Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Thermo-chiller

Total hardness [mg/L] 200 or less Ammonium ion (NH4+) [mg/L] 0.1 or less Calcium hardness (CaCO3) [mg/L] 150 or less Residual chlorine (Cl) [mg/L] 0.3 or less Ionic state silica (SiO2) [mg/L] 50 or less Free carbon (CO2) [mg/L] 4.0 or less Iron (Fe) [mg/L] 1.0 or less Reference item In the case of [Mcm], it will be 0.003 to 0.01.

Electric Slide Tables

9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

ZP

Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [q Adaptor] Not used for 02 to 08 diameter.

Modular F.R.L. Unit

5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) Orange mark AR30 Rc 3/8 AR60 Rc 1 0.6 0.6 0.5 0.5 2.

Air Cylinder

+ 35(n 2) 2 (n = 2, 4, 6)3 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting D-H7/H7W D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6)3 60 + 22.5 (n 2) (n = 2, 3, 4, 5) CM3 CG1 D-C7 D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6)3 50 + 20 (n 2) (n = 2, 3, 4, 5) CG3 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6)3 50 + 27.5 (n 2) (n = 2, 3, 4, 5) JMB D-M9V 5 5 10 + 10 (n

ZP

Elliptic pad 2.

90

Note 2) Fixed unit: kPa S r Lead wire with connector Nil None For double For single When q is E or FFor pressure switch for vacuum, Lead wire with connector (Length 2 m) With lead wire Red G White Red When q is V For switch with energy saving function, Lead wire with connector (Length 2 m) Black Black t Mounting Note) Nil L Mounted to the single unit Mounted to the manifold iOne-touch fitting

LVQ

LVQn n Dimensions (N.O. valve, double acting valve) 2 1 V S (mm) H A B C D E F G J K L M N P Q R W Model Vn Sn LVQ2 n LVQ3 n LVQ4 n LVQ5 n LVQ6 -Vn 2 1 V S 70 77 25.5 46 31.5 58 33.6 81 12 21.8 37 5 7 15 31.3 21 25.3 64 2 1 V S 83 95 28.5 57 34.5 69 45.4 99 16.5 32 50 6 7 20 37.2 25 31.2 82 2 1 V S 95 109 28.5 57 34.5 69 45.4 104.5 22 37.5 55.5 6 7 20 37.2 25 31.2 87.5 2 1 V S 130 141

New

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to be described by L (liter). 1 dm3 = 1 L 31 Series VXZ C : Sonic conductance [dm3/(sbar)] b : Critical pressure

Air Fittings & Tubing

D L M Q KJL01-00 KJL03-00 KJL07-00 1 8 5 32 1 4 12.7 12.7 13.6 8.4 9.3 12 1.6 2 3.3 15 15.8 17.4 2.5 3 4.6 5.8 6.3 7.6 Note1) D: max. diameter Kl Ml Plug-in elbow: KJL Tube O.D. (inch) Hl Min. hole dia. Weight (g) Fitting size d (inch) (1) Part No.

F

Note: The dimensions in brackets are for Soft Nylon. 1/2 1/2 KQH13-37S 22.23 30 22 22 9.6 44 P R O D U C T S E L E C T O R M A L E E L B O W : K Q L ( K Q 2 L ) Applicable Thread Model H D1 D2 L1 L2 A M Effective Weight Tube OD R(PT) (Hex) 0rifice (mm2) (g) (mm) Nylon/Urethane 3.2 M5x0.8 KQL23-M5 8 9.6 8 17.5 15 16 15.5 3/2.5 6 3.2 1/8 KQL23-01S 10 9.6 10 17.5 21.5 22.5 15.5 3/2.5 8 3.2 1

Booster Regulator/Air Tank

Model VBAT05A-SV-Q VBAT10A-SV-Q VBAT20A-RV-Q VBAT38A-RV-Q Accessory kit Safety valve Drain valve VBAT5A-Y-2 VBAT-S (Set pressure: 2 MPa) VBAT-V1 VBAT10A-Y-2 VBAT20A-Y-2 VBAT-R (Set pressure: 1 MPa) The Accessory Kit is a Set of Nos. q to t. VBAT20A-Y-2 VBAT10A-Y-2 Model Description No.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball AXT625-3A-10 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Auto Switch Guide

MK(2) Auto Switch Mounting Bracket Part No. (Including bracket, screw) RS Q G Auto switch mounting screw M2.5 x 10 l (D-E7A/E8A) M2.5 x 12 l (D-M5/M5W/M5T) Applicable bore size (mm) 6 BP-1 10 BP-1 15 BP-1 RS H A Cylinder series CDJP-D 1. Insert the auto switch mounting nut into the auto switch mounting groove and then set the switch at the mounting position by sliding. 2.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P = 11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 35 4 L2 38 L1 42 M plug connector (M) 1 2 3 4 5 n U side D side Stations Direct manual override (Non-locking) 24 15 43 L plug connector (L) Dimensions n: Stations n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31

Pilot Operated

VXD2130 Coil with a full-wave rectifier (electrical option R) 10 Series VXD21/22/23 Dimensions Normally closed (N.C.): VXD2140/2150/2260 Normally open (N.O.): VXD2142/2152/2262 Conduit: C Grommet: G Q L Approx. 280 Q L M Approx. 300 G1/2 N f N B OUT IN 1 E C F H 2-P Port size D 2 x 8.5 a b e Conduit terminal: T d K J (Q) L A (Q) L DIN terminal: D 32 (44) N N G 1/2 G1/2 Cable 6 to 12 E R

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.