CNG ) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400
(for communication cable) kg 114 Weight(note9) (Note1) Use the water listed below.
) (mm) (mm) 25 50 75 100 125 150 175 200 50 MGPS50 2.69 3.03 3.64 3.98 4.32 4.66 5.00 5.34 80 MGPS80 6.63 7.36 8.95 9.67 10.4 11.1 11.8 12.6 4 8. 1 1 J mm) J) (J) 12 0.043 8.5 0.23 0.31 16 0.075 9.5 20 0.11 1.9 50 0.91 11.5 3.2 40 0.52 10.5 1 25 0.18 8.4 0.53 32 0.29 10.5 100 4.54 16.5 80 2.71 16.5 63 1.54 11.5 5.2 10.9 16.4 2 2 m M E k + = = 1 4 .. a Ek J M kg m kg ms ms 1 0.5m
m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-6-6 7 Model Selection Series MNB Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG
Symbol Symbol Definition Unit mm mm Nm Nm Nm Nm Nm Symbol Definition Allowable static load Collision speed Unit N mm/s mm/s kg kg kg F V An (n = 1 to 3) Corrected value of moment center position distance Ln (n = 1 to 3) Overhang M (Mp, My, Mr) Va Average speed Static moment (pitch, yaw, roll) Ma (Map, May, Mar) W Load weight Allowable static moment (pitch, yaw, roll) Me (Mep, Mey) Wa Allowable
200 mm/s or less Graph MGF 20 300 300 MGZ 200 200 MGF100 MGF100 20 MGT 100 100 MGF100 MGF100 10 MGF100 MGF100 50 40 50 40 MGF63 MGF63 Load mass: m0 (kg) Load mass: m0 (kg) 30 30 Load mass: m (kg) Load mass: m (kg) MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 MGF40 5 MGF40 2 2 D3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 10 50 100 5 -X Eccentric
) Load mass m (kg) Load mass m (kg) Eccentric distance l (mm) Eccentric distance l (mm) Eccentric distance l (mm) 25 50 MGQL32 to 100-Over 50 stroke MGQM32 to 100 (Slide bearing) MGQL32 to 100(25, 50 stroke) Load mass m (kg) Load mass m (kg) Load mass m (kg) Eccentric distance l (mm) Eccentric distance l (mm) Eccentric distance l (mm) 344 Series MGQ Construction/Series MGQM MGQM12 to 25 18
V V L2 Guide center line m m Through-hole mounting Bracket position Pin fixing Bracket MXZ12 MXZ16 0.35 0.35 Weight of a transferred object [kg] Weight of a transferred object [kg] 0.30 0.30 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0.00 0.00 0 5 10 15 20 25 0 5 10 15 20 25 Transfer speed [m/min] Transfer speed [m/min] MXZ20 MXZ25 1.4 0.8 Weight of a transferred object [kg] Weight
Circulating FluidTypical Physical PropertyValues Fluorinated Fluids Density [kg/m 3] Physical property value Temperature 10C 20C 50C 80C Specific heat C [J/(kg K)] 1.87 x 10 3 0.87 x 10 3 1.80 x 10 3 0.96 x 10 3 1.74 x 10 3 1.05 x 10 3 1.67 x 10 3 1.14 x 10 3 Water Density : 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 133 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A
Symbol Symbol Definition Unit mm mm Nm Nm Nm Nm Nm Symbol Definition Allowable static load Collision speed Unit N mm/s mm/s kg kg kg DF V An (n = 1 to 3) Corrected value of moment center position distance Ln (n = 1 to 3) Overhang -X M (Mp, My, Mr) Va Average speed Static moment (pitch, yaw, roll) Ma (Map, May, Mar) W Load mass Allowable static moment (pitch, yaw, roll) Individual -X Me (
F 58 psi Chart (6) m 73 psi Chart (7) F 1 Cylinder with Lock Series CNA2 Selection Chart Chart (5) Chart (2) 44 psi P < 58 psi 44 psi P < 58 psi 1000 1000 500 400 300 500 400 300 100 80 200 200 100 63 80 50 40 100 100 Load weight: m (kg) Load weight: m (kg) 63 50 50 40 30 50 40 30 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s
Load mass (kg) 40 50 40 32 E = 2 M + m 2 30 20 E = Kinetic energy (J) M = Mass of non-moving part (kg) m = Mass of moving part (kg) = Piston speed (m/s) 10 5 150 100 200 300 Model Selection Maximum speed (mm/s) RZQ Moving Part Mass Unit (kg) 2. Use the cylinder in applications in which the overrun will not cause any problem.
) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.
] Air consumption [L (ANR)] Judgment when 37 kg of output is required The next bore size after 40 is 50.
(Page 20) Communications RS-232C/RS-485 Weight Approx. 14 kg Approx. 18 kg Approx. 21 kg Approx. 31 kg Approx. 33 kg Accessories Power supply connector, Operation Manual Power supply cable should be ordered as an option (sold separately, page 22) or prepared by the user.
(including 6 M8 bolts)7 Weight (dry state) [kg] Approx. 222 Approx. 251 Approx. 315 1 Use fluid in condition below as the circulating fluid.
) 3) 1.61 lbs (0.73 kg) 3) 0.88 lbs (0.4 kg) 3) 0.8 lbs (0.36 kg) 3) 1/4 turn round knob with open/close indication window 1/4 turn lever knob 4) Pull twist knob with LOTO 5) Knob Multi turn round knob Option (Part number: AP PL227) 6) Operational Safety Device (OSD) LOTO (Lockout) N/A Standard N/A Option (Part number: AP PL225) 6) 1) 14 to 194F (10 to 90C) for Vespel seat.
weight: m (kg) 63 50 50 40 30 50 40 30 CL1 40 20 20 MLGC 10 10 CNG 5 4 3 5 4 3 MNB 2 2 CNA 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CNS Maximum speed: V (mm/s) Maximum speed: V (mm/s) CLS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63
0.16 (kg/50 st) Cylinder stroke 100 (st) 0.87 + 0.16 x 100 50 + 0.32 = 1.51 kg Mounting 0.32 (kg) (Double clevis) C95 CP95 NCM NCA D-X 20Data 6-13-7 7 Series CP95 Construction [First angle projection] !
Table: Without sub-plate, With sub-plate: Add 0.41 kg for plug-in type, 0.30 kg for plug lead type.