SZ3000

Note C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 L6: With One-touch fitting for 6 (Elbow fetching upward) L8: With One-touch fitting for 8 (Elbow fetching upward) B6: With One-touch fitting for 6 (Elbow fetching downward) B8: With One-touch fitting for 8 (Elbow fetching downward) q SUP/EXH block assembly SZ3000-50-2Aw e r t y SZ3000-53-8A SZ3000-53-7A SZ3000-114-3A SZ3000

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.;'*'*lffi:';l .-^t /#!3 sL | ,..,9!!i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!

-fl Seies

3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.;'*'*lffi:';l .-^t /#!3 sL | ,..,9!!i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!

Soft Start-up Valve

Without light SY100-61-1 With light Rated voltage Voltage symbol Part number 24 VDC 24 V SY100-61-3-05 12 VDC 12 V SY100-61-3-06 100 VAC 100 V SY100-61-2-01 200 VAC 200 V SY100-61-2-02 110 VAC 110 V SY100-61-2-03 220 VAC 220 V SY100-61-2-04 Without light SY100-82-1 Caution With light Rated voltage Voltage symbol Part number 24 VDC 24 VN SY100-82-3-05 12 VDC 12 VN SY100-82-3-06 100

CA2

15 90 100 110 35 80 90 100 1 Different sides 2 Same side 100 100 D-A3 D-G39 D-K39 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 35 + 30(n2) n = 2, 3, 4 Different sides n Same side 10 35 55 80 90 80 90 80 90 1 Different sides 2 Same side 35 + 30(n2) n = 2, 3, 4 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3A !3B !4 !5 !6 !7 !

Fluoropolymer Piping Equipment

6 6 LQ1R51-M 19 1/2" 30.5 29 10 10 LQ1R5B-M1/2" 9 LQ1R5C-M3/4" 3/4" 30 39 16 15 LQ1R5D-M1/2" 9 LQ1R5G-M3/4" 1/4" 27.5 33.5 6 6 LQ1R5H-M3/4" 3/8" 29 35 10 10 LQ1R6A-M 1" 3/4" 36 38 6 24 9 18 21 43 28 10 7 29 14 28 26 54 39 10 10 LQ1R52-M 12 9.4 LQ1R53-M 19 3/4" 30 39 16 15 LQ1R54-M 12 9.4 LQ1R58-M 19 1/4" 27.5 33.5 6 6 LQ1R59-M 19 3/8" 29 35 10 10 LQ1R61-M 25 3/4" 36 38 16 16 LQ1R6B-M3/4"

HRX-OM-W002

pump mounted . 6-2 6.4 Option T1Inverter pump mounted . 6-3 6.5 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.1 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.2 Anti-quake bracket (Optional Accessories) . 6-5 6.6 Option ZRemoved Parts . 6-6 6.6.1 Option ZRemoved Parts . 6-6 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm

LEC-OM02704CN

616-40 6.1 (PA) 62 6.1.1 62 6.1.2 63 6.1.3 63 6.1.4 64 6.1.5 65 6.1.6 65 3 - 6.1.7 66 6.1.8 66 6.1.9 69 6.1.10 6-10 6.1.11 6-11 6.1.12 6-11 6.1.13 6-12 6.2 (PB) 6-14 6.2.1 6-14 6.2.2 6-15 6.3 (PC) 6-21 6.3.1 6-21 6.3.2 6-22 6.3.3 S 6-28 6.3.4 6-28 6.3.5 6-28 6.3.6 6-29 6.4 (PD) 6-30 6.4.1 6-30 6.4.2 6-31 6.4.3 (LSP)(LSN) 6-39 6.4.4 6-40

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ10001C AXT661 A Lead wire length 6 43 Lead wire length (mm) Manifold 300 600 1000 1500 2000 2500 3000 20 25 30 300mm 600mm 1000mm 2000mm 3000mm 1 VV5Q11 Connector 4 wire 2 wire 43 44 6 10 15 6 10 20 30 Without connector With connector/4 wire 1 2 With connector/2 wire Blank plate with a connector for individually outputing electricity to drive a single valve or equipment that are not

Magnetically Coupled Rodless Cylinder

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

New

30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil

HRX-OM-T004

30 31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRS090 Series 4.5 Message configuration 4-9 HRX-OM-T004 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

HRX-OM-R028

30 31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Read Data1 Byte Count Hi Lo 30 32 30 30 45 45 HRSH Series 4.5 Message configuration 4-9 HRX-OM-R028 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to

VCC

Indication of A B C D E F G H T VCKL1209-02F VCKL1008-02F VCKL1075-02F VCKL0806-02F VCKL0604-02F 19 9 to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 VNA VNB SGC SGH VNC VNH VND VCC VCC TQ 653 VCC Series Special Tools Tool for Attaching/Detaching Valve

ZR

Arrangement (Right valve station which is looked from valve side is first station.) 06 B Both sides 6 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 1 1 1 station only 1 station only 6 6 6 stations only 6 stations only All stations A All stations A If more than one spacer is required, specify all spacers.

VDW Series

Orifice size Voltage Orifice size mm 1 2 3 4 5 6 9 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other Symbol Series 1 2 1 2 3 2 3 4 1 1.6 1.6 2.3 3.2 2 3 4 10 G Grommet Electrical entry 20 30 Manifold Options Blanking plate assembly Types 10, 20 VVCW20 3A Type 30 VVDW 0 3A 2 Series Materials Materials 1 2 10 20 Symbol Nil A G H Plate material Seal material

VDW

ass'y is a corrosion resistant construction. 3 N.C. for manifold Orifice size Voltage Orifice size (mm ) 1 1.6 1.6 2.3 3.2 2 3 4 Symbol Series 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 1 2 3 2 3 4 10 G Grommet Electrical entry 20 30 Manifold Option Blanking plate assembly Types 10, 20 VVCW20 3A Type 30 VVDW 0 3A 2 Series

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Orifice size Voltage Orifice size mm 1 2 3 4 5 6 9 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other Symbol Series 1 2 1 2 3 2 3 4 1 1.6 1.6 2.3 3.2 2 3 4 10 G Grommet Electrical entry 20 30 Manifold Options Blanking plate assembly Types 10, 20 VVCW20 3A Type 30 VVDW 0 3A 2 Series Materials Materials 1 2 10 20 Symbol Nil A G H Plate material Seal material