rc 3/8 (VXV32, 33) The single dimension is the same as a series of VX31, 32, 33 in page 17-3-85. Manifolds can also be manufactured with the same specifications. 17-3-86 1 The VX series will be revised shortly.

Compact Hydraulic Cylinder

Hs 12 Auto switch 24.5 24.5 A 33 B A 33 6.5 B D-A3m/G39/K39 D-A44 Approx. Hs 36 Auto switch Approx.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

33 33 33 11.5 11.5 13.5 13.5 11.5 11.5 13.5 13.5 26.5 26.5 26.5 26.5 Note) Refer to page 340 for dimensions of connector types. 139 Series SY3000/5000/7000/9000 Dimensions: Series SY7000 [ ]: AC 3 position closed center / exhaust center / pressure center Grommet (G), (H): SY7 40(R)G H 02 03 3 4 5 (A, B port) 3/8,1/4 21 13.5 (Light/surge voltage suppressor) 43.1 (For mounting) 2 x 4.3 61

AC Servo Motor Driver (Pulse input type/Positioning type ）

NORMAL GAIN ADJUSTMENT 61 to 6-33 6.

Table of Contents

(26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Made to Order

) 29.5 (39.5) 30.5 (40.5) 36 (46) 43.5 (53.5) 53 (63) 33 (33) 39.5 (39.5) 40.5 (40.5) 46 (46) 53.5 (53.5) 63 (63) 54.5 (54.5) 64 (64) 66.5 (66.5) 68 (68) 81 (81) 94.5 (94.5) 25.2 (32.4) 26 (36) 26 (38) 29 (39) 30.5 (40.5) 40 (50) 40.5 (50.5) 42 (52) 51 (61) 60.5 (70.5) 40.5 (40.5) 50 (50) 50.5 (50.5) 52 (52) 61 (61) 70.5 (70.5) 32.2 (39.4) 33 (43) 35 (47) 39 (49) 44.5 (54.5) 54 (64) 56.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K L M C D E H I A A B F 5.5 P M5 x 0.8 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 14 7 34 33 Rc 1/8 7.5 10.5 13 16 45 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 14 7 40 Rc 1/8 8 11 13 16 52 69 11 8 M10 x 1.5 50 Rc 1

Air Slide Table

MXQ 12C-mm5 With buffer, axial piping (12) Pilot port M5 x 0.8 (OUT) 12 33 2 Pilot port M5 x 0.8 (IN) 17 8.4 Pilot port M5 x 0.8 (IN) Symmetric type 33 12 41.4 27 Dimensions [mm] Model Standard type Shorter total length type ZZ M M MXQ12C-10Zl5 103.5 93 96 MXQ12C-20Zl5 113.5 103 98 MXQ12C-30Zl5 123.5 113 108 MXQ12C-40Zl5 141.5 131 126 MXQ12C-50Zl5 151.5 141 136 MXQ12C-75Zl5 195.5 185 180