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can be used, x: cannot be used, : cannot be set) Control mode Note 1) Controller type Positioning Position control Speed control Note 2) Torque control Note 3) Point table method Program method g 4 programs (Max.: 8 programs) p 3 points (Max.: 7 points) Note 4) LECSA (Incremental) g p g Note 4) Note 5) LECSB (Absolute) p g g Command method [Pulse-train] [ON/OFF signal] Specify point table

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g D2 M L2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

6.5 Operating port 2-Rc, G, NPT1/8 13 3 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 7.5 8 15 15 14 14 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 12 25 6.5 K NA-M6 x 1 thread depth 6.5 25 KA Stroke adjuster at extension end Stroke adjuster at retraction end 6 18 46.5 (With stroke adjuster at extension end) N-M5 x 0.8 thread depth 10 (Insert) 6-M5 x 0.8 thread depth 8 6

x 0.8 Rc 1/8, G 1/8, NPT 1/8 Port size CRJ Side ports M5 x 0.8 The service life of the shock absorber may be different from the rotary table body depending on the operating conditions.

( ) depth 4 +0.030 0 29.5 (Extension end adjuster) 10 Bottom view of MXQ12L-40 13228.5 J I 5.5 10 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 Max. 13 (Retraction end adjuster) 4H9 ( ) depth 4 +0.030 0 9 39 29 4H9 ( ) depth 4 +0.030 0 5 HA GA A B NN x M5 x 0.8 thread depth 10 9 8.5 9 4.2 4.2 A B 16 8 16 8 G (NN 1) x H H B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

, (H): SY3220(-F2) G H C4, N3 C6, N7 SY3220-M5(-F2) G H (A, B port) M5 x 0.8 2-M3 x 0.5 depth 3.5 (For mounting bracket) 9.5 4 23.5 25 16.9 28.5 [35.5] G: Approx. 300 H: Approx. 600 88.8 [93.2] (Lead wire length) 44.4 8.6 B A 10.2 Manual override (For manifold mounting) 22.2 A, B port Applicable tubing O.D.: 4, 5/32" : 6, 1/4" One-touch fitting 21.4 (35) (For mounting) 23.2 (27) N7:37.4 C6

A B C D E F G H J 1.6 M5 2.3 3.2 For other special options, refer to page 462.

M8 x 1.25 11 11 11 12 13 13 11 M5 x 0.8 106(114) 16 15(16) 30 30 25 20 20 20 20 20 20 25 32 40 50 63 80 100 23 Up to 200 201 to 350 69(77) M5 x 0.8 29 19.5 16.5 10(12) 40 31 M5 x 0.8 depth 7.5 5.5 M10 x 1.25 11 M6 x 0.75 111(119) 16 15(16) 25 Up to 300 301 to 400 71(79) Rc 1/8 35.5 19.5 20 10(12) 40 38 M5 x 0.8 depth 8 5.5 M10 x 1.25 10(11) M8 x 1.0 113(121) 16 15(16) 28.5 Up to 300 301

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 12 Flow characteristics 23 Valve model C[dm3/(s bar)] 0.037 0.076 0.054 0.099 C[dm3/(s bar)] 0.054 0.099 0.037 0.076 b 0.11 0.07 0.35 0.23 b 0.35 0.23 0.11 0.07 Cv 0.008 0.016 0.015 0.024 Cv 0.015

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

18 g*18 g*18 g*18 g*18 *14 The combination of metal bowl 2 and 8 is not available. *15 For the pipe thread type: NPT This product is for overseas use only according to the New Measurement Act.

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

7 169 Series KK Dimensions/Plug (P) Male thread type (mm) KK2 T Connection port size Mass g Effective area mm2 L1 Min. bore size A Body size H Width across flats Model L2 A T KK2P-M5M M5 x 0.8 7 15.8 2.5 18.8 4.4 2.6 KK2 12.3 M5 -01MS R 1/8 19.2 3.4 22.3 8.1 3.0 10 KK3P-01MS R 1/8 26.4 29.5 8.4 18.4 -02MS R 1/4 14 27.4 32.9 14.2 1/8 H L2 6.0 22.6 -03MS 19.9 R 3/8 17 30.4 35.8 28.1 L1 KK4P

Driver How to order Non-standard motor electric actuators LJ1 and LG1 G LJ1 Compatible model 7 G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yasukawa Electric Corporation How to order Applicable types LTF (non-standard motor) G LJ1 05 Compatible model 1 B Model Manufacturer part no.