AC Servo Motor Driver (Network card type ）

20 Vibration suppression control 1 Vibration frequency 50 60 50 Vibration suppression control 1 Resonance frequency 50 60 50 Vibration suppression control 1 Vibration frequency damping 0.20 0.15 0.20 Vibration suppression control 1 Resonance frequency damping 0.20 0.15 0.20 Vibration suppression control 2 Vibration frequency 20 30 20 Vibration suppression control 2 Resonance frequency

0.4

5 31.3 30 5 Socket connector pin arrangement Socket connector pin arrangement 50 L 50 L A code A code 14.8 SPEEDCON 44.5 L 50 2 1 5 PCA 1401804 Cable length (L) 1500 [mm] 3000 [mm] 5000 [mm] 4 3 M12 SPEEDCON 5.00.15 5.00.15 1401804 1401805 1401806 Socket connector pin arrangement A code Terminal no.

Compact 5-Port Solenoid Valve

Refer to the cylinder catalog for details. 10 Optimum Actuation Size Chart of Air Cylinder For JSY3000, A, B port: 8 Horizontal Vertical (Upward) Average speed [mm/s] 0 100 200 300 400 500 600 700 800 32 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 40 50 63 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke

0.4

AXT661-13AL AXT661-13AL-6 AXT661-13AL-10 AXT661-13AL-20 AXT661-13AL-30 AXT661-13ANL AXT661-13ANL-6 AXT661-13ANL-10 AXT661-13ANL-20 AXT661-13ANL-30 AXT661-14AL AXT661-14AL-6 AXT661-14AL-10 AXT661-14AL-20 AXT661-14AL-30 AXT661-14ANL AXT661-14ANL-6 AXT661-14ANL-10 AXT661-14ANL-20 AXT661-14ANL-30 Note) When using the negative common specifications, use valves for negative common. 79 Plug Lead

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

voltage Q CE-compliant Nil Symbol Rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 1313 Series VFR6000 Use as a guide for selection.

7.5

silencer SJ3000-50-3AS-ll SJ3000-53-1A SJ3000-42-lA-l SJ3000-76-2A-l VZ1000-11-1-l EX180-ll SJ3000-53-2A End block assembly 2 For U side Refer to the connector block assembly part no. shown below.

42

Seal Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Series Enter in order starting from the first station on the D side.

VFS

Body (Pilot exhaust) 20: Individual EXH Electrical entry T: Conduit terminal D-Y: DIN terminal G: Grommet E: Grommet terminal 30: Common EXH Coil rated voltage 3 2 1 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) Manifold only 4 220 VAC (50/60 Hz) Pilot type 6 5 24 VDC 12 VDC Internal pilot Nil External pilot R 7 240 VAC (50/60 Hz) 9 Other Option.

Base Mounted Metal Seal/Rubber Seal Series VQ

With lead wire ZS-20-A ZS-20-5A-50 0.6 m 3 m 5 m Nil 30 50 (The flow characteristics are for the supply pressure of 0.5 MPa.)

SQ1000/2000

50 Note) Available in units of 10 pieces.

Table of Contents

50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

MY1

Do not use a shock absorber and air cushion together. 200 200 100 1 2 3 4 5 10 20 30 1002 3 5 10 20 50 40 50 30 100 m2, m3 max. m1 max. m2 max. m3 max. m1 max.

New

Z Dimensions (mm) Model A B C E H I X Y Z J K L S 250 250 250 30 30 30 VXF25B< VXF26B< VXF27B< VXF28B< 182 206 206 206 18.3 34 34 34 90 100 110 120 78.4 78.4 78.4 78.4 118 121 121 121 59.8 59.8 59.8 59.8 47 50 50 50 24 24 24 24 18.6 18.6 18.6 18.6 30 30 30 30 17 17 17 17 Grommet Grommet (with surge voltage suppressor) DIN terminal Model Q R U Q R U 27 27 27 27 R U T 64.5 64.5 64.5 64.5

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VQ4 Electrical entry Body (Pilot exhaust) T: Conduit terminal D, Y: DIN terminal G: Grommet E: Grommet terminal 20: Individual EXH VQ5 VQC VQZ SQ Coil rated voltage 30: Common EXH 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) 9 Other 3 2 1 VFS 4 VFR 6 5 VQ7 7 Option Manifold only How to Order Pilot Valve Assembly Applicable

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

5 Port Solenoid Valve

Bore size CJ2 series Pressure 0.5 MPa Load ratio 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load ratio 50% Stroke 300 mm CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] 6 10 16 125 140 160 180 200 250 20 25 32 40 40 50 63 80 100 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward

C76

AM C e f K KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to 100 70 77 101 to 150 82 89

C76

to 50 77 88 AM C e f K KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to 100 70 77 101 to

ZL3-OM00801

-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa H 0.50 MPa 4 M4x110 2)1 :0.760.84Nm V * 1 3 ZL3 ZL3-SC1-A 4 ZL3 ZL3-SE1-A 1 2 18 No.ZL3-OM00801-A 5 ZL6 ZL6-SC1-A () * 6 ZL3/ZL6 ZL3-EP1-1 -A 1

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8