ZR

Output Specifications 25 (L) 1 output NPN open collector 30 V, 80 mA or less Analog output (1 to 5 V) ZSE4 ZSE4B 26 (L) 67 (L) 1 output PNP open collector 80 mA or less 26 (L) Analog output (1 to 5 V) ZSE4E 27 (L) 2 outputs NPN open collector 30 V, 80 mA or less 67 (L) 2 outputs PNP open collector 80 mA or less 13-3-16 16 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy

0.4

With lead wire Nil 30 50 0.6 3 5 Flow/Exhaust Characteristics of Ejector Unit (The flow characteristics are for the supply pressure of 0.5 MPa.)

0.4

Applicable fitting size Noise reduction (dB) Effective area (mm2) (Cv factor) Series Model A L D d D VQ2000 10 AN20-C10 36.5 57.5 30 16.5 30 Elbow fitting assembly VVQ2000-F-L(C4/C6/C8/N3/N7/N9) It is used for piping that extends upward or downward from the manifold.

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 4A FMW-4200-X5 .2 5 30 .5 .8 4A FMW-4200-X10 .5 5 30 1.0 1.5 4A FMW-4200-X30 1.5 30 30 2.0 3.0 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 4A FMW-4200-X5 .2 5 30 .5 .8 4A FMW-4200-X10 .5 5 30 1.0 1.5 4A FMW-4200-X30 1.5 30 30 2.0 3.0 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 4A FMW-4200-X5 .2 5 30 .5 .8 4A FMW-4200-X10 .5 5 30 1.0 1.5 4A FMW-4200-X30 1.5 30 30 2.0 3.0 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

FMW-4200-X4W .5" WC 4" WC 10 0.5" WC 1.2" WC 4A FMW-4200-X5 .2 5 30 .5 .8 4A FMW-4200-X10 .5 5 30 1.0 1.5 4A FMW-4200-X30 1.5 30 30 2.0 3.0 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

5 Port Solenoid Valve, Series VQC

B 8B () (+) Station 8 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL. A 9A () (+) SOL. B 9B () (+) Station 9 SOL. A 10A () (+) Note) There is no polarity. This device can also be used as a negative common. SOL.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

In this case, a DIN rail which is approx. 30 mm longer than the manifold with the specified number of stations is attached. When DIN rail is unnecessary (DIN rail mounting brackets only are attached.) Indicate the option symbol, -D0, for the manifold part number.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

In this case, a DIN rail which is approx. 30 mm longer than the manifold with the specified number of stations is attached. When DIN rail is unnecessary (DIN rail mounting brackets only are attached.) Indicate the option symbol, -D0, for the manifold part number.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Molded-case circuit breaker (Note 1, 3) Fuse Frame, rated current Magnetic contactor Driver Voltage Voltage AC [V] Class Current Power factor Power factor (Note 2) [A] AC [V] Improving reactor is Improving reactor is not used used LECSB2-T5 30 A frame 5 A S-N10 10 LECSB2-T7 LECSB2-T8 30 A frame 10 A 30 A frame 5 A 15 Mitsubishi 240 T 300 Electric Corporation LECSB2-T9 30 A frame 15 A 30 A

Table of Contents

or less 40 or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

VQ5000

Polarity SOL.A 1A ( ) ( + ) SOL.B 1B ( ) ( + ) 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A ( ) ( + ) SOL.B 2B ( ) ( + ) 2 stations SOL.A 3A ( ) ( + ) SOL.B 3B ( ) ( + ) 3 stations SOL.A 4A ( ) ( + ) SOL.B 4B ( ) ( + ) 4 stations SOL.A 5A ( ) ( + ) 10A COM SOL.B 5B ( ) ( + ) 5 stations

Compact Manifold Regulator Series ARM5

PBT Material 30 40 0.5 g Mass 30 6.5 (R) 2 4.5 1 16 4 11 523 Series ARM10F Made to Order Specifications: Please contact SMC regarding detailed specifications, dimensions and delivery.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Note 2) Min. operating frequency is once in 30 days.

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How To Order Connector Ass y Number vJ1_g-2o--4A-@ ( 1 10VAC: VJ10-36-3A-') ---fvJ10-20-4AL type I a..l wira len.rrh.-i Lead wire length .

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How To Order Connector Ass y Number vJ1_g-2o--4A-@ ( 1 10VAC: VJ10-36-3A-') ---fvJ10-20-4AL type I a..l wira len.rrh.-i Lead wire length .

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

How To Order Connector Ass y Number vJ1_g-2o--4A-@ ( 1 10VAC: VJ10-36-3A-') ---fvJ10-20-4AL type I a..l wira len.rrh.-i Lead wire length .

FMW-4300-X5 .2 5 30 .3 .6 4A FMW-4300-X10 .5 10 30 .6 1.0 4A FMW-4300-X30 1.5 30 30 1.0 1.5 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.