Table of Contents

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

0.55

How to Order Connector Assembly DC : V200-30-4A100 VAC : V200-30-1A200 VAC : V200-30-2AAC other voltages: V200-30-3AWithout lead wire : V200-30-A (With connector and 2 pcs. of socket) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm How to Order Include the connector assembly part number together with the part number for the plug connectors

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ1000 VVQ1000-1A-2-C3 VVQ1000-1A-2-C4 VVQ1000-1A-2-C6 VVQ1000-1A-2-M5 Port size With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch fitting for 6 M5 thread For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

VFR

Note 2) Min. operating frequency is once in 30 days.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

-59-2A 10-SV1000 16 SX3000-77-1A SX3000-77-1A 10 SV2000-59-1A SV2000-59-2A 10-SV2000 16 SV2000-59-3A SV2000-59-3A 10 SV3000-59-1A SV3000-59-1A 10-SV3000 10 SY9000-57-1A SY9000-57-1A 10-SV4000 261 Manifold Option 10-SV Manifold Option Circular connector / Cable assembly (26 pins) D-sub connector / Cable assembly (25 pins) AXT100 MC26 AXT100 DS25 Directional Control Valves Air Grippers

SZ3000

(Manifold specifications sheets are on pages 30.)

Table of Contents

5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

42

COM COM 0.6 m VVQ5000-44A-8-l () Red (+) () Red (+) 1.5 m VVQ5000-44A-15-l SOL.B SOL.B (+) White () (+) White () 3 m VVQ5000-44A-30-l Positive common Negative common Positive common Negative common l: Number of stations 1 to 16.

45

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

45

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

VZS

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

New

) DIN terminal Model E I J K S Q R U Q R U 27 20 157 30 20 143.5 R U T 64.5 20 149 52.5 Q VXF26D< 167 18.6 78.4 59.8 30 22 Series VXF2 Dimensions: Flange body II type VXF26D<<< Conduit terminal Conduit 206 206 S S J Qp2 Tp2 J 24.4 I R 24.4 I R Q z280 1/2 Exhaust port K 1/2 Exhaust port K (32) 8 x M10 x 1.5 x 75 8 x M10 x 1.5 x 75 G1/2 G1/2 (49) E (49) E U U (15) 24 24 96 96 (15) 106 106 Faston

Large Size Vacuum Module: Series ZR

nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate ZR1-SR2-35-A(a set of six threads) 6 ZR1-SR2-39-A(a set of six threads) ZR1-SR2-5-A(a set of six threads) 7 ZR1-SR2-8-A(a set of six threads) ZR1-SR3-19-1A(a set of two threads) ZR1-SR3-23-A(a set of two threads) 8 ZR1-SR3-24-1A(a set of two threads) Ejector unit + Pressure switch for vacuum/Filter

5 Port Solenoid Valve

SOL.A 1 Station 1 SOL.B 2 SOL.A 3 Station 2 SOL.B 4 SOL.A 5 Station 3 SOL.B L 60 L 6 SOL.A 7 Station 4 SOL.B 8 SOL.A 9 Station 5 SOL.B 10 SOL.A 11 Plug Station 6 SOL.B 12 SOL.A 13 Station 7 SOL.B 14 SOL.A 15 Station 8 SOL.B 16 SOL.A 17 Station 9 SOL.B 30 18 SOL.A 19 Station 10 SOL.B 20 SOL.A 15 14 2 1 21 Electric characteristics Terminal no.

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

5 Port Solenoid Valve

() (+) 19 30 Station 10 () (+) 20 SOL.A SOL.B () (+) 21 Station 11 () (+) 22 2 1 17 16 15 14 Terminal no.

VQ4000

KG 72309-0114-70-15, etc.

0.4

Station 7 SOL.B () (+) 14 Blue White 16 SOL.A () (+) 15 Purple None 17 Station 8 SOL.B () (+) 16 Gray None 18 SOL.A () (+) 17 Orange Black 19 Station 9 SOL.B 30 () (+) 18 Red White 20 SOL.A () (+) 19 Brown White 21 Station 10 SOL.B () (+) 20 15 14 2 1 Pink Red 22 Terminal no.

Proposals for Energy Saving

30 30 40 45 50 57.5 63.5 69 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 36 46 53 30 30 30 59 71 82 46 55 66 45 55 68 58 67 73 21 26 32 23.5 28 34.5 34.5 40 46.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 10 14 14 18 18 18 4 5 5 12 15 15 M6 x 1.0 M8 x