ZL3-OM00801

-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa H 0.50 MPa 4 M4x110 2)1 :0.760.84Nm V * 1 3 ZL3 ZL3-SC1-A 4 ZL3 ZL3-SE1-A 1 2 18 No.ZL3-OM00801-A 5 ZL6 ZL6-SC1-A () * 6 ZL3/ZL6 ZL3-EP1-1 -A 1

0.4

SOL.A 1A () (+) 1B () (+) Station 1 SOL.B 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A () (+) 2B () (+) Station 2 SOL.B SOL.A 1.

SQ1000/2000

AXT661-12AL AXT661-12AL AXT661-14AL AXT661-14ANL AXT661-13ANL AXT661-13AL 300mm 300mm AXT661-14AL-6 AXT661-14ANL-6 AXT661-13ANL-6 AXT661-13AL-6 600mm 600mm AXT661-14AL-10 AXT661-14ANL-10 AXT661-13ANL-10 AXT661-13AL-10 1000mm 1000mm AXT661-14AL-20 AXT661-14ANL-20 AXT661-13ANL-20 AXT661-13AL-20 2000mm 2000mm AXT661-14AL-30 AXT661-14ANL-30 AXT661-13ANL-30 AXT661-13AL-30 3000mm 3000mm Note) When

AC Servo Motor Driver (Network card type ）

.1 Linear encoder error 1-1 EDB 2A.2 Linear encoder error 1-2 EDB 2A.3 Linear encoder error 1-3 EDB 2A 2A.4 Linear encoder error 1-4 EDB Linear encoder error 1 2A.5 Linear encoder error 1-5 EDB 2A.6 Linear encoder error 1-6 EDB 2A.7 Linear encoder error 1-7 EDB 2A.8 Linear encoder error 1-8 EDB 2B Encoder counter error 2B.1 Encoder counter error 1 EDB 2B.2 Encoder counter error 2 EDB 30.1

Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

New

Z Dimensions (mm) Model A B C E H I X Y Z J K L S 250 250 250 30 30 30 VXF25B< VXF26B< VXF27B< VXF28B< 182 206 206 206 18.3 34 34 34 90 100 110 120 78.4 78.4 78.4 78.4 118 121 121 121 59.8 59.8 59.8 59.8 47 50 50 50 24 24 24 24 18.6 18.6 18.6 18.6 30 30 30 30 17 17 17 17 Grommet Grommet (with surge voltage suppressor) DIN terminal Model Q R U Q R U 27 27 27 27 R U T 64.5 64.5 64.5 64.5

Compact 5-Port Solenoid Valve

JSY3000: JSY31V-23-2A (2 pcs.) JSY5000: JSY51V-23-2A (2 pcs.) Manifold Options Base gasket * The body and plug-in spacer of the JSY1000 are separate. The connector gasket is not used.

Table of Contents

-30-24 Band Terminal conduit 8-30-25 Grommet 8-30-26 Rail 8-30-27 Connector Grommet Tie-rod Terminal conduit 8-30-28 8-30-31 8-30-29 8-30-30 8-30-32 Grommet Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.

MY1

Refer to page 30.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Note 2) Min. operating frequency is once in 30 days.

Base Mounted Metal Seal/Rubber Seal Series VQ

(For L kit) VVQ2000-2A-1-L o Manifold block assembly no.

VFS

1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly End plate (D side) assembly Plug-in type Non plug-in type VVFS5000-3A-2 !

7.5

4 Filter assembly (with filter) 30 m Light purple 14 Filter assembly SJ3000-110-2A Notch in screw 30 m Light purple , 5 pcs. included 15 Filter SJ3000-107-2A Filter guide O-ring Adsorbing and Transferring System Circuit Example (Ejector) Vacuum pump Release air SJ3A6 Release pressure switching valve (Built-in restrictor) Vacuum pressure switching

C76

2 2A 2B CJ1 CJP CJ2 t CM2 Front nose in line port Double end Built-in magnet Standard CG1 Component Parts MB No. Description Material Qty. Note No. Description Material Qty. Note MB1 Rod cover Aluminum alloy 1 White anodized q Wear ring Resin 1 !3 Head cover E Aluminum alloy 1 White anodized 2A Bumper A Urethane 1 !

C76

6 o @2 2A 2B 2D Front nose Front nose in line port Standard Double end Built-in magnet Component Parts No. Description Material Qty. Note Description Material Qty. Note No. Plug with needle Carbon steel 1 Rod cover White anodized Aluminum alloy 1 !3 q Wear ring Resin 1 Head cover E White anodized Aluminum alloy 1 !4 2A Bumper A Urethane 1 Head cover F White anodized Aluminum alloy 1 !

Metal Seal/Rubber Seal Series VQ Body Ported

U side end plate assembly D side end plateassembly Kit Common exhaust type VVQ0-3A-4-P VVQ0-2A-4-R F, P, S kit Built-in silencer, direct exhaust VVQ0-3A-4-P VVQ0-2A-4-S Common exhaust type VVQ0-3A-4-P VVQ0-2A-4-R C kit Built-in silencer, direct exhaust VVQ0-3A-4-S VVQ0-2A-4-S u U side end plate assembly no.